JPH0577330B2 - - Google Patents

Info

Publication number
JPH0577330B2
JPH0577330B2 JP28920888A JP28920888A JPH0577330B2 JP H0577330 B2 JPH0577330 B2 JP H0577330B2 JP 28920888 A JP28920888 A JP 28920888A JP 28920888 A JP28920888 A JP 28920888A JP H0577330 B2 JPH0577330 B2 JP H0577330B2
Authority
JP
Japan
Prior art keywords
layer
groove
insulating layer
trench
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP28920888A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02134823A (ja
Inventor
Yasuhisa Sato
Takuyuki Motoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP63289208A priority Critical patent/JPH02134823A/ja
Priority to US07/401,690 priority patent/US4983543A/en
Priority to EP95105869A priority patent/EP0665589B1/en
Priority to DE68928873T priority patent/DE68928873T2/de
Priority to DE68928748T priority patent/DE68928748T2/de
Priority to EP89116458A priority patent/EP0359109B1/en
Priority to KR1019890012954A priority patent/KR920006573B1/ko
Publication of JPH02134823A publication Critical patent/JPH02134823A/ja
Publication of JPH0577330B2 publication Critical patent/JPH0577330B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP63289208A 1988-09-07 1988-11-16 半導体装置の製造方法 Granted JPH02134823A (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP63289208A JPH02134823A (ja) 1988-11-16 1988-11-16 半導体装置の製造方法
US07/401,690 US4983543A (en) 1988-09-07 1989-09-01 Method of manufacturing a semiconductor integrated circuit having an interconnection wire embedded in a protective layer covering the semiconductor integrated circuit
EP95105869A EP0665589B1 (en) 1988-09-07 1989-09-06 Method of manufacturing a semiconductor integrated circuit having an interconnection wire embedded in a protective layer covering the semiconductor integrated circuit
DE68928873T DE68928873T2 (de) 1988-09-07 1989-09-06 Herstellungsverfahren für eine integrierte Halbleiterschaltung mit einem Verbundungsleiter, der in einer Schutzschicht auf der integriertere Halbleiterschaltung eingebettet ist
DE68928748T DE68928748T2 (de) 1988-09-07 1989-09-06 Verfahren zum Herstellen einer integrierten Halbleiterschaltung mit einem in einer Schutzschicht integrierten Verbindungsleiter
EP89116458A EP0359109B1 (en) 1988-09-07 1989-09-06 Method of manufacturing a semiconductor integrated circuit having an interconnection wire embedded in a protective layer covering the semiconductor integrated circuit
KR1019890012954A KR920006573B1 (ko) 1988-09-07 1989-09-07 보호층내에 배선을 매설한 반도체 직접회로의 제조방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63289208A JPH02134823A (ja) 1988-11-16 1988-11-16 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPH02134823A JPH02134823A (ja) 1990-05-23
JPH0577330B2 true JPH0577330B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-10-26

Family

ID=17740177

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63289208A Granted JPH02134823A (ja) 1988-09-07 1988-11-16 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPH02134823A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0629246A (ja) * 1991-02-04 1994-02-04 Internatl Business Mach Corp <Ibm> 選択的な無電解メッキの方法

Also Published As

Publication number Publication date
JPH02134823A (ja) 1990-05-23

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