JPS5811779A - Ion surface treatment method - Google Patents

Abstract

PURPOSE:To uniformly heat a good to be treated, and also to treat said good as a whole or partially, by surrounding the good to be treated connected to a cathode of a glow discharge treatment device by at least 2 or more auxiliary electrodes, and generating follow discharge. CONSTITUTION:A furnace body 1 of a treatment device has a water cooling wall, its furnace pressure is set to 0.1-10 Torrs by exhausting gas from a gas exhaust port 8, treatment gas such as N2, etc. is led in from a gas lead-in port 7, and an anode terminal 4 is connected. To a cathode terminal 5, a good to be treated 2 consisting of a electrically conductive member, and auxiliary electrodes 131, 132 are connected, and glow discharge is generated by supplying electric power, and the surface treatment is executed by energizing a gaseous substance and making an ion collide with the hood 2. At the same time, between opposed electrodes 131, 132, and between them and the adjacent good 2, follow-cathode discharge generated. Also, by at least 2 kinds of discharge treatment conditions, plural kinds of treatment can be executed.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a glow discharge treatment method for a conductive member, and particularly to a method for treating a material in a glow discharge state by increasing the temperature using hollow cathode discharge.

A glow discharge surface treatment method, which is a type of surface treatment for metal materials, has been used industrially. A typical example is the ion nitriding method. The ion nitriding method is at least 10”
While introducing a gas body necessary for processing into a reduced pressure vessel (hereinafter referred to as the furnace body) whose pressure is reduced to below ), a voltage is applied from an external DC power source to generate glow discharge to perform surface hardening treatment.

FIG. 1 shows an outline of the ion nitriding process.

Generally, the workpiece 2 serves as a cathode, and the furnace body 1 serves as an anode. The furnace body 1 has a water-cooled structure to prevent various equipment and parts (such as an airtight backing) from being overheated due to heating during processing. In the ion nitriding process, hydrogen gas and a processing gas 6 such as nitrogen gas or ammonia gas are introduced while reducing the pressure in the furnace to at least 10-"porr or less using a vacuum evacuation device 9 to increase the pressure to 1 to 10 TOrr.
Maintain a predetermined pressure in the range of DC power supply 3 to 300~
The nitriding process is performed by applying a voltage of 1500 V to generate glow discharge. In Fig. 1, 4 is an anode terminal, 5 is a cathode terminal, 6 is a gas cylinder, 7 is a gas inlet, 8 is a gas exhaust port to which a vacuum device 9 is connected, 10 is a vacuum gauge terminal, and 11 is an optical pyrometer. , 12 is a control panel.

Since the object to be processed is heated by glow discharge energy, no external heat source is required. Therefore, since the surface generating the glow becomes the heating source, the temperature of the object to be treated changes depending on the ratio of the surface to the volume. In other words, if the workpiece is of the same shape and has a relatively simple shape, the temperature will be almost uniform throughout and uniform processing will be possible, but if the workpiece has a complex shape, especially parts with different surface areas relative to volume, the temperature will vary depending on the location even if the workpiece is the same. This has the disadvantage that the concentration and depth of diffused atoms vary greatly, making uniform processing impossible.

In particular, this temperature difference tends to increase when processing at high temperatures. Therefore, carburizing or boronizing, which is performed at a higher temperature than ion nitriding, has a temperature of 700 to 120
Heating is performed in a temperature range of 0°C, and if heating to a high temperature range or maintaining it during such processing is done using glow discharge energy alone, the thermal efficiency is poor and a lot of energy is required, and the temperature difference becomes large. It has become difficult to apply hardening treatment uniformly to different locations. As a solution, for example, a method of performing ion treatment in a conventional vacuum heat treatment furnace,
Alternatively, there is a method of performing ion processing while performing high frequency heating from the outside. However, in the former case, the object to be processed cannot be heated by a heater such as carbon fiber, and the heating power source requires high output, and the amount of heating by ions is reduced, so compared to conventional processing using only ions, the heating power is required. The ion impact energy on the processed product is small, and the amount of ions on the surface is also small. Therefore, the structure and control of the device become complicated, the overall energy consumption is large, and the concentration of atoms involved in processing such as cleaning action by ions and surface hardening is also reduced. In the latter case, when many parts are charged into a furnace to be heated by induced current caused by high frequency, the heating temperature of each individual part will differ depending on the distance from the high frequency coil, and as in the former, the power supply , control becomes complicated. In addition, a large amount of energy is required for the treatment, and there are also drawbacks in terms of ion cleaning effect and control of surface ion concentration.

