JPS6137352B2 - - Google Patents

Info

Publication number
JPS6137352B2
JPS6137352B2 JP54117298A JP11729879A JPS6137352B2 JP S6137352 B2 JPS6137352 B2 JP S6137352B2 JP 54117298 A JP54117298 A JP 54117298A JP 11729879 A JP11729879 A JP 11729879A JP S6137352 B2 JPS6137352 B2 JP S6137352B2
Authority
JP
Japan
Prior art keywords
auxiliary electrode
metal material
glow discharge
temperature
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54117298A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5641371A (en
Inventor
Naotatsu Asahi
Shizuka Yamaguchi
Kazuyoshi Terakado
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11729879A priority Critical patent/JPS5641371A/ja
Priority to DE19803029339 priority patent/DE3029339C2/de
Priority to US06/174,748 priority patent/US4394234A/en
Publication of JPS5641371A publication Critical patent/JPS5641371A/ja
Publication of JPS6137352B2 publication Critical patent/JPS6137352B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Discharge Heating (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Furnace Details (AREA)
JP11729879A 1979-02-02 1979-09-14 Surface treatment of metal material by glow discharge Granted JPS5641371A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP11729879A JPS5641371A (en) 1979-09-14 1979-09-14 Surface treatment of metal material by glow discharge
DE19803029339 DE3029339C2 (de) 1979-09-14 1980-08-01 Glimmentladungs-Oberflächenbehandlungsverfahren und -vorrichtung
US06/174,748 US4394234A (en) 1979-02-02 1980-08-04 Method of processing electrically conductive material by glow discharge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11729879A JPS5641371A (en) 1979-09-14 1979-09-14 Surface treatment of metal material by glow discharge

Publications (2)

Publication Number Publication Date
JPS5641371A JPS5641371A (en) 1981-04-18
JPS6137352B2 true JPS6137352B2 (enrdf_load_stackoverflow) 1986-08-23

Family

ID=14708282

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11729879A Granted JPS5641371A (en) 1979-02-02 1979-09-14 Surface treatment of metal material by glow discharge

Country Status (1)

Country Link
JP (1) JPS5641371A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6030498Y2 (ja) * 1980-04-08 1985-09-12 カヤバ工業株式会社 ストラツト型シヨツクアブソ−バ
JPS57198258A (en) * 1981-05-29 1982-12-04 Ulvac Corp Surface treating device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5323837A (en) * 1976-08-19 1978-03-04 Kawasaki Heavy Ind Ltd Ionitriding
JPS5458636A (en) * 1977-10-20 1979-05-11 Kawasaki Heavy Ind Ltd Ion nitriding method

Also Published As

Publication number Publication date
JPS5641371A (en) 1981-04-18

Similar Documents

Publication Publication Date Title
JP2572924B2 (ja) 大気圧プラズマによる金属の表面処理法
EP0242089B1 (en) Method of improving surface wear resistance of a metal component
Jafarpour et al. Solid carbon active screen plasma nitrocarburizing of AISI 316L stainless steel in cold wall reactor: Influence of plasma conditions
Roliński Plasma-assisted nitriding and nitrocarburizing of steel and other ferrous alloys
O'Brien et al. Plasma(Ion) Nitriding
JPS6111319B2 (enrdf_load_stackoverflow)
US4394234A (en) Method of processing electrically conductive material by glow discharge
Paosawatyanyong et al. Nitriding of tool steel using dual DC/RFICP plasma process
KR101849997B1 (ko) 철계 합금의 코팅 방법 및 이에 의하여 제조된 고경도 및 저마찰 특성을 갖는 제품
GB2261227A (en) Surface treatment of metals at low pressure
Chang et al. Wear resistance evaluation of plasma nitrocarburized AISI 316L stainless steel
JPS6137352B2 (enrdf_load_stackoverflow)
Jacobs et al. Plasma Carburiiing: Theory; Industrial Benefits and Practices
JP2001192861A (ja) 表面処理方法及び表面処理装置
Caliari et al. An investigation into the effects of different oxy-nitrocarburizing conditions on hardness profiles and corrosion behavior of 16MnCr5 steels
JPS5811779A (ja) イオン表面処理法
JP2773092B2 (ja) 表面被覆鋼製品
GB2060711A (en) Processing electrically conductive material by glow discharge
JP2003171756A (ja) 鋼材部品の真空浸炭方法
FR2332336A1 (fr) Procede et four pour la realisation de traitements de metaux par bombardement ionique
JPS62995B2 (enrdf_load_stackoverflow)
KR890001031B1 (ko) 글로우방전에 의한 금속의 표면 처리방법
JPS5931586B2 (ja) 金属材料の加熱方法
JPS60125366A (ja) 部材の表面処理方法
Tesi et al. Analysis of surface structures and of size and shape variations in ionitrided precipitation hardening stainless steel samples