JPH0579169B2 - - Google Patents

Info

Publication number
JPH0579169B2
JPH0579169B2 JP62221515A JP22151587A JPH0579169B2 JP H0579169 B2 JPH0579169 B2 JP H0579169B2 JP 62221515 A JP62221515 A JP 62221515A JP 22151587 A JP22151587 A JP 22151587A JP H0579169 B2 JPH0579169 B2 JP H0579169B2
Authority
JP
Japan
Prior art keywords
semiconductor substrate
section
electric circuit
main surface
bonding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62221515A
Other languages
English (en)
Other versions
JPS6464228A (en
Inventor
Takashi Kusakari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP62221515A priority Critical patent/JPS6464228A/ja
Publication of JPS6464228A publication Critical patent/JPS6464228A/ja
Publication of JPH0579169B2 publication Critical patent/JPH0579169B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L24/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/02—Bonding areas ; Manufacturing methods related thereto
    • H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/02—Bonding areas ; Manufacturing methods related thereto
    • H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L24/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/023—Redistribution layers [RDL] for bonding areas
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/04042—Bonding areas specifically adapted for wire connectors, e.g. wirebond pads
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554—External layer
    • H01L2224/0555—Shape
    • H01L2224/05552—Shape in top view
    • H01L2224/05554—Shape in top view being square
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554—External layer
    • H01L2224/05599—Material
    • H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H01L2224/05617—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
    • H01L2224/05624—Aluminium [Al] as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321—Disposition
    • H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484—Connecting portions
    • H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H01L2224/48465—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73251—Location after the connecting process on different surfaces
    • H01L2224/73265—Layer and wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01013—Aluminum [Al]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01082—Lead [Pb]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/14—Integrated circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181—Encapsulation