On the other hand, depending on the intended use of the article to be treated, it may be necessary to perform treatments having multiple functions within the same article, rather than subjecting the entire surface to a surface treatment with the same function. In the above-mentioned ion surface treatment, such a treatment cannot be performed continuously in one process in the same furnace, and is performed in a complicated process.

In the ion surface treatment method, as a method of obtaining partially different surface treatment layers (for example, the depth and hardness of the nitrided layer in nitriding treatment), as shown in Japanese Patent Application Laid-Open No. 47-6956, An additional metal electrode (anode for the product to be processed) is placed between the product to be processed (cathode) and the wall of the reduced pressure vessel (anode) via a resistor to the anode power supply, and the potential of this part is changed to partially A method of changing the ion bombardment energy is also known. In this method, for example, in the case of ion nitriding treatment, additional metal electrodes are provided at parts that require different nitriding, and the potential of these parts is changed by an external circuit to change the ion bombardment energy and adsorb it to the surface part. The amount of nitrogen that diffuses is adjusted to form nitrided layers with partially different depths. However, with this method of partially changing the ion bombardment energy using an external circuit, it is difficult to control the bombardment energy, the device becomes complicated, and in practice, nitrogen diffusion is strongly influenced by temperature as well as ion bombardment energy. Therefore, there was a drawback that the depth of the nitrided layer could not be locally varied widely.

SUMMARY OF THE INVENTION An object of the present invention was to solve the above-mentioned drawbacks of the prior art. A method for glow discharge treatment of materials that uses an ion treatment power source near the product to efficiently heat it to a certain set temperature and process it in whole or in part, and that can significantly save the energy required for heating. The goal is to provide the following.

The present invention excites a predetermined gas substance contained in the atmosphere in a reduced pressure atmosphere by glow discharge, causes it to collide with the surface of a conductive member connected to a cathode, and causes a certain physical or In a device that causes a chemical change, each object to be treated (or objects to be treated) is surrounded by an auxiliary cathode that is made up of at least two surfaces with a constant gap between them, separate from the electrode that uses the object to be treated as the cathode. The present invention relates to a glow discharge treatment method for a conductive member, characterized in that a hollow cathode effect is produced by disposing the conductive member inside the conductive member.

By exposing the treated portion of the conductive member to at least two types of glow discharge treatment conditions, the conductive member can be subjected to a plurality of types of treatments.

By exposing two or more treated parts of the conductive member to different glow discharge treatment conditions, it is possible to provide a single conductive member with parts having multiple types of functions.

