JPH0583517B2 - - Google Patents
Info
- Publication number
- JPH0583517B2 JPH0583517B2 JP63077595A JP7759588A JPH0583517B2 JP H0583517 B2 JPH0583517 B2 JP H0583517B2 JP 63077595 A JP63077595 A JP 63077595A JP 7759588 A JP7759588 A JP 7759588A JP H0583517 B2 JPH0583517 B2 JP H0583517B2
- Authority
- JP
- Japan
- Prior art keywords
- graphite
- silicon carbide
- silicon
- base material
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 58
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 57
- 229910002804 graphite Inorganic materials 0.000 claims description 57
- 239000010439 graphite Substances 0.000 claims description 57
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 49
- 239000000463 material Substances 0.000 claims description 36
- 239000011148 porous material Substances 0.000 claims description 31
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 26
- 229910052710 silicon Inorganic materials 0.000 claims description 26
- 239000010703 silicon Substances 0.000 claims description 26
- 239000002131 composite material Substances 0.000 claims description 22
- 239000010410 layer Substances 0.000 claims description 18
- 238000000576 coating method Methods 0.000 claims description 13
- 239000011248 coating agent Substances 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 239000002344 surface layer Substances 0.000 claims description 5
- 239000011247 coating layer Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 10
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- 238000005470 impregnation Methods 0.000 description 7
- 229910003902 SiCl 4 Inorganic materials 0.000 description 4
- 238000005336 cracking Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- -1 SiCl 4 and SiHCl 3 Chemical class 0.000 description 2
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 239000002296 pyrolytic carbon Substances 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 150000004756 silanes Chemical class 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5053—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
- C04B41/5057—Carbides
- C04B41/5059—Silicon carbide
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63077595A JPH01249679A (ja) | 1988-03-29 | 1988-03-29 | 黒鉛一炭化珪素複合体並びにその製造法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63077595A JPH01249679A (ja) | 1988-03-29 | 1988-03-29 | 黒鉛一炭化珪素複合体並びにその製造法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01249679A JPH01249679A (ja) | 1989-10-04 |
| JPH0583517B2 true JPH0583517B2 (de) | 1993-11-26 |
Family
ID=13638311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63077595A Granted JPH01249679A (ja) | 1988-03-29 | 1988-03-29 | 黒鉛一炭化珪素複合体並びにその製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01249679A (de) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000319080A (ja) * | 1999-05-07 | 2000-11-21 | Tokai Carbon Co Ltd | 炭化珪素被覆黒鉛部材 |
| JP4641535B2 (ja) * | 2007-07-27 | 2011-03-02 | 東洋炭素株式会社 | 還元性雰囲気炉用炭素複合材料及びその製造方法 |
| JP4641536B2 (ja) * | 2007-07-27 | 2011-03-02 | 東洋炭素株式会社 | 還元性雰囲気炉用炭素複合材料及びその製造方法 |
| CN102220108A (zh) * | 2011-01-12 | 2011-10-19 | 江西赛维Ldk太阳能高科技有限公司 | 一种用于多晶硅生产领域的防止硅液漏流用堵漏剂 |
| EP3338306A4 (de) | 2015-08-20 | 2019-05-01 | Entegris, Inc. | Siliciumcarbid/graphit-verbundstoff und daraus hergestellte artikel und anordnungen |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4826597A (de) * | 1971-08-04 | 1973-04-07 | ||
| JPS4983706A (de) * | 1972-11-24 | 1974-08-12 | ||
| JPS5180317A (de) * | 1975-01-07 | 1976-07-13 | Tokai Carbon Kk | |
| JPS5318613A (en) * | 1976-08-04 | 1978-02-21 | Kowa Kogyo | Method of preventing oxidation of graphite products and oxidation prevented products |
| JPS5530043A (en) * | 1978-08-23 | 1980-03-03 | Noboru Nakamura | Cylinder lock and alarm system therefor |
| JPS5684381A (en) * | 1979-12-04 | 1981-07-09 | Toshiba Ceramics Co | Carbon silicate material |
| JPS56145180A (en) * | 1980-04-10 | 1981-11-11 | Hitachi Chemical Co Ltd | Manufacture of silicon carbide clad carbon material |
| JPS578797A (en) * | 1981-03-24 | 1982-01-18 | Nippon Shoji Kk | Method and reagent for quantitative determination of free fatty acid |
| JPS58185488A (ja) * | 1982-04-15 | 1983-10-29 | ステンカ−・コ−ポレ−シヨン | 酸化及び侵蝕に抵抗性のある固体炭素物品及びその製造方法 |
| JPS62297467A (ja) * | 1986-06-18 | 1987-12-24 | Fujitsu Ltd | 炭化ケイ素被膜形成方法 |
-
1988
- 1988-03-29 JP JP63077595A patent/JPH01249679A/ja active Granted
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4826597A (de) * | 1971-08-04 | 1973-04-07 | ||
| JPS4983706A (de) * | 1972-11-24 | 1974-08-12 | ||
| JPS5180317A (de) * | 1975-01-07 | 1976-07-13 | Tokai Carbon Kk | |
| JPS5318613A (en) * | 1976-08-04 | 1978-02-21 | Kowa Kogyo | Method of preventing oxidation of graphite products and oxidation prevented products |
| JPS5530043A (en) * | 1978-08-23 | 1980-03-03 | Noboru Nakamura | Cylinder lock and alarm system therefor |
| JPS5684381A (en) * | 1979-12-04 | 1981-07-09 | Toshiba Ceramics Co | Carbon silicate material |
| JPS56145180A (en) * | 1980-04-10 | 1981-11-11 | Hitachi Chemical Co Ltd | Manufacture of silicon carbide clad carbon material |
| JPS578797A (en) * | 1981-03-24 | 1982-01-18 | Nippon Shoji Kk | Method and reagent for quantitative determination of free fatty acid |
| JPS58185488A (ja) * | 1982-04-15 | 1983-10-29 | ステンカ−・コ−ポレ−シヨン | 酸化及び侵蝕に抵抗性のある固体炭素物品及びその製造方法 |
| JPS62297467A (ja) * | 1986-06-18 | 1987-12-24 | Fujitsu Ltd | 炭化ケイ素被膜形成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01249679A (ja) | 1989-10-04 |
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