JPH0549921B2 - - Google Patents

Info

Publication number
JPH0549921B2
JPH0549921B2 JP63214104A JP21410488A JPH0549921B2 JP H0549921 B2 JPH0549921 B2 JP H0549921B2 JP 63214104 A JP63214104 A JP 63214104A JP 21410488 A JP21410488 A JP 21410488A JP H0549921 B2 JPH0549921 B2 JP H0549921B2
Authority
JP
Japan
Prior art keywords
probe
observed
optical microscope
main body
objective lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP63214104A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0216403A (ja
Inventor
Masakazu Hayashi
Junzo Uchida
Fumihiko Ishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP63214104A priority Critical patent/JPH0216403A/ja
Priority to US07/317,465 priority patent/US4914293A/en
Priority to DE68916667T priority patent/DE68916667T2/de
Priority to EP89103590A priority patent/EP0331148B1/en
Priority to KR1019890002708A priority patent/KR920005446B1/ko
Publication of JPH0216403A publication Critical patent/JPH0216403A/ja
Publication of JPH0549921B2 publication Critical patent/JPH0549921B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
    • G01Q30/025—Optical microscopes coupled with SPM
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/861—Scanning tunneling probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/868—Scanning probe structure with optical means
    • Y10S977/869—Optical microscope

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • General Health & Medical Sciences (AREA)
  • Nanotechnology (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Biophysics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP63214104A 1988-03-04 1988-08-29 顕微鏡装置 Granted JPH0216403A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP63214104A JPH0216403A (ja) 1988-03-04 1988-08-29 顕微鏡装置
US07/317,465 US4914293A (en) 1988-03-04 1989-03-01 Microscope apparatus
DE68916667T DE68916667T2 (de) 1988-03-04 1989-03-01 Mikroskop.
EP89103590A EP0331148B1 (en) 1988-03-04 1989-03-01 Microscope apparatus
KR1019890002708A KR920005446B1 (ko) 1988-03-04 1989-03-03 현미경 장치

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP63-50891 1988-03-04
JP5089188 1988-03-04
JP63214104A JPH0216403A (ja) 1988-03-04 1988-08-29 顕微鏡装置

Publications (2)

Publication Number Publication Date
JPH0216403A JPH0216403A (ja) 1990-01-19
JPH0549921B2 true JPH0549921B2 (enExample) 1993-07-27

Family

ID=12871357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63214104A Granted JPH0216403A (ja) 1988-03-04 1988-08-29 顕微鏡装置

Country Status (2)

Country Link
JP (1) JPH0216403A (enExample)
KR (1) KR920005446B1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0509856B1 (en) * 1991-03-15 1998-08-12 Nikon Corporation Microscope apparatus combining a scanning probe type microscope and an optical microscope
JPH0540009A (ja) * 1991-08-08 1993-02-19 Nikon Corp 走査型トンネル顕微鏡
US5952562A (en) * 1995-11-22 1999-09-14 Olympus Optical Co., Ltd. Scanning probe microscope incorporating an optical microscope
JP6159244B2 (ja) * 2013-12-16 2017-07-05 日本電信電話株式会社 端面観察装置
JP6162627B2 (ja) * 2014-03-10 2017-07-12 日本電信電話株式会社 端面観察装置
DE102022129094B4 (de) * 2022-11-03 2024-06-27 push4impact GmbH Mikroskopobjektiv sowie Objektivrevolver und Mikroskop umfassend ein solches Mikroskopobjektiv

Also Published As

Publication number Publication date
JPH0216403A (ja) 1990-01-19
KR920005446B1 (ko) 1992-07-04
KR890015048A (ko) 1989-10-28

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