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は半導体集積回路に関する。
〔従来の技術〕
従来の半導体集積回路は、第４図に示すよう
に、半導体基板１a上のほぼ中央部に電気回路部
１１aを形成し、電気回路部１１aの外周の半導体
基板１aの縁部にそれぞれが対応する電気回路部
１１aの電極と接続された外部接続用のボンデイ
ングパツド２を設けていた。
このような半導体集積回路を、第５図に示すよ
うに、リードフレーム８のアイランド９上に搭載
し、リードフレーム８のリード１０の先端部を露
出させた状態で全体をプラスチツクの外装樹脂１
２で覆つていた。
〔発明が解決しようとする問題点〕
上述した従来の半導体集積回路は、プラスチツ
クの外装樹脂の吸収した水分が半導体基板の周辺
部に最初に到達するので、半導体基板の外周部、
特に角部のアルミニウム又はアルミニウムを主成
分とするボンデイングパツドが腐蝕を起しやすい
という欠点がある。
〔問題点を解決するための手段〕
本発明の半導体集積回路は、半導体基板と、電
気回路を形成する前記半導体基板の主面と反対側
の面の中央部近傍に形成した外部接続用の複数の
電極パツドと、それぞれの前記電極パツドと対応
する前記電気回路の電極とを接続する金属導体
と、前記電極パツドを露出させて全面を覆つて形
成される絶縁膜とを有している。
〔実施例〕
次に、本発明について図面を参照して説明す
る。
第１図ａ及びｂはそれぞれ本発明の一実施例の
裏面図及びＡ−A′線断面図である。
第１図ａ及びｂに示すように、半導体基板１
と、半導体基板１の主面に形成した一点鎖線で示
す電気回路部１１と、主面と反対側の裏面側の中
央部近傍に形成した外部接続用の複数のボンデイ
ングパツド２と、電気回路部１１の外周の半導体
基板１の縁部に形成したそれぞれが対応する電気
回路部１１の電極に接続される複数のアルミニウ
ムのスルーホール３と、半導体基板１の裏面に形
成されたそれぞれのボンデイングパツド２とスル
ーホール３とを接続するアルミニウム配線４と、
ボンデイングパツド２を露出させて半導体基板１
の主面及び裏面を覆つて形成された絶縁膜として
のカバー膜６とを含む。
次に、第２図はリードフレームに搭載した第１
図の実施例の断面図である。
第２図に示すように、リードフレーム８のアイ
ランド９のマウント部７に半導体基板１の主面側
を下にして搭載し、ボンデイングパツド２とリー
ドフレーム８のそれぞれのリード１０のボンデイ
ング部とをオンデイングワイヤ５で接続する。
次に、リード１０の先端部を露出させた状態で
ボンデイングワイヤ５を含む半導体集積回路の全
体を覆つてプラスチツクの外装樹脂１２を形成す
る。
第３図ａ及びｂはそれぞれ本発明の第２の実施
例の裏面図及びＢ−B′線断面図である。
第３図に示すように、第２の実施例では回路の
機能分割が可能な場合に複数の機能的に分割され
た、第３図に一点鎖線で示す、電気回路部１１b
を半導体基板１bの主面上に形成し、電気回路部
形成領域外の半導体基板１bの中央部近傍に電気
回路部１１bのそれぞれの電極と接続された複数
のアルミニウムのスルーホール３を形成する。
更に、半導体基板１bの裏面側のスルーホール
３上にボンデイングパツド２を形成する。
第２の実施例では、半導体基板１bの裏面上に
アルミニウム配線が存在しないのでカバー膜６の
亀裂による電気回路部の機能劣化の発生を防止で
きる利点がある。
〔発明の効果〕
以上説明したように本発明は、ボンデイングパ
ツドを半導体基板の裏面中央部近傍に形成するこ
とにより、外装樹脂の吸収した水分が半導体基板
周辺部へ最初に到達するという特質から発生する
ボンデイングパツドの腐蝕を防止できる効果があ
る。又、ボンデイングパツドが長くなりシールパ
スが長くなることにより同様の効果が助長され
る。
【図面の簡単な説明】
第１図ａ及びｂはそれぞれ本発明の第１の実施
例の裏面図及びＡ−A′線断面図、第２図はリー
ドフレームに搭載した状態の第１図の実施例の断
面図、第３図ａ及びｂはそれぞれ本発明の第２と
実施例の裏面図及びＢ−B′線断面図、第４図は
従来の半導体集積回路の一例の表面図、第５図は
リードフレームに搭載した状態の第４図の半導体
集積回路の断面図である。 １，１a，１b……半導体基板、２……ボンデイ
ングパツド、３……スルーホール、４……アルミ
ニウム配線、５……ボンデイングワイヤ、６……
カバー膜、７……マウント部、８……リードフレ
ーム、９……アイランド、１０……リード、１
１，１１a，１１b……電気回路部、１２……外装
樹脂。

Claims (1)

    【特許請求の範囲】
  1. １ 半導体基板と、電気回路を形成する前記半導
    体基板の主面と反対側の面の中央部近傍に形成し
    た外部接続用の複数の電極パツドと、それぞれの
    前記電極パツドと対応する前記電気回路の電極と
    を接続する金属導体と、前記電極パツドを露出さ
    せて全面を覆つて形成される絶縁膜とを有するこ
    とを特徴とする半導体集積回路。
JP62221515A 1987-09-03 1987-09-03 Semiconductor integrated circuit Granted JPS6464228A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62221515A JPS6464228A (en) 1987-09-03 1987-09-03 Semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62221515A JPS6464228A (en) 1987-09-03 1987-09-03 Semiconductor integrated circuit

Publications (2)

Publication Number Publication Date
JPS6464228A JPS6464228A (en) 1989-03-10
JPH0579169B2 true JPH0579169B2 (ja) 1993-11-01

Family

ID=16767922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62221515A Granted JPS6464228A (en) 1987-09-03 1987-09-03 Semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS6464228A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014148634A1 (ja) 2013-03-21 2014-09-25 株式会社谷黒組 はんだ付け装置及び方法並びに製造された基板及び電子部品

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014148634A1 (ja) 2013-03-21 2014-09-25 株式会社谷黒組 はんだ付け装置及び方法並びに製造された基板及び電子部品
KR20150133185A (ko) * 2013-03-21 2015-11-27 가부시키가이샤 다니구로구미 납땜장치와 방법 및 제조된 기판과 전자부품

Also Published As

Publication number Publication date
JPS6464228A (en) 1989-03-10

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