JPH0555804B2 - - Google Patents

Info

Publication number
JPH0555804B2
JPH0555804B2 JP62300494A JP30049487A JPH0555804B2 JP H0555804 B2 JPH0555804 B2 JP H0555804B2 JP 62300494 A JP62300494 A JP 62300494A JP 30049487 A JP30049487 A JP 30049487A JP H0555804 B2 JPH0555804 B2 JP H0555804B2
Authority
JP
Japan
Prior art keywords
detection signal
measurement
sin
cos
phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62300494A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01141308A (ja
Inventor
Masatsugu Mizuta
Hidekazu Imamura
Keiichi Noda
Toshihiko Sasaki
Kazuo Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP30049487A priority Critical patent/JPH01141308A/ja
Publication of JPH01141308A publication Critical patent/JPH01141308A/ja
Publication of JPH0555804B2 publication Critical patent/JPH0555804B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Optical Transform (AREA)
JP30049487A 1987-11-27 1987-11-27 エンコーダを用いた計測装置 Granted JPH01141308A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30049487A JPH01141308A (ja) 1987-11-27 1987-11-27 エンコーダを用いた計測装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30049487A JPH01141308A (ja) 1987-11-27 1987-11-27 エンコーダを用いた計測装置

Publications (2)

Publication Number Publication Date
JPH01141308A JPH01141308A (ja) 1989-06-02
JPH0555804B2 true JPH0555804B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-18

Family

ID=17885481

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30049487A Granted JPH01141308A (ja) 1987-11-27 1987-11-27 エンコーダを用いた計測装置

Country Status (1)

Country Link
JP (1) JPH01141308A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6492637B1 (en) 1999-05-10 2002-12-10 Citizen Watch Co., Ltd. Dimension measuring device
CN102317882B (zh) * 2008-12-29 2015-04-22 3M创新有限公司 使用幅材基准的锁相的幅材位置信号
CN101865699B (zh) * 2009-04-14 2012-11-21 鸿富锦精密工业（深圳）有限公司 弦波解码装置及其解码方法
JP2020034392A (ja) * 2018-08-29 2020-03-05 富士電機株式会社 エンコーダ、処理装置、処理方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61176815A (ja) * 1985-02-01 1986-08-08 Hitachi Ltd 測長器または測角器の補間方法
JP2609845B2 (ja) * 1985-12-17 1997-05-14 株式会社 マコメ研究所 デコーダを用いる内插回路
JPS62187210A (ja) * 1986-02-14 1987-08-15 Fanuc Ltd パルス分配型位置検出装置

Also Published As

Publication number Publication date
JPH01141308A (ja) 1989-06-02

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