JPH055191B2 - - Google Patents
Info
- Publication number
- JPH055191B2 JPH055191B2 JP2294785A JP2294785A JPH055191B2 JP H055191 B2 JPH055191 B2 JP H055191B2 JP 2294785 A JP2294785 A JP 2294785A JP 2294785 A JP2294785 A JP 2294785A JP H055191 B2 JPH055191 B2 JP H055191B2
- Authority
- JP
- Japan
- Prior art keywords
- cladding layer
- active layer
- layer
- compound semiconductor
- mixed crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013078 crystal Substances 0.000 claims description 47
- 238000005253 cladding Methods 0.000 claims description 46
- 239000000758 substrate Substances 0.000 claims description 18
- 239000011701 zinc Substances 0.000 claims description 18
- 239000004065 semiconductor Substances 0.000 claims description 15
- 150000001875 compounds Chemical class 0.000 claims description 14
- 229910052725 zinc Inorganic materials 0.000 claims description 12
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 3
- 238000010583 slow cooling Methods 0.000 claims description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 17
- 239000000243 solution Substances 0.000 description 8
- 238000005530 etching Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 229910052714 tellurium Inorganic materials 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Led Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60022947A JPS61183977A (ja) | 1985-02-08 | 1985-02-08 | 発光素子及びその製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60022947A JPS61183977A (ja) | 1985-02-08 | 1985-02-08 | 発光素子及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61183977A JPS61183977A (ja) | 1986-08-16 |
JPH055191B2 true JPH055191B2 (zh) | 1993-01-21 |
Family
ID=12096813
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60022947A Granted JPS61183977A (ja) | 1985-02-08 | 1985-02-08 | 発光素子及びその製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61183977A (zh) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62211970A (ja) * | 1986-03-13 | 1987-09-17 | Sanyo Electric Co Ltd | 発光ダイオ−ド |
JPS63278383A (ja) * | 1987-05-11 | 1988-11-16 | Toshiba Corp | 発光素子 |
JP2681352B2 (ja) * | 1987-07-31 | 1997-11-26 | 信越半導体 株式会社 | 発光半導体素子 |
JP2763008B2 (ja) * | 1988-11-28 | 1998-06-11 | 三菱化学株式会社 | ダブルヘテロ型エピタキシャル・ウエハおよび発光ダイオード |
JP2783580B2 (ja) * | 1989-03-08 | 1998-08-06 | 株式会社東芝 | ダブルヘテロ型赤外光発光素子 |
JP2818312B2 (ja) * | 1990-04-18 | 1998-10-30 | 株式会社東芝 | 発光素子 |
JP2560964B2 (ja) * | 1993-03-05 | 1996-12-04 | 日亜化学工業株式会社 | 窒化ガリウム系化合物半導体発光素子 |
DE4305296C3 (de) * | 1993-02-20 | 1999-07-15 | Vishay Semiconductor Gmbh | Verfahren zum Herstellen einer strahlungsemittierenden Diode |
DE19536438A1 (de) * | 1995-09-29 | 1997-04-03 | Siemens Ag | Halbleiterbauelement und Herstellverfahren |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50157084A (zh) * | 1974-05-28 | 1975-12-18 | ||
JPS5563887A (en) * | 1978-11-06 | 1980-05-14 | Nec Corp | Light-emitting diode |
JPS56111275A (en) * | 1980-02-07 | 1981-09-02 | Semiconductor Res Found | Luminous semiconductor device |
JPS56111276A (en) * | 1980-02-07 | 1981-09-02 | Semiconductor Res Found | Luminous semiconductor device |
JPS5958878A (ja) * | 1982-09-28 | 1984-04-04 | Matsushita Electric Ind Co Ltd | 半導体発光装置 |
JPS59225580A (ja) * | 1983-06-06 | 1984-12-18 | Hitachi Ltd | 半導体発光ダイオ−ドおよびその製造方法 |
JPS604277A (ja) * | 1983-06-22 | 1985-01-10 | Nec Corp | 発光ダイオ−ド |
-
1985
- 1985-02-08 JP JP60022947A patent/JPS61183977A/ja active Granted
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50157084A (zh) * | 1974-05-28 | 1975-12-18 | ||
JPS5563887A (en) * | 1978-11-06 | 1980-05-14 | Nec Corp | Light-emitting diode |
JPS56111275A (en) * | 1980-02-07 | 1981-09-02 | Semiconductor Res Found | Luminous semiconductor device |
JPS56111276A (en) * | 1980-02-07 | 1981-09-02 | Semiconductor Res Found | Luminous semiconductor device |
JPS5958878A (ja) * | 1982-09-28 | 1984-04-04 | Matsushita Electric Ind Co Ltd | 半導体発光装置 |
JPS59225580A (ja) * | 1983-06-06 | 1984-12-18 | Hitachi Ltd | 半導体発光ダイオ−ドおよびその製造方法 |
JPS604277A (ja) * | 1983-06-22 | 1985-01-10 | Nec Corp | 発光ダイオ−ド |
Also Published As
Publication number | Publication date |
---|---|
JPS61183977A (ja) | 1986-08-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH055191B2 (zh) | ||
JP2579326B2 (ja) | エピタキシャル・ウエハ及び発光ダイオード | |
JP2795195B2 (ja) | 発光素子 | |
KR100343849B1 (ko) | 에피택시얼웨이퍼및이의제조방법과휘도가증가된발광다이오드 | |
US5032539A (en) | Method of manufacturing green light emitting diode | |
JPH08139358A (ja) | エピタキシャルウエーハ | |
JP2817577B2 (ja) | GaP純緑色発光素子基板 | |
JP2000058904A (ja) | エピタキシャルウェハ及びその製造方法並びに発光ダイオード | |
JPS6017969A (ja) | 発光半導体装置 | |
JP2545212B2 (ja) | 青色発光素子 | |
JPS63213378A (ja) | 半導体発光素子の製造方法 | |
JP3140037B2 (ja) | 半導体発光素子 | |
JPS5958878A (ja) | 半導体発光装置 | |
JP2792249B2 (ja) | 発光素子およびその作製方法 | |
JP2621850B2 (ja) | 発光ダイオード | |
JP2804093B2 (ja) | 光半導体装置 | |
JP3116495B2 (ja) | 発光ダイオードの製造方法 | |
JPH098353A (ja) | エピタキシャルウェハ及びその製造方法並びに発光ダイオード | |
JPS63232379A (ja) | 半導体発光素子 | |
JP2783580B2 (ja) | ダブルヘテロ型赤外光発光素子 | |
JPH05198837A (ja) | 半導体発光素子 | |
JPS599984A (ja) | 燐化ガリウム緑色発光ダイオ−ド | |
JPS6158991B2 (zh) | ||
JPH0712095B2 (ja) | 赤外発光ダイオード用エピタキシャルウエハー | |
JPS62186576A (ja) | 砒化ガリウム赤外発光ダイオ−ドの製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |