JPH0427294B2 - - Google Patents
Info
- Publication number
- JPH0427294B2 JPH0427294B2 JP2722386A JP2722386A JPH0427294B2 JP H0427294 B2 JPH0427294 B2 JP H0427294B2 JP 2722386 A JP2722386 A JP 2722386A JP 2722386 A JP2722386 A JP 2722386A JP H0427294 B2 JPH0427294 B2 JP H0427294B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- auxiliary electrode
- workpiece
- gas supply
- treated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000011282 treatment Methods 0.000 claims description 35
- 238000000034 method Methods 0.000 claims description 29
- 239000000126 substance Substances 0.000 claims description 24
- 238000004381 surface treatment Methods 0.000 claims description 23
- 238000013459 approach Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 185
- 208000028659 discharge Diseases 0.000 description 44
- 238000012545 processing Methods 0.000 description 37
- 150000002500 ions Chemical group 0.000 description 20
- 239000011248 coating agent Substances 0.000 description 19
- 238000000576 coating method Methods 0.000 description 19
- 238000009826 distribution Methods 0.000 description 16
- 239000000203 mixture Substances 0.000 description 15
- 238000010586 diagram Methods 0.000 description 14
- 239000000047 product Substances 0.000 description 13
- 238000005255 carburizing Methods 0.000 description 12
- 239000010410 layer Substances 0.000 description 12
- 239000000376 reactant Substances 0.000 description 11
- 238000009792 diffusion process Methods 0.000 description 10
- 238000010438 heat treatment Methods 0.000 description 10
- 239000012495 reaction gas Substances 0.000 description 9
- 238000005121 nitriding Methods 0.000 description 8
- 229910052799 carbon Inorganic materials 0.000 description 7
- 239000012159 carrier gas Substances 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 7
- 238000007796 conventional method Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 5
- 150000002736 metal compounds Chemical class 0.000 description 5
- 229910000831 Steel Inorganic materials 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 230000003993 interaction Effects 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- 239000002335 surface treatment layer Substances 0.000 description 4
- 238000009827 uniform distribution Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910001209 Low-carbon steel Inorganic materials 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- VNTLIPZTSJSULJ-UHFFFAOYSA-N chromium molybdenum Chemical compound [Cr].[Mo] VNTLIPZTSJSULJ-UHFFFAOYSA-N 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000011946 reduction process Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 238000005987 sulfurization reaction Methods 0.000 description 1
- 239000002345 surface coating layer Substances 0.000 description 1
- 238000006557 surface reaction Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Landscapes
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2722386A JPS62185881A (ja) | 1986-02-10 | 1986-02-10 | イオン表面処理方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2722386A JPS62185881A (ja) | 1986-02-10 | 1986-02-10 | イオン表面処理方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62185881A JPS62185881A (ja) | 1987-08-14 |
| JPH0427294B2 true JPH0427294B2 (enrdf_load_stackoverflow) | 1992-05-11 |
Family
ID=12215096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2722386A Granted JPS62185881A (ja) | 1986-02-10 | 1986-02-10 | イオン表面処理方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62185881A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01147052A (ja) * | 1987-12-01 | 1989-06-08 | Daido Steel Co Ltd | イオン浸炭炉の操業方法および装置 |
| JPH0287063U (enrdf_load_stackoverflow) * | 1988-12-22 | 1990-07-10 | ||
| JP6990162B2 (ja) * | 2018-10-15 | 2022-01-12 | 株式会社神戸製鋼所 | 窒化処理装置および窒化処理方法 |
-
1986
- 1986-02-10 JP JP2722386A patent/JPS62185881A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62185881A (ja) | 1987-08-14 |
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