The present invention will be explained in detail below. First, when diffusing atoms from the surface of a workpiece to impart functions such as surface hardening, surface lubrication, corrosion resistance, and fatigue resistance, it is necessary to do so without adversely affecting the workpiece. If the amount and depth of atoms to be diffused or adsorbed have appropriate values, and the surface concentration is kept constant (generally related to the solid solubility limit of the material or the growth rate of the adsorbate), the treatment temperature is important. play a role. Taking surface hardening of steel materials as an example, when surface hardening is performed with nitrogen, the temperature is generally in the range of 400 to 700°C. 7 for surface hardening in carburizing process using carbon
00 to 1100℃, and 800 to 1200℃ for boron
become. On the other hand, surface lubrication by sulfur treatment using sulfur is 150 to 600°C. As described above, there are appropriate processing temperatures and processing times depending on the atoms to be diffused and the material to be processed. In the ion surface treatment method, it is possible to efficiently raise the surface temperature of the object to be treated or to partially heat it to an appropriate temperature using an external heat source, but in the present invention, the metal material of the object to be treated A plurality of auxiliary electrodes, each having approximately the same potential as the auxiliary electrode, are placed on the cathode side at a predetermined distance from the surface of the workpiece, and by controlling the pressure of the gas introduced during ion treatment, the auxiliary electrode and the workpiece are Processing is performed by generating a hollow cathode discharge between the products or within the auxiliary cathode. Here, heat absorption from the workpiece is due to heat exchange of glow discharge energy and radiant heat from between the workpieces and the electrodes, and heat loss due to heat release is due to radiation heat, convection of the processing gas, and heat conduction from the electrodes. (Outflow from electrode cooling water), etc. Among these factors, radiant heat between the auxiliary cathode and the workpiece can be used to heat the required part of the workpiece to a predetermined temperature. This is heated and kept warm by setting the cathode spacing at a constant interval and setting the introduced gas pressure to a predetermined value to cause hollow cathode discharge between the two negative glows. In this case, the ionization density of the gas between the object to be treated and the auxiliary electrode and auxiliary cathode is also increased, and the surface reaction with the target active atoms to be diffused is also activated.

In order to effectively carry out this phenomenon, important factors are the distance from the surface of the object to be treated to the auxiliary electrode or the interval within the auxiliary cathode, and the setting of the gas pressure in accordance with the composition of the gas. First, there is the distance from the surface of the object to be treated to the auxiliary electrode or the interval within the auxiliary cathode, which varies depending on the gas pressure.
The desired effect will not occur unless the negative glow generated on the object to be treated and the disposed auxiliary electrode interacts with each other to generate hollow cathode discharge. This is because the width of the negative glow varies depending on the gas composition and gas pressure, which strongly affects hollow cathode discharge. Furthermore, the negative glow discharge area of the auxiliary electrode, which is closely related to these, must also be considered. Therefore, in general ionic surface treatment, when this distance is less than 0.5 wm, the reaction of the processing gas to the treated object tends to be inhibited, while when the distance is more than 50 mm, the interaction between glows is inhibited. As the influence becomes weaker, the heating effect of the radiant heat from the auxiliary electrode to the workpiece decreases, and heat is lost to the auxiliary electrode, resulting in energy loss. Therefore, FIG. 2 shows the heating effect of the object to be processed by the auxiliary electrode of the parallel plate cathode. In the figure, a part of the object to be processed 2 is placed in the gap between two parallel plate cathodes, which are made up of two parallel plane auxiliary electrodes 13 placed with a certain gap between them, and these are connected to the cathode. Using a mixed gas of nitrogen gas, hydrogen gas, argon gas, methane gas, etc., a glow discharge is generated at a gas pressure of 2.5'l'orr, and the temperature of the upper part of the workpiece without the auxiliary electrode on the parallel surface is increased to 600°C. The temperature of the object to be processed inside the auxiliary electrode on the parallel plane was measured. FIG. 3 shows the relationship between the distance of the gap between the auxiliary electrode and the object to be processed and the temperature.

The relationship between distance and temperature varies greatly depending on the ratio of introduced gas, gas pressure, the shape of the material to be treated, the material of the auxiliary electrode and its shape, etc. Looking at the case of FIG. 3, when the distance is less than 0.518, the temperature inside the auxiliary electrode on the parallel surface is 600'C, which is almost the same temperature as the other glow surfaces. When the distance becomes larger than that, the temperature of the auxiliary electrode portion on the parallel plane rises rapidly, reaching a peak value at a distance of 3 to 7o+. In the case of this distance, the temperature inside the auxiliary electrode on the parallel plane is 1000'C or more, which is about 400'C or more higher than the other parts. As the distance further increases, the temperature difference between them gradually decreases, and at about 501111, there is no significant difference. As mentioned above, the distance between the parallel plane auxiliary electrode and the workpiece is 0.
．． A range of 5 to 5011111 is desirable.

