JPS5811779A - イオン表面処理法 - Google Patents

イオン表面処理法

Info

Publication number
JPS5811779A
JPS5811779A JP10937881A JP10937881A JPS5811779A JP S5811779 A JPS5811779 A JP S5811779A JP 10937881 A JP10937881 A JP 10937881A JP 10937881 A JP10937881 A JP 10937881A JP S5811779 A JPS5811779 A JP S5811779A
Authority
JP
Japan
Prior art keywords
auxiliary electrode
treated
gas
conductive member
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10937881A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6134505B2 (enrdf_load_stackoverflow
Inventor
Shizuka Yamaguchi
静 山口
Naotatsu Asahi
朝日　直達
Kazuyoshi Terakado
一佳 寺門
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10937881A priority Critical patent/JPS5811779A/ja
Publication of JPS5811779A publication Critical patent/JPS5811779A/ja
Publication of JPS6134505B2 publication Critical patent/JPS6134505B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Chemical Vapour Deposition (AREA)
JP10937881A 1981-07-15 1981-07-15 イオン表面処理法 Granted JPS5811779A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10937881A JPS5811779A (ja) 1981-07-15 1981-07-15 イオン表面処理法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10937881A JPS5811779A (ja) 1981-07-15 1981-07-15 イオン表面処理法

Publications (2)

Publication Number Publication Date
JPS5811779A true JPS5811779A (ja) 1983-01-22
JPS6134505B2 JPS6134505B2 (enrdf_load_stackoverflow) 1986-08-08

Family

ID=14508722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10937881A Granted JPS5811779A (ja) 1981-07-15 1981-07-15 イオン表面処理法

Country Status (1)

Country Link
JP (1) JPS5811779A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62222066A (ja) * 1986-03-20 1987-09-30 Toshiba Corp 高速摺動部材の製造方法
JPS63171865A (ja) * 1987-01-09 1988-07-15 Kobe Steel Ltd 高Ｍｎ非磁性鋼材の表面硬化方法
JP2015183293A (ja) * 2014-03-22 2015-10-22 ジェイ アンド エル テク カンパニー リミテッド ホロウカソード放電を用いた内径窒化システム
CN112795863A (zh) * 2020-12-30 2021-05-14 清华大学 一种钛合金表面离子碳氮共渗处理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5394231A (en) * 1977-01-28 1978-08-18 Suzuki Motor Co Ionic nitriding treatment method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5394231A (en) * 1977-01-28 1978-08-18 Suzuki Motor Co Ionic nitriding treatment method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62222066A (ja) * 1986-03-20 1987-09-30 Toshiba Corp 高速摺動部材の製造方法
JPS63171865A (ja) * 1987-01-09 1988-07-15 Kobe Steel Ltd 高Ｍｎ非磁性鋼材の表面硬化方法
JP2015183293A (ja) * 2014-03-22 2015-10-22 ジェイ アンド エル テク カンパニー リミテッド ホロウカソード放電を用いた内径窒化システム
CN112795863A (zh) * 2020-12-30 2021-05-14 清华大学 一种钛合金表面离子碳氮共渗处理装置
CN112795863B (zh) * 2020-12-30 2021-11-09 清华大学 一种钛合金表面离子碳氮共渗处理装置

Also Published As

Publication number Publication date
JPS6134505B2 (enrdf_load_stackoverflow) 1986-08-08

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