KR890015048A - 현미경 장치 - Google Patents

현미경 장치 Download PDF

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Publication number
KR890015048A
KR890015048A KR1019890002708A KR890002708A KR890015048A KR 890015048 A KR890015048 A KR 890015048A KR 1019890002708 A KR1019890002708 A KR 1019890002708A KR 890002708 A KR890002708 A KR 890002708A KR 890015048 A KR890015048 A KR 890015048A
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KR
South Korea
Prior art keywords
microscope device
main body
relative position
device main
detection needle
Prior art date
Application number
KR1019890002708A
Other languages
English (en)
Other versions
KR920005446B1 (ko
Inventor
마사까즈 하야시
후미히꼬 이시다
준조 우찌다
Original Assignee
아오이 죠이찌
가부시끼가이샤 도시바
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 아오이 죠이찌, 가부시끼가이샤 도시바 filed Critical 아오이 죠이찌
Publication of KR890015048A publication Critical patent/KR890015048A/ko
Application granted granted Critical
Publication of KR920005446B1 publication Critical patent/KR920005446B1/ko

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
    • G01Q30/025—Optical microscopes coupled with SPM
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/861—Scanning tunneling probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/868—Scanning probe structure with optical means
    • Y10S977/869—Optical microscope

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Optics & Photonics (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biophysics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

내용 없음.

Description

현미경 장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도 내지 제3도는 본 발명의 제1의 실시예를 나타낸 것으로,
제1도는 현미경 장치의 주요부의 개략적인 구성을 나타낸 횡단면도.
제2도는 피에조부를 나타낸 사시도.
제3도는 피에조부의 제어회로를 나타낸 개략적인 구성도.

Claims (2)

  1. 광학 현미경 장치 본체의 대물렌즈에 미소 전류 검출용의 검지 바늘을 일체로 설치함과 동시에, 전술한 광학 현미경 장치 본체의 관찰 대상물과 검지 바늘과의 상대 위치를 변위 시키는 상대 위치 변위 기구를 설치한 것을 특징으로 하는 현미경 장치.
  2. 광학 형미경 장치 본체의 대물렌즈와 관찰 대상물과의 사이에 결상된 광학상을 변화 시키지 않는 투광성 부재를 설치하고, 이 투광성 부재에 전류 검출용의 검지바늘을 일체적으로 설치함과 동시에, 광학 현미경장치 본체의 관찰 대상물과 검지 바늘과의 상대 위치를 변위시키는 상대 위치 변위 기구를 설치한 것을 특징으로 하는 현미경장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019890002708A 1988-03-04 1989-03-03 현미경 장치 KR920005446B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP5089188 1988-03-04
JP?63-50891 1988-03-04
JP63214104A JPH0216403A (ja) 1988-03-04 1988-08-29 顕微鏡装置
JP?63-214104 1988-08-29

Publications (2)

Publication Number Publication Date
KR890015048A true KR890015048A (ko) 1989-10-28
KR920005446B1 KR920005446B1 (ko) 1992-07-04

Family

ID=12871357

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019890002708A KR920005446B1 (ko) 1988-03-04 1989-03-03 현미경 장치

Country Status (2)

Country Link
JP (1) JPH0216403A (ko)
KR (1) KR920005446B1 (ko)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0509856B1 (en) * 1991-03-15 1998-08-12 Nikon Corporation Microscope apparatus combining a scanning probe type microscope and an optical microscope
JPH0540009A (ja) * 1991-08-08 1993-02-19 Nikon Corp 走査型トンネル顕微鏡
US5952562A (en) * 1995-11-22 1999-09-14 Olympus Optical Co., Ltd. Scanning probe microscope incorporating an optical microscope
JP6159244B2 (ja) * 2013-12-16 2017-07-05 日本電信電話株式会社 端面観察装置
JP6162627B2 (ja) * 2014-03-10 2017-07-12 日本電信電話株式会社 端面観察装置
DE102022129094A1 (de) * 2022-11-03 2024-05-08 push4impact GmbH Mikroskopobjektiv sowie Objektivrevolver und Mikroskop umfassend ein solches Mikroskopobjektiv

Also Published As

Publication number Publication date
JPH0216403A (ja) 1990-01-19
JPH0549921B2 (ko) 1993-07-27
KR920005446B1 (ko) 1992-07-04

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