JPS6134505B2 - - Google Patents

Info

Publication number
JPS6134505B2
JPS6134505B2 JP56109378A JP10937881A JPS6134505B2 JP S6134505 B2 JPS6134505 B2 JP S6134505B2 JP 56109378 A JP56109378 A JP 56109378A JP 10937881 A JP10937881 A JP 10937881A JP S6134505 B2 JPS6134505 B2 JP S6134505B2
Authority
JP
Japan
Prior art keywords
cathode
gas
auxiliary
temperature
treated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56109378A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5811779A (ja
Inventor
Shizuka Yamaguchi
Naotatsu Asahi
Kazuyoshi Terakado
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10937881A priority Critical patent/JPS5811779A/ja
Publication of JPS5811779A publication Critical patent/JPS5811779A/ja
Publication of JPS6134505B2 publication Critical patent/JPS6134505B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Chemical Vapour Deposition (AREA)
JP10937881A 1981-07-15 1981-07-15 イオン表面処理法 Granted JPS5811779A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10937881A JPS5811779A (ja) 1981-07-15 1981-07-15 イオン表面処理法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10937881A JPS5811779A (ja) 1981-07-15 1981-07-15 イオン表面処理法

Publications (2)

Publication Number Publication Date
JPS5811779A JPS5811779A (ja) 1983-01-22
JPS6134505B2 true JPS6134505B2 (enrdf_load_stackoverflow) 1986-08-08

Family

ID=14508722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10937881A Granted JPS5811779A (ja) 1981-07-15 1981-07-15 イオン表面処理法

Country Status (1)

Country Link
JP (1) JPS5811779A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0753908B2 (ja) * 1986-03-20 1995-06-07 株式会社東芝 高速摺動部材の製造方法
JPH0623426B2 (ja) * 1987-01-09 1994-03-30 株式会社神戸製鋼所 高Ｍｎ非磁性鋼材の表面硬化方法
KR20150110968A (ko) * 2014-03-22 2015-10-05 (주)제이 앤 엘 테크 할로우 캐소드 방전을 이용한 내경 질화 방법 및 장치
CN112795863B (zh) * 2020-12-30 2021-11-09 清华大学 一种钛合金表面离子碳氮共渗处理装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5394231A (en) * 1977-01-28 1978-08-18 Suzuki Motor Co Ionic nitriding treatment method

Also Published As

Publication number Publication date
JPS5811779A (ja) 1983-01-22

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