Next is the gas pressure, which has an appropriate value depending on the gas mixture ratio and the desired characteristics. For example, FIG. 4 shows an example in which the temperature was determined using the same method as in FIG. 2, with the distance between the auxiliary electrode on the parallel plane and the workpiece being 15 m111, and the gas pressure being varied.

According to the figure, when the gas pressure is maintained at 0.5'l'orr, the temperature inside the auxiliary electrode on the parallel surface becomes almost the same as that on the other glow surfaces. On the other hand, when the gas pressure is increased to 0.5 Torr or more, the glow discharge current density in the auxiliary electrode on the parallel plane becomes higher than in other parts, resulting in a temperature difference. In this example, if the gas pressure is maintained at approximately 2.5 Torr, the temperature within the auxiliary electrode on the parallel plane can be maintained at a higher temperature of approximately 400° C. or more than other portions. Note that this maximum heating temperature or temperature difference can be varied widely depending on the composition of the gas, the structure of the auxiliary electrode, etc. As mentioned above, in Kenpo, processing pressure is an important factor in order to heat and maintain the whole or part of the object to be processed. Generally 0.1 to 10
It is desirable to vary it within the range of TOrr.

Other incidental factors in the present invention include the size and material of the auxiliary electrode. First, the size of the auxiliary electrode is preferably such that when the entire object to be processed is heated, the object to be processed can be placed almost inside the auxiliary electrode on a parallel surface. On the other hand, when it is desired to partially heat or perform a different treatment on the object to be treated, it is preferable that the area is large enough to fit inside the auxiliary electrode having substantially parallel surfaces. Next, the material of the auxiliary electrode may be any material as long as it does not adversely affect the surface of the object to be processed during processing.

Furthermore, the shape and structure of the auxiliary cathode are also important factors in effectively carrying out the present invention. FIG. 6 shows one of the auxiliary electrode structures after improving the flat plate cathode 13 shown in FIG. 2. In this case, 13a is the side facing the workpiece, and 13b is the opposite side. This treatment method reduces the cathode gap.

1 is an important factor. Furthermore, a flat plate cathode 1 on the side of the product to be processed
It is effective to create a structure in which 3a has a higher temperature than 13b. The hollow cathode effect is 13a and 13
It is generated between b and 13a and the product to be processed. Further, the structure of the auxiliary cathode may be a cylindrical structure consisting of concentric circles as shown in FIG. In this case, the auxiliary electrode 13C or 13d is 13
By making it thinner than C and attaching it to 13C as a smaller piece, it is possible to reduce changes in the gap between hollow cathode discharges due to deformation due to thermal expansion caused by heating due to hollow cathode discharges. Next, regarding the gap between the auxiliary electrodes t8 and t, in general ionic surface hardening treatment, if this distance is less than 0.5 cm, the reaction of the processing gas to the processed product tends to be inhibited. On the other hand, if the distance is 50 m+ or more, the influence of the hollow cathode effect between the glows becomes weaker, and the heating effect due to radiant heat between the auxiliary electrodes or the object to be treated decreases, and the treatment becomes similar to general ion surface treatment.

Here, glow discharge is generated at a pressure of 3'l"orr using a mixed gas of nitrogen gas, hydrogen gas, argon gas, and methane gas. If there is no auxiliary electrode, use the auxiliary electrode shown in Figures 6 and 7 to generate glow discharge. In Fig. 6, t is set to 30, and when the gap between 13a and the workpiece is arbitrarily changed, and in Fig. 7, t! is set to 1.
If o■, 'I are arbitrarily changed and the gap between this and the workpiece is 1Q+o+, the diameter is 15fi x length 50111
The temperature of each test piece of No. 1 was measured while being processed simultaneously in the same furnace. FIG. 8 is a graph showing the relationship between the gap and temperature.

The temperature of conventional glow discharge alone without an auxiliary electrode is 570°C as shown in A, but when the auxiliary electrode shown in Figure 6 is used, the temperature becomes as shown in B, where a hollow cathode discharge occurs. ~7m, it is heated to a temperature of 90°C or higher. In addition, when the auxiliary electrode shown in Figure 7 is used, the temperature becomes as shown by curve C in Figure 8, which is 300°C in the hollow cathode discharge section compared to the case without the auxiliary electrode.
The temperature is higher than that. This temperature difference is due to the composition of the gas,
It varies greatly depending on gas pressure, auxiliary electrode material, shape, thickness, etc. As mentioned above, in order to heat each individual component or a specific position of each component using hollow cathode discharge using an auxiliary electrode, the distance at which hollow cathode discharge is generated is in the range of 0.5 to 50 cm. It turns out that is desirable. Next, the structure of the auxiliary electrode is shown in Figures 6 and 7.
In the structure shown in the figure, the cathode 13 on the surface facing the anode serves as an auxiliary electrode.
If a similar experiment is carried out by making the cathode 13a thicker than the cathode 13a on the side of the product to be processed, the thicker the cathode 13a becomes, the smaller the temperature difference will be with the same power consumption.
A desirable result was obtained with a structure in which a temperature was higher than that of the cathode 13b.

Examples of the present invention will be described in detail.

[Example 1] The objects to be treated 2 were arranged in a concentric ring shape inside the ion surface treatment apparatus shown in FIGS. 9 and 10, and auxiliary electrodes 13 having parallel surfaces in the shape of a concentric ring were set on the inner and outer peripheries. , ion carburization treatment was performed.

48 chrome-molybdenum steel pinions (diameter 25Io111, length 50 cages, module 2) of JIS standard SCM415 were used as the objects to be treated. The annular auxiliary electrode 14 installed on the outer periphery has a diameter of 200 mm (inner diameter), and 15 installed on the inner periphery has a diameter of 80 mm (outer diameter) and a height of 1.
It is made of 8841 with a thickness of 10M and a wall thickness of 6WrIn.

The treatment is carried out by reducing the pressure inside the vacuum container 1 to below 1Q-2'1'orr, and in that state hydrogen gas is introduced to create a hollow cathode effect between the pinion and the large and small annular auxiliary electrodes, and the temperature is increased to 980°C. Sputter cleaning was performed for 5 m1n, and then nitrogen gas, methane gas, and argon gas were added and carburization was performed by maintaining the same temperature for 10 m1n. The temperature distribution during this treatment was measured using an infrared pyrometer.

The temperature distribution during the treatment of the present invention was ±7°C. After the treatment, the treated product was cooled in a furnace, and its cross-sectional hardness distribution was measured.

FIG. 11 shows the hardness distribution. In FIG. 11, curves a and 3/ are the hardness distribution after the treatment according to the present invention, where curve a is the tooth tip and curve a' is the tooth bottom. The curves and b/ are the hardness distribution after treatment by the conventional method,
The curved line b is the tooth tip, and the curve b' is the tooth bottom. As is clear from the figure, in the conventional method, the temperature at the tooth tip is high and the effective hardening depth is 1.5 mm, but the surface hardness at the tooth bottom is low and the effective hardening depth is 0.4 wa. As described above, with the conventional method, it was not possible to obtain a uniform carburized layer on pinions and the like. -According to the strength wood invention, the effective hardening depth is 1.3 rra at the tooth tip and 0.85 rra at the tooth bottom, and the surface hardness is Hv80 in both cases.
It was possible to obtain a uniform carburized layer. From the above results, according to the method of the present invention, the temperature of the tooth tips and tooth bottoms of a large number of complex-shaped pinions can be maintained uniformly in a high temperature range. On the other hand, the amount of discharge power required for the treatment is 1/3 of the conventional method, so it is extremely effective in terms of resource and energy conservation.

