JPH053539B2 - - Google Patents
Info
- Publication number
- JPH053539B2 JPH053539B2 JP59069335A JP6933584A JPH053539B2 JP H053539 B2 JPH053539 B2 JP H053539B2 JP 59069335 A JP59069335 A JP 59069335A JP 6933584 A JP6933584 A JP 6933584A JP H053539 B2 JPH053539 B2 JP H053539B2
- Authority
- JP
- Japan
- Prior art keywords
- hydrogen gas
- electrode
- film
- sensor
- palladium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 29
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 21
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 19
- 239000010408 film Substances 0.000 claims description 18
- 229910052763 palladium Inorganic materials 0.000 claims description 11
- 238000012856 packing Methods 0.000 claims description 9
- 229910052697 platinum Inorganic materials 0.000 claims description 8
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 claims description 4
- 229910001930 tungsten oxide Inorganic materials 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 3
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 7
- 239000012528 membrane Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- NNPPMTNAJDCUHE-UHFFFAOYSA-N isobutane Chemical compound CC(C)C NNPPMTNAJDCUHE-UHFFFAOYSA-N 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 230000005574 cross-species transmission Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 230000002687 intercalation Effects 0.000 description 1
- 238000009830 intercalation Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000001282 iso-butane Substances 0.000 description 1
- -1 isobutane or propane Chemical compound 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- ZNOKGRXACCSDPY-UHFFFAOYSA-N tungsten trioxide Chemical compound O=[W](=O)=O ZNOKGRXACCSDPY-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6933584A JPS60211347A (ja) | 1984-04-06 | 1984-04-06 | 水素ガスセンサ− |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6933584A JPS60211347A (ja) | 1984-04-06 | 1984-04-06 | 水素ガスセンサ− |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60211347A JPS60211347A (ja) | 1985-10-23 |
| JPH053539B2 true JPH053539B2 (th) | 1993-01-18 |
Family
ID=13399574
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6933584A Granted JPS60211347A (ja) | 1984-04-06 | 1984-04-06 | 水素ガスセンサ− |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60211347A (th) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4440572C2 (de) * | 1994-11-14 | 1997-05-07 | Fraunhofer Ges Forschung | Verglasungselement mit variabler Transmission |
| JP2007071866A (ja) * | 2005-08-10 | 2007-03-22 | Tokyo Univ Of Science | ガスセンサ用薄膜、ガスセンサ用素子体およびガスセンサ用素子体の製造方法 |
| JP5422281B2 (ja) * | 2009-07-13 | 2014-02-19 | 株式会社アルバック | 水素ガスセンサ及び水素ガスセンサの製造方法 |
| US9134270B2 (en) * | 2010-03-25 | 2015-09-15 | Stichting Imec Nederland | Amorphous thin film for sensing |
| JP6738749B2 (ja) | 2016-03-25 | 2020-08-12 | パナソニックセミコンダクターソリューションズ株式会社 | 気体センサ、水素検出方法、及び燃料電池自動車 |
| JP6865234B2 (ja) * | 2016-12-28 | 2021-04-28 | ヌヴォトンテクノロジージャパン株式会社 | 気体検出装置、気体センサシステム、燃料電池自動車、及び水素検出方法 |
| CN110114662B (zh) * | 2016-12-28 | 2022-03-18 | 新唐科技日本株式会社 | 气体检测装置、气体检测系统、燃料电池汽车及气体检测方法 |
| JP7195766B2 (ja) * | 2018-05-14 | 2022-12-26 | キヤノン株式会社 | 還元性ガス検知材料、及び還元性ガス検知センサ |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53141098A (en) * | 1977-05-16 | 1978-12-08 | Toshiba Corp | Gas sensing element |
| JPS53141097A (en) * | 1977-05-16 | 1978-12-08 | Toshiba Corp | Gas sensing element |
| JPS53141096A (en) * | 1977-05-16 | 1978-12-08 | Toshiba Corp | Gas sensing element |
| JPS55124058A (en) * | 1979-03-09 | 1980-09-24 | Gen Motors Corp | Titanium dioxide exhaust sensor |
| JPS5690250A (en) * | 1979-12-22 | 1981-07-22 | Matsushita Electric Works Ltd | Detection element of combustible gas |
| JPS5774648A (en) * | 1980-08-28 | 1982-05-10 | Siemens Ag | Selective thin film gas sensor and manufacture thereof |
| JPS5857702A (ja) * | 1981-09-30 | 1983-04-06 | 三洋電機株式会社 | 湿度センサ− |
| JPS58182545A (ja) * | 1982-04-21 | 1983-10-25 | Hitachi Ltd | 一酸化炭素ガス検知素子 |
-
1984
- 1984-04-06 JP JP6933584A patent/JPS60211347A/ja active Granted
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53141098A (en) * | 1977-05-16 | 1978-12-08 | Toshiba Corp | Gas sensing element |
| JPS53141097A (en) * | 1977-05-16 | 1978-12-08 | Toshiba Corp | Gas sensing element |
| JPS53141096A (en) * | 1977-05-16 | 1978-12-08 | Toshiba Corp | Gas sensing element |
| JPS55124058A (en) * | 1979-03-09 | 1980-09-24 | Gen Motors Corp | Titanium dioxide exhaust sensor |
| JPS5690250A (en) * | 1979-12-22 | 1981-07-22 | Matsushita Electric Works Ltd | Detection element of combustible gas |
| JPS5774648A (en) * | 1980-08-28 | 1982-05-10 | Siemens Ag | Selective thin film gas sensor and manufacture thereof |
| JPS5857702A (ja) * | 1981-09-30 | 1983-04-06 | 三洋電機株式会社 | 湿度センサ− |
| JPS58182545A (ja) * | 1982-04-21 | 1983-10-25 | Hitachi Ltd | 一酸化炭素ガス検知素子 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60211347A (ja) | 1985-10-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |