JPH0621242Y2 - 集積回路試験装置 - Google Patents

集積回路試験装置

Info

Publication number
JPH0621242Y2
JPH0621242Y2 JP1984176115U JP17611584U JPH0621242Y2 JP H0621242 Y2 JPH0621242 Y2 JP H0621242Y2 JP 1984176115 U JP1984176115 U JP 1984176115U JP 17611584 U JP17611584 U JP 17611584U JP H0621242 Y2 JPH0621242 Y2 JP H0621242Y2
Authority
JP
Japan
Prior art keywords
chip
probe card
wafer
pad
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1984176115U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6190246U (enrdf_load_stackoverflow
Inventor
郁雄 八重樫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1984176115U priority Critical patent/JPH0621242Y2/ja
Publication of JPS6190246U publication Critical patent/JPS6190246U/ja
Application granted granted Critical
Publication of JPH0621242Y2 publication Critical patent/JPH0621242Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP1984176115U 1984-11-20 1984-11-20 集積回路試験装置 Expired - Lifetime JPH0621242Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984176115U JPH0621242Y2 (ja) 1984-11-20 1984-11-20 集積回路試験装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984176115U JPH0621242Y2 (ja) 1984-11-20 1984-11-20 集積回路試験装置

Publications (2)

Publication Number Publication Date
JPS6190246U JPS6190246U (enrdf_load_stackoverflow) 1986-06-12
JPH0621242Y2 true JPH0621242Y2 (ja) 1994-06-01

Family

ID=30733712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984176115U Expired - Lifetime JPH0621242Y2 (ja) 1984-11-20 1984-11-20 集積回路試験装置

Country Status (1)

Country Link
JP (1) JPH0621242Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57110946A (en) * 1980-12-27 1982-07-10 Seiko Epson Corp Heating device for specimen
JPS5939934A (ja) * 1982-08-27 1984-03-05 Yamaha Motor Co Ltd 小型発動発電機

Also Published As

Publication number Publication date
JPS6190246U (enrdf_load_stackoverflow) 1986-06-12

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