JP5155767B2 - ガス検知素子 - Google Patents
ガス検知素子 Download PDFInfo
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- JP5155767B2 JP5155767B2 JP2008200991A JP2008200991A JP5155767B2 JP 5155767 B2 JP5155767 B2 JP 5155767B2 JP 2008200991 A JP2008200991 A JP 2008200991A JP 2008200991 A JP2008200991 A JP 2008200991A JP 5155767 B2 JP5155767 B2 JP 5155767B2
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- gas
- detection element
- cnt
- dielectric film
- sensitive layer
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- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
一方、誘電体膜は、カーボンナノチューブを外界から遮断することができるため、酸化性ガスに対してもカーボンナノチューブが酸化されて破壊されることを防止できる。
したがって、本構成に係るガス検知素子は、被検知ガスに対する高い感度を保ちつつ、長期安定性が良好となる。
G∝C=ε0・k・S/d(C:誘電体の静電容量、ε0:真空の誘電率(定数)、k:誘電体の比誘電率、S:誘電体膜の表面積、d:誘電体膜の膜厚)
したがって、ガス検知素子1の感度と長期安定性とを考慮した場合、誘電体膜の膜厚は、2.5〜10nmであることが好ましい。
また、CNTに誘電体膜を被覆した場合と被覆しない場合とについて、NO2ガスに対する応答特性を調べたところ、図5に示すように、誘電体膜を被覆したCNTの方が感度が高いことが分かった。これは、化学ゲート効果に加えて、製膜の際に、欠陥サイトを有するCNTが破壊(ブレイクダウン)され、CNTの密度が低くなったために、感度が向上したものと考えられる。
また、0.5ppmのNO2ガスに対する感度の経時特性を調べたところ、図7に示すように、誘電体膜を被覆したCNTで構成した感応層5を有するガス検知素子1の方が感度が安定していた。
以上により、感応層5として誘電体膜を被覆したCNTを用いることにより、ガス検知素子1の長期安定性が向上することが確認できた。
2 絶縁基板
3 検出電極
4 検出電極
5 感応層
6 薄膜ヒータ
Claims (3)
- 絶縁基板の上に設けた検出電極と、当該検出電極に接触するカーボンナノチューブを主成分とする感応層とを備え、
前記カーボンナノチューブに誘電体膜を被覆してあるガス検知素子。 - 前記誘電体膜は、シリコン酸化物、シリコン窒化物、アルミニウム酸化物、ハフニウム酸化物、ジルコニウム酸化物、チタニウム酸化物からなる群から選択される少なくとも1種で構成してある請求項1に記載のガス検知素子。
- 前記誘電体膜の厚みは、2.5〜10nmである請求項1または2に記載のガス検知素子。
Priority Applications (1)
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JP2008200991A JP5155767B2 (ja) | 2008-08-04 | 2008-08-04 | ガス検知素子 |
Applications Claiming Priority (1)
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JP2008200991A JP5155767B2 (ja) | 2008-08-04 | 2008-08-04 | ガス検知素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010038692A JP2010038692A (ja) | 2010-02-18 |
JP5155767B2 true JP5155767B2 (ja) | 2013-03-06 |
Family
ID=42011403
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JP2008200991A Expired - Fee Related JP5155767B2 (ja) | 2008-08-04 | 2008-08-04 | ガス検知素子 |
Country Status (1)
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JP (1) | JP5155767B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8912236B2 (en) | 2009-03-03 | 2014-12-16 | Alcon Research, Ltd. | Pharmaceutical composition for delivery of receptor tyrosine kinase inhibiting (RTKi) compounds to the eye |
US9707173B2 (en) | 2008-12-05 | 2017-07-18 | Alcon Research, Ltd. | Pharmaceutical suspension |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103439369A (zh) * | 2013-09-04 | 2013-12-11 | 浙江工商大学 | 一种适用于罗非鱼的多壁碳纳米管嗅觉传感器 |
CN106706710A (zh) * | 2015-11-11 | 2017-05-24 | 中国科学院上海微系统与信息技术研究所 | 基于硫掺杂石墨烯的氮氧化物气体传感器及其制备方法 |
WO2018146810A1 (ja) | 2017-02-13 | 2018-08-16 | 日本電気株式会社 | 分散液およびその製造方法、ガスセンサおよびその製造方法 |
US20240151673A1 (en) * | 2021-03-19 | 2024-05-09 | Panasonic Intellectual Property Management Co., Ltd. | Sensitive membrane and gas sensor |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003227806A (ja) * | 2002-02-01 | 2003-08-15 | Kansai Research Institute | 気体物質検知方法 |
JP3924472B2 (ja) * | 2002-02-05 | 2007-06-06 | 株式会社ジェイテクト | カーボンナノチューブを用いたセンサ |
JP2004325142A (ja) * | 2003-04-22 | 2004-11-18 | Matsushita Electric Works Ltd | ガスセンサ |
JP4338615B2 (ja) * | 2004-10-12 | 2009-10-07 | 富士通株式会社 | 気体検知装置 |
JP5048213B2 (ja) * | 2004-12-07 | 2012-10-17 | 国立大学法人大阪大学 | 半導体式ガス検知素子 |
WO2008085183A2 (en) * | 2006-02-07 | 2008-07-17 | President And Fellows Of Harvard College | Gas-phase functionalization of carbon nanotubes |
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2008
- 2008-08-04 JP JP2008200991A patent/JP5155767B2/ja not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9707173B2 (en) | 2008-12-05 | 2017-07-18 | Alcon Research, Ltd. | Pharmaceutical suspension |
US8912236B2 (en) | 2009-03-03 | 2014-12-16 | Alcon Research, Ltd. | Pharmaceutical composition for delivery of receptor tyrosine kinase inhibiting (RTKi) compounds to the eye |
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JP2010038692A (ja) | 2010-02-18 |
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