JPH0636584Y2 - 基板収納容器 - Google Patents

基板収納容器

Info

Publication number
JPH0636584Y2
JPH0636584Y2 JP1988113847U JP11384788U JPH0636584Y2 JP H0636584 Y2 JPH0636584 Y2 JP H0636584Y2 JP 1988113847 U JP1988113847 U JP 1988113847U JP 11384788 U JP11384788 U JP 11384788U JP H0636584 Y2 JPH0636584 Y2 JP H0636584Y2
Authority
JP
Japan
Prior art keywords
substrate
substrate storage
side holding
wafer
storage container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988113847U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0235448U (es
Inventor
俊作 児玉
賢司 杉本
茂 小原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP1988113847U priority Critical patent/JPH0636584Y2/ja
Publication of JPH0235448U publication Critical patent/JPH0235448U/ja
Application granted granted Critical
Publication of JPH0636584Y2 publication Critical patent/JPH0636584Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP1988113847U 1988-08-29 1988-08-29 基板収納容器 Expired - Lifetime JPH0636584Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988113847U JPH0636584Y2 (ja) 1988-08-29 1988-08-29 基板収納容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988113847U JPH0636584Y2 (ja) 1988-08-29 1988-08-29 基板収納容器

Publications (2)

Publication Number Publication Date
JPH0235448U JPH0235448U (es) 1990-03-07
JPH0636584Y2 true JPH0636584Y2 (ja) 1994-09-21

Family

ID=31354053

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988113847U Expired - Lifetime JPH0636584Y2 (ja) 1988-08-29 1988-08-29 基板収納容器

Country Status (1)

Country Link
JP (1) JPH0636584Y2 (es)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0810196Y2 (ja) * 1991-03-22 1996-03-27 ヤマハ株式会社 ウエハキャリア
JP2585005Y2 (ja) * 1992-06-04 1998-11-11 株式会社柿崎製作所 半導体ウエハ用バスケット
JP2002329702A (ja) * 2001-05-01 2002-11-15 Sumitomo Electric Ind Ltd 半導体基板洗浄治具と半導体基板洗浄治具へのウエハ挿入方法
JP5153399B2 (ja) * 2008-03-19 2013-02-27 三洋電機株式会社 基板ケース及び処理方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60926U (ja) * 1983-06-15 1985-01-07 ソニー株式会社 半導体基板の収納容器
JPS60177642A (ja) * 1984-02-24 1985-09-11 Hitachi Ltd 収納容器
JPS6139545A (ja) * 1984-07-31 1986-02-25 Toshiba Ceramics Co Ltd ウエ−ハ用キヤリヤ−

Also Published As

Publication number Publication date
JPH0235448U (es) 1990-03-07

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