[Example 2] Using the same workpiece as in Example 1 and changing the annular auxiliary electrode in various ways, a mixed gas of nitrogen gas, hydrogen gas, argon gas, and methane gas was mixed in the apparatus shown in Fig. 9. The temperature of the processed product was measured when the pressure was varied. The shape of the annular auxiliary electrode is as shown in Fig. 61.1 and Fig. 6, with a hole of diameter 0.5 to 91 m and a hole of 0.5 to 9 m in diameter at 138.
A slit with a width of m is provided. The gaps between the annular auxiliary electrodes 13a installed on the outer and inner peripheries and the workpiece are both constant 15 cm, and the gaps between the annular auxiliary electrodes 13a
and 13b gap 1. was constant at 5 m. FIG. 12 shows the relationship between gas pressure and temperature distribution.

In order to stably perform surface treatment using ions, it is important that the temperature of the object to be treated does not change significantly even with slight fluctuations in gas pressure. With a single annular auxiliary electrode, the temperature is high within a relatively narrow pressure range only within the range where hollow cathode discharge is generated between the electrode and the workpiece, as shown by the curve in FIG. If this is done as shown in FIG. 6, the curve E in FIG. 12 will appear, and the hollow cathode effect will occur within the electrode between 138 and 13b in FIG. 6, and this effect can be seen. Further, if holes with diameters of 1 to 3 cm are provided in order in the hole 13a, the pressure range at maximum heating becomes wider as shown by curve F in FIG. In this case, a hollow cathode discharge is generated in the hole of the auxiliary electrode 13a according to the pressure due to the fluctuation of pressure, and the pressure range of the hollow cathode discharge with the workpiece is thereby widened. Note that the maximum heating temperature and the pressure range in which a constant temperature can be maintained can vary widely depending on the shape and structure of the auxiliary electrode and the gas composition.

Next, use an electrode having the structure shown in FIG. 6 with a diameter of 0.5 to 3 m.

The hole sizes were examined using an internal auxiliary electrode in which holes of 4.5, 6, 7, and 8.9+ m were sequentially provided.

As a result, it was found that when the maximum hole diameter was 4 m+i or more, the maximum heating temperature decreased rapidly, and when the maximum hole diameter was 8WO11 or more, the effect decreased significantly. The most effective range is 0.5 to 4 mm in diameter, and it is also somewhat effective in the range of 0.5 to 7 III. Next, a slit with a length of 201 m was provided in place of the hole. In this case as well, if the width of the slit was within 4 mm, discharge based on the hollow cathode effect similarly occurred within the slit. Next, a similar experiment was conducted with a ceramic layer provided on the outside of the electrode. As a result, it has been found that when an electrode having the shape shown in FIG. 6 is provided with ceramic on the opposite side of the workpiece, the electrical output can be reduced by about 16 inches.

[Brief explanation of drawings]

