JPS5641371A - Surface treatment of metal material by glow discharge - Google Patents
Surface treatment of metal material by glow dischargeInfo
- Publication number
- JPS5641371A JPS5641371A JP11729879A JP11729879A JPS5641371A JP S5641371 A JPS5641371 A JP S5641371A JP 11729879 A JP11729879 A JP 11729879A JP 11729879 A JP11729879 A JP 11729879A JP S5641371 A JPS5641371 A JP S5641371A
- Authority
- JP
- Japan
- Prior art keywords
- glow discharge
- article
- torr
- surface treatment
- treated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Furnace Details (AREA)
- Discharge Heating (AREA)
Abstract
PURPOSE:To perform the surface treatment having a different function, by providing auxiliary electrode with the article to be treated at a fixed distance and changing the pressure of treating gas within a fixed range, at the surface treatment by glow discharge. CONSTITUTION:Auxiliary electrode connected with cathode leaving 0.5-50mm. distance from the surface of metal material of article to be treated which is connected with the cathode, is arranged and glow discharge is discharged changing the pressure in the decompression vessel within the range of 0.1-10 Torr. For example, the article to be treated 2 connected with the cathode 5, is arranged in the furnace 1 of anode and the auxiliary electrides 20, are only provided on the parts 2a and 2b on which a deep surface hardening is performed on the surface of the article 2 especially. Treating gas is introduced into the furnace 1 and glow discharge is discharged under about 1 Torr. and about 400-800V direct current voltage and then, cementation nitriding treatment of the whole body, is performed at about 600 deg.C for about 4.5hr. Next, temperature of the electrode 20 part, is raised to 900 deg.C and the other part is raised to 600 deg.C by treating under about 4 Torr. for about 30min and then, the parts having different hardness, are obtained.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11729879A JPS5641371A (en) | 1979-09-14 | 1979-09-14 | Surface treatment of metal material by glow discharge |
DE19803029339 DE3029339C2 (en) | 1979-09-14 | 1980-08-01 | Glow discharge surface treatment method and apparatus |
US06/174,748 US4394234A (en) | 1979-02-02 | 1980-08-04 | Method of processing electrically conductive material by glow discharge |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11729879A JPS5641371A (en) | 1979-09-14 | 1979-09-14 | Surface treatment of metal material by glow discharge |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5641371A true JPS5641371A (en) | 1981-04-18 |
JPS6137352B2 JPS6137352B2 (en) | 1986-08-23 |
Family
ID=14708282
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11729879A Granted JPS5641371A (en) | 1979-02-02 | 1979-09-14 | Surface treatment of metal material by glow discharge |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5641371A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56148130U (en) * | 1980-04-08 | 1981-11-07 | ||
JPS57198258A (en) * | 1981-05-29 | 1982-12-04 | Ulvac Corp | Surface treating device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5323837A (en) * | 1976-08-19 | 1978-03-04 | Kawasaki Heavy Ind Ltd | Ionitriding |
JPS5458636A (en) * | 1977-10-20 | 1979-05-11 | Kawasaki Heavy Ind Ltd | Ion nitriding method |
-
1979
- 1979-09-14 JP JP11729879A patent/JPS5641371A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5323837A (en) * | 1976-08-19 | 1978-03-04 | Kawasaki Heavy Ind Ltd | Ionitriding |
JPS5458636A (en) * | 1977-10-20 | 1979-05-11 | Kawasaki Heavy Ind Ltd | Ion nitriding method |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56148130U (en) * | 1980-04-08 | 1981-11-07 | ||
JPS6030498Y2 (en) * | 1980-04-08 | 1985-09-12 | カヤバ工業株式会社 | Strut type shock absorber |
JPS57198258A (en) * | 1981-05-29 | 1982-12-04 | Ulvac Corp | Surface treating device |
Also Published As
Publication number | Publication date |
---|---|
JPS6137352B2 (en) | 1986-08-23 |
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