JPS57198258A - Surface treating device - Google Patents

Surface treating device

Info

Publication number
JPS57198258A
JPS57198258A JP8115481A JP8115481A JPS57198258A JP S57198258 A JPS57198258 A JP S57198258A JP 8115481 A JP8115481 A JP 8115481A JP 8115481 A JP8115481 A JP 8115481A JP S57198258 A JPS57198258 A JP S57198258A
Authority
JP
Japan
Prior art keywords
works
chamber
gas
valve
constitution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8115481A
Other languages
Japanese (ja)
Inventor
Yoshiyuki Yoneda
Kimitachi Yana
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP8115481A priority Critical patent/JPS57198258A/en
Publication of JPS57198258A publication Critical patent/JPS57198258A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/515—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using pulsed discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE:To treat surfaces of fine and deep parts which are heretofore difficult to treat uniformly by providing a gaseous pulsation generating device to a device of heating the works in an evacuated vacuum treatment chamber and treating the surfaces with plasma while introducing gaseous hydrocarbon or the like into the chamber. CONSTITUTION:A device for generating pulsation in a working ionization gas such as hydrocarbon in a treatment chamber 1, for example, a pressure controlling valve 11 of the constitution that can change a set pressure intermittently is provided to a gas introducing pipe 9. When a basket 4 contg. many pieces of the works 7 is contained in the chamber 1, a sluice valve 13 closes, and the inside of the chamber 1 is evacuated; at the same time, electric current is conducted to a heater 10. When the works 7 are heated to prescribed temps. by this processing, said gas is introduced through a pipe 9, and cathode potential is applied to the works 7, and plasma is generated in the chamber 1. The surfaces of the works 7 are carburized, but if the gas is pulsated by operating the valve 11, activated particles enter fine and deep parts 5, 6, thereby treating the surfaces around these parts.
JP8115481A 1981-05-29 1981-05-29 Surface treating device Pending JPS57198258A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8115481A JPS57198258A (en) 1981-05-29 1981-05-29 Surface treating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8115481A JPS57198258A (en) 1981-05-29 1981-05-29 Surface treating device

Publications (1)

Publication Number Publication Date
JPS57198258A true JPS57198258A (en) 1982-12-04

Family

ID=13738513

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8115481A Pending JPS57198258A (en) 1981-05-29 1981-05-29 Surface treating device

Country Status (1)

Country Link
JP (1) JPS57198258A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6050923A (en) * 1983-08-31 1985-03-22 Hitachi Ltd Method of plasma surface treatment and device therefor
LU90986B1 (en) * 2002-11-07 2004-05-10 Plasma Metal S A Process for nitriding articles in bulk.

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5641371A (en) * 1979-09-14 1981-04-18 Hitachi Ltd Surface treatment of metal material by glow discharge

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5641371A (en) * 1979-09-14 1981-04-18 Hitachi Ltd Surface treatment of metal material by glow discharge

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6050923A (en) * 1983-08-31 1985-03-22 Hitachi Ltd Method of plasma surface treatment and device therefor
JPH0473287B2 (en) * 1983-08-31 1992-11-20 Hitachi Ltd
LU90986B1 (en) * 2002-11-07 2004-05-10 Plasma Metal S A Process for nitriding articles in bulk.

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