JPH0545845B2 - - Google Patents
Info
- Publication number
- JPH0545845B2 JPH0545845B2 JP27412285A JP27412285A JPH0545845B2 JP H0545845 B2 JPH0545845 B2 JP H0545845B2 JP 27412285 A JP27412285 A JP 27412285A JP 27412285 A JP27412285 A JP 27412285A JP H0545845 B2 JPH0545845 B2 JP H0545845B2
- Authority
- JP
- Japan
- Prior art keywords
- combustion
- flow path
- exhaust gas
- burner
- semiconductor manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000007789 gas Substances 0.000 claims description 64
- 238000002485 combustion reaction Methods 0.000 claims description 59
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 28
- 239000000567 combustion gas Substances 0.000 claims description 25
- 238000004519 manufacturing process Methods 0.000 claims description 21
- 239000004065 semiconductor Substances 0.000 claims description 21
- 239000011261 inert gas Substances 0.000 claims description 13
- 239000007921 spray Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 32
- 235000012239 silicon dioxide Nutrition 0.000 description 16
- 239000000377 silicon dioxide Substances 0.000 description 16
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 13
- 229910000077 silane Inorganic materials 0.000 description 13
- 230000000694 effects Effects 0.000 description 7
- 238000009434 installation Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229910001873 dinitrogen Inorganic materials 0.000 description 4
- 238000009841 combustion method Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 231100000331 toxic Toxicity 0.000 description 2
- 230000002588 toxic effect Effects 0.000 description 2
- 230000001154 acute effect Effects 0.000 description 1
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- ZOCHARZZJNPSEU-UHFFFAOYSA-N diboron Chemical compound B#B ZOCHARZZJNPSEU-UHFFFAOYSA-N 0.000 description 1
- BUMGIEFFCMBQDG-UHFFFAOYSA-N dichlorosilicon Chemical compound Cl[Si]Cl BUMGIEFFCMBQDG-UHFFFAOYSA-N 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000002737 fuel gas Substances 0.000 description 1
- 229910000078 germane Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Incineration Of Waste (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27412285A JPS62134414A (ja) | 1985-12-04 | 1985-12-04 | 半導体製造排ガスの燃焼方法及び同燃焼装置 |
| US06/937,120 US4801437A (en) | 1985-12-04 | 1986-12-02 | Process for treating combustible exhaust gases containing silane and the like |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27412285A JPS62134414A (ja) | 1985-12-04 | 1985-12-04 | 半導体製造排ガスの燃焼方法及び同燃焼装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62134414A JPS62134414A (ja) | 1987-06-17 |
| JPH0545845B2 true JPH0545845B2 (xx) | 1993-07-12 |
Family
ID=17537325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27412285A Granted JPS62134414A (ja) | 1985-12-04 | 1985-12-04 | 半導体製造排ガスの燃焼方法及び同燃焼装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62134414A (xx) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006194541A (ja) * | 2005-01-14 | 2006-07-27 | Tokyo Gas Co Ltd | 難燃性物質分解バーナ |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2742562B2 (ja) * | 1988-10-11 | 1998-04-22 | 千代田化工建設株式会社 | 有毒性排ガスの燃焼処理方法 |
| JPH02126014A (ja) * | 1988-07-29 | 1990-05-15 | Chiyoda Corp | 有毒性ガスの燃焼処理方法及び装置 |
| FR2651561B1 (fr) * | 1989-09-04 | 1991-12-27 | Sgn Soc Gen Tech Nouvelle | Procede et installation pour la combustion d'effluents gazeux toxiques. |
| JPH10110926A (ja) * | 1996-08-14 | 1998-04-28 | Nippon Sanso Kk | 燃焼式除害装置 |
| JP2001355820A (ja) * | 2000-06-12 | 2001-12-26 | Sumitomo Seika Chem Co Ltd | 排ガスの処理方法および処理装置 |
| KR100623369B1 (ko) | 2005-09-05 | 2006-09-12 | 크린시스템스코리아(주) | 반도체 제조장비용 배기가스 처리장치의 버너 |
| KR100833348B1 (ko) | 2007-01-12 | 2008-05-28 | 유니셈(주) | 폐 유기물 공급 시스템 |
| CN102421509A (zh) | 2009-03-12 | 2012-04-18 | 吉坤日矿日石能源株式会社 | 废气处理装置及废气处理方法 |
| CN102791356A (zh) | 2010-03-12 | 2012-11-21 | 吉坤日矿日石能源株式会社 | 排气处理系统 |
| JP2013015232A (ja) * | 2011-06-30 | 2013-01-24 | Edwards Kk | 燃焼式排ガス処理装置 |
| JP6410185B2 (ja) * | 2015-08-19 | 2018-10-24 | 月島環境エンジニアリング株式会社 | シラン含有ガス又はシラン含有廃液の燃焼方法及び燃焼装置 |
| CN105333444A (zh) * | 2015-10-28 | 2016-02-17 | 苏州仕净环保科技股份有限公司 | 一种硅烷尾气燃烧除尘净化系统 |
| JP2017089985A (ja) * | 2015-11-11 | 2017-05-25 | 株式会社荏原製作所 | 排ガス処理装置 |
-
1985
- 1985-12-04 JP JP27412285A patent/JPS62134414A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006194541A (ja) * | 2005-01-14 | 2006-07-27 | Tokyo Gas Co Ltd | 難燃性物質分解バーナ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62134414A (ja) | 1987-06-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees | ||
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |