JPS5794565A - Surface treatment of pipe - Google Patents
Surface treatment of pipeInfo
- Publication number
- JPS5794565A JPS5794565A JP15358981A JP15358981A JPS5794565A JP S5794565 A JPS5794565 A JP S5794565A JP 15358981 A JP15358981 A JP 15358981A JP 15358981 A JP15358981 A JP 15358981A JP S5794565 A JPS5794565 A JP S5794565A
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- anode
- electrode
- inside circumferential
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
- C23C8/38—Treatment of ferrous surfaces
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- General Chemical & Material Sciences (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
Abstract
PURPOSE:To perform uniform surface treatment by using a pipe of a metallic material as cathode, disposing an electrode of anode in the inside circumferential part of the pipe, and glow discharging the inside circumferential surface of the pipe while controlling the potential distribution in the length direction of the pipe around the electrode. CONSTITUTION:A pipe 5 of a metallic material is disposed in a sealed vessel 1 by way of a holding jig 4, and with said pipe 5 as cathode, anode 6 is introduced into the pipe 5. On the other hand, the inside of the vessel 1 is evacuated with a vacuum device 2 and a treating gas 9 is introduced through a gas lead-in port 8. Here, electric current is fed to the anode 6 and the pipe 5 by an electric power source 14, and while the potential distribution in the longitudinal direction of the pipe 5 around the electrode is controlled with a control board 12, glow discharge is caused, whereby the inside circumferential surface of the pipe 5 is treated.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15358981A JPS5794565A (en) | 1981-09-30 | 1981-09-30 | Surface treatment of pipe |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15358981A JPS5794565A (en) | 1981-09-30 | 1981-09-30 | Surface treatment of pipe |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5794565A true JPS5794565A (en) | 1982-06-12 |
Family
ID=15565788
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15358981A Pending JPS5794565A (en) | 1981-09-30 | 1981-09-30 | Surface treatment of pipe |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5794565A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5323835A (en) * | 1976-08-19 | 1978-03-04 | Kawasaki Heavy Ind Ltd | Ionitriding |
-
1981
- 1981-09-30 JP JP15358981A patent/JPS5794565A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5323835A (en) * | 1976-08-19 | 1978-03-04 | Kawasaki Heavy Ind Ltd | Ionitriding |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5514884A (en) | Apparatus for partial treating of long size structure by heavy current glow discharge | |
US3650930A (en) | Glow discharge masking process | |
CA2048470A1 (en) | Plasma processing apparatus having an electrode enclosing the space between cathode and anode | |
JPS5794565A (en) | Surface treatment of pipe | |
JPS54155156A (en) | Vacuum brazing apparatus | |
JPS5710629A (en) | Plasma treatment of hollow body | |
JPS6423537A (en) | Plasma processing device | |
JPS5590533A (en) | Low temperature plasma treatment of substrate | |
JPS539082A (en) | Gas exhausting device for fluorescent lamp | |
JPS5468169A (en) | Plasma processor of capacitor type | |
JPS56158814A (en) | Method and device for heat treatment | |
JPS5641801A (en) | Continuously generating apparatus for water gas with electric current arc | |
JPS54100910A (en) | Method and apparatus for glow discharge processing | |
JPS5693871A (en) | Ion nitridation apparatus | |
JPS55104474A (en) | Surface-treating method for metallic material | |
JPS5662959A (en) | Blackening method for surface of metal | |
JPS53142334A (en) | Glow discharge surface treating apparatus | |
JPS56130474A (en) | Dry etching apparatus | |
JPS57196520A (en) | Rinsing method for epitaxial growing apparatus | |
JPS57184224A (en) | Microwave plasma treating method and its device | |
JPS56166377A (en) | Plasma treating method of hollow body | |
JPS5538946A (en) | Sputtering apparatus | |
JPS5775136A (en) | Ion generator | |
JPS55158266A (en) | Electrode structure for electric discharge in vacuum reacion furnace | |
JPS57189440A (en) | Field emission electron gun |