Fig. 1 is a schematic diagram of the ion nitriding treatment equipment, Fig. 2 is an explanatory diagram of an auxiliary electrode of a parallel plate electrode, Fig. 3 is an explanatory diagram of the electrode in Fig. 2 formed in an annular shape, and Fig. 4 is an explanatory diagram of the auxiliary electrode of the parallel plate electrode. Figure 5 is an explanatory diagram of the relationship between the distance and temperature between the processed product and the parallel plate cathode according to the method shown in the figure, Figure 5 is also an explanatory diagram of the relationship between pressure and temperature, and Figure 6 is the improved parallel plate cathode shown in Figure 2. Perspective view, Figure 7 is the 6th
FIG. 8 is a graph of the relationship between the gap and temperature; FIG. 9 is a vertical cross-sectional view of the apparatus for carrying out the ion surface treatment method of the present invention; FIG. An explanatory diagram of the annular auxiliary electrode, FIG. 11 is an explanatory diagram of the relationship between distance and hardness,
FIG. 12 is an explanatory diagram of the relationship between gas pressure and temperature. DESCRIPTION OF SYMBOLS 1...Furnace body, 2...Workpiece (cathode), 4...Anode terminal, butt...Cathode terminal, 7...Gas inlet, 8...
・Gas exhaust port, 9... Vacuum device, 13... Parallel cathode, 13a... Auxiliary cathode (workpiece side), 13b...
Auxiliary cathode (opposite side of processed product), 13C... Auxiliary cathode (middle part), 131... Annular auxiliary electrode (outer circumference), 1
32... Annular auxiliary electrode (inner circumference). Early l Country $4-mouth θ lθ 20 Jθ #
50 size Nuri l h Jl: De 4 Dinghushu (Gia Qianhui and Heisi Shangffi (elm) 5th figure power"su pressure bu 7 (Tρrr) th b th 7th figure $8 solid r gigantic [( Hokuni〕 No. /θ country (ino ¥11 mouth distance th* (m+) gu 12 eyes 4

Claims (1)

[Claims] 1. In a reduced pressure atmosphere, a predetermined gas substance contained in the atmosphere is excited by glow discharge and collides with the surface of the conductive member connected to the cathode, thereby producing the conductive member. For products that cause certain physical or chemical changes inside the cathode, auxiliary electrodes are installed facing each other, and the part to be treated of the conductive member is set inside the electrode, so that the temperature of the part to be treated is the same as that of the auxiliary cathode. A method for ionic surface treatment of a conductive member, characterized in that the surface treatment is performed in close proximity to each other so as to achieve the above. 2. The conductive electrode according to claim 1, wherein the auxiliary electrode is arranged so as to surround the conductive member to be processed with at least two or more opposing surfaces. A method for ionic surface treatment of sexual parts. 3. The ion surface treatment method for conductive members according to claim 1, wherein the auxiliary electrode is located close to the outer surface of a plurality of conductive members to be treated. 4. Claim 4, characterized in that the temperature of the side of the auxiliary electrode facing the treated portion of the conductive member is higher than the temperature of the side opposite to that side. The method for treating a conductive member according to item 1. 5. The method for treating a conductive member according to claim 1, wherein the treated portion of the conductive member is exposed to at least two types of glow discharge treatment conditions. 6. The method for treating a conductive member according to claim 1, wherein two or more treated parts of the conductive member are exposed to different glow discharge treatment conditions. 7. In a method of processing by generating glow discharge between the surface of the object to be treated and an anode, an auxiliary electrode having a discontinuous surface connected to the cathode is provided near the object to be treated, and the auxiliary electrode or the surface of the object is A surface treatment method characterized by generating a hollow cathode discharge between the treated product and the treated product. 8. In claim 7, the auxiliary electrode surface has a hole with a diameter of 1 to 7w111 or a slit with a width of 1 to 7fi.
A surface treatment method characterized by forming. 9. A surface treatment method according to claim 7, characterized in that an electrode is provided on the outside of the auxiliary electrode provided with holes or slits to form a composite auxiliary electrode. 1. A surface treatment method according to claim 7, characterized in that the outermost layer of the auxiliary electrode is provided with a ceramic layer or a ceramic material. 11. In claim 7, the pressure inside the vacuum container is 0.1 to 1Q'l'orr, and the gases include nitrogen gas, hydrogen gas, hydrocarbon gas, ammonia gas, sulfide gas, argon gas, A hollow cathode discharge is generated inside the auxiliary electrode or at least on one side between the auxiliary electrode and the object to be treated by using one or more of boride-based gas, oxygen gas, and halogen gas and varying the pressure during treatment. , a surface treatment method characterized by heating the surface of an article to be treated.