JPS56163261A - Surface treatment of metallic material by glow discharge - Google Patents

Surface treatment of metallic material by glow discharge

Info

Publication number
JPS56163261A
JPS56163261A JP6534580A JP6534580A JPS56163261A JP S56163261 A JPS56163261 A JP S56163261A JP 6534580 A JP6534580 A JP 6534580A JP 6534580 A JP6534580 A JP 6534580A JP S56163261 A JPS56163261 A JP S56163261A
Authority
JP
Japan
Prior art keywords
temp
products
cathode
glow discharge
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6534580A
Other languages
Japanese (ja)
Inventor
Shizuka Yamaguchi
Naotatsu Asahi
Takuzo Ogawa
Kazuyoshi Terakado
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6534580A priority Critical patent/JPS56163261A/en
Publication of JPS56163261A publication Critical patent/JPS56163261A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Discharge Heating (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)

Abstract

PURPOSE:To treat products while correctly measuring the surface temp. of each of the products by making a hole for measuring the surface temp. with an optical pyrometer in part of each auxiliary electrode connected to a cathode. CONSTITUTION:In this surface treating method by glow discharge, glow discharge is caused between a cathode 5 connected to products 2 made of metallic material to be treated in a vacuum vessel 1 and an opposite anode 4, and each auxiliary electrode 13 connected to the cathode 5 is set at a predetermined distance from the surface of each of the products 2. During ionic treatment the pressure of a treating gas is changed in a predetermined range, and heating is carried out by a hollow cathode effect. At this time, a hole for measuring the surface temp. of the product 2 with an optical pyrometer 11 is made in part of the electrode 13. By feeding back the measured temp. value to gas introduction, exhaust, etc., the treating pressure and the gas composition are regulated to control the temp.
JP6534580A 1980-05-19 1980-05-19 Surface treatment of metallic material by glow discharge Pending JPS56163261A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6534580A JPS56163261A (en) 1980-05-19 1980-05-19 Surface treatment of metallic material by glow discharge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6534580A JPS56163261A (en) 1980-05-19 1980-05-19 Surface treatment of metallic material by glow discharge

Publications (1)

Publication Number Publication Date
JPS56163261A true JPS56163261A (en) 1981-12-15

Family

ID=13284261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6534580A Pending JPS56163261A (en) 1980-05-19 1980-05-19 Surface treatment of metallic material by glow discharge

Country Status (1)

Country Link
JP (1) JPS56163261A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63171865A (en) * 1987-01-09 1988-07-15 Kobe Steel Ltd Surface hardening method for high-mn nonmagnetic steel materials
CN111238577A (en) * 2020-03-31 2020-06-05 南京信息工程大学 Airglow gravitational wave multi-parameter detector

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63171865A (en) * 1987-01-09 1988-07-15 Kobe Steel Ltd Surface hardening method for high-mn nonmagnetic steel materials
CN111238577A (en) * 2020-03-31 2020-06-05 南京信息工程大学 Airglow gravitational wave multi-parameter detector

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