JPH0527707B2 - - Google Patents

Info

Publication number
JPH0527707B2
JPH0527707B2 JP61265237A JP26523786A JPH0527707B2 JP H0527707 B2 JPH0527707 B2 JP H0527707B2 JP 61265237 A JP61265237 A JP 61265237A JP 26523786 A JP26523786 A JP 26523786A JP H0527707 B2 JPH0527707 B2 JP H0527707B2
Authority
JP
Japan
Prior art keywords
gas
film
halide
coating
supplied
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61265237A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63118075A (ja
Inventor
Shizuka Yamaguchi
Masayuki Doi
Masao Shimizu
Kazuyoshi Terakado
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP26523786A priority Critical patent/JPS63118075A/ja
Publication of JPS63118075A publication Critical patent/JPS63118075A/ja
Publication of JPH0527707B2 publication Critical patent/JPH0527707B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP26523786A 1986-11-07 1986-11-07 グロ−放電による被覆方法 Granted JPS63118075A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26523786A JPS63118075A (ja) 1986-11-07 1986-11-07 グロ−放電による被覆方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26523786A JPS63118075A (ja) 1986-11-07 1986-11-07 グロ−放電による被覆方法

Publications (2)

Publication Number Publication Date
JPS63118075A JPS63118075A (ja) 1988-05-23
JPH0527707B2 true JPH0527707B2 (enrdf_load_stackoverflow) 1993-04-22

Family

ID=17414426

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26523786A Granted JPS63118075A (ja) 1986-11-07 1986-11-07 グロ−放電による被覆方法

Country Status (1)

Country Link
JP (1) JPS63118075A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4178776B2 (ja) * 2001-09-03 2008-11-12 東京エレクトロン株式会社 成膜方法
JP6543982B2 (ja) * 2015-03-20 2019-07-17 株式会社豊田中央研究所 成膜装置および成膜方法
JP2025072725A (ja) * 2023-10-25 2025-05-12 東京エレクトロン株式会社 成膜方法及び成膜装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2619351B2 (ja) * 1984-08-10 1997-06-11 株式会社日立製作所 ガス流量制御方法

Also Published As

Publication number Publication date
JPS63118075A (ja) 1988-05-23

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