JPS5641371A - Surface treatment of metal material by glow discharge - Google Patents

Surface treatment of metal material by glow discharge

Info

Publication number
JPS5641371A
JPS5641371A JP11729879A JP11729879A JPS5641371A JP S5641371 A JPS5641371 A JP S5641371A JP 11729879 A JP11729879 A JP 11729879A JP 11729879 A JP11729879 A JP 11729879A JP S5641371 A JPS5641371 A JP S5641371A
Authority
JP
Japan
Prior art keywords
glow discharge
article
torr
surface treatment
treated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11729879A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6137352B2 (enrdf_load_stackoverflow
Inventor
Naotatsu Asahi
Shizuka Yamaguchi
Kazuyoshi Terakado
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11729879A priority Critical patent/JPS5641371A/ja
Priority to DE19803029339 priority patent/DE3029339C2/de
Priority to US06/174,748 priority patent/US4394234A/en
Publication of JPS5641371A publication Critical patent/JPS5641371A/ja
Publication of JPS6137352B2 publication Critical patent/JPS6137352B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Discharge Heating (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Furnace Details (AREA)
JP11729879A 1979-02-02 1979-09-14 Surface treatment of metal material by glow discharge Granted JPS5641371A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP11729879A JPS5641371A (en) 1979-09-14 1979-09-14 Surface treatment of metal material by glow discharge
DE19803029339 DE3029339C2 (de) 1979-09-14 1980-08-01 Glimmentladungs-Oberflächenbehandlungsverfahren und -vorrichtung
US06/174,748 US4394234A (en) 1979-02-02 1980-08-04 Method of processing electrically conductive material by glow discharge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11729879A JPS5641371A (en) 1979-09-14 1979-09-14 Surface treatment of metal material by glow discharge

Publications (2)

Publication Number Publication Date
JPS5641371A true JPS5641371A (en) 1981-04-18
JPS6137352B2 JPS6137352B2 (enrdf_load_stackoverflow) 1986-08-23

Family

ID=14708282

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11729879A Granted JPS5641371A (en) 1979-02-02 1979-09-14 Surface treatment of metal material by glow discharge

Country Status (1)

Country Link
JP (1) JPS5641371A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56148130U (enrdf_load_stackoverflow) * 1980-04-08 1981-11-07
JPS57198258A (en) * 1981-05-29 1982-12-04 Ulvac Corp Surface treating device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5323837A (en) * 1976-08-19 1978-03-04 Kawasaki Heavy Ind Ltd Ionitriding
JPS5458636A (en) * 1977-10-20 1979-05-11 Kawasaki Heavy Ind Ltd Ion nitriding method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5323837A (en) * 1976-08-19 1978-03-04 Kawasaki Heavy Ind Ltd Ionitriding
JPS5458636A (en) * 1977-10-20 1979-05-11 Kawasaki Heavy Ind Ltd Ion nitriding method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56148130U (enrdf_load_stackoverflow) * 1980-04-08 1981-11-07
JPS57198258A (en) * 1981-05-29 1982-12-04 Ulvac Corp Surface treating device

Also Published As

Publication number Publication date
JPS6137352B2 (enrdf_load_stackoverflow) 1986-08-23

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