JPS62185881A - イオン表面処理方法 - Google Patents

イオン表面処理方法

Info

Publication number
JPS62185881A
JPS62185881A JP2722386A JP2722386A JPS62185881A JP S62185881 A JPS62185881 A JP S62185881A JP 2722386 A JP2722386 A JP 2722386A JP 2722386 A JP2722386 A JP 2722386A JP S62185881 A JPS62185881 A JP S62185881A
Authority
JP
Japan
Prior art keywords
gas
treated
article
auxiliary electrode
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2722386A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0427294B2 (enrdf_load_stackoverflow
Inventor
Shizuka Yamaguchi
静 山口
Naotatsu Asahi
朝日　直達
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2722386A priority Critical patent/JPS62185881A/ja
Publication of JPS62185881A publication Critical patent/JPS62185881A/ja
Publication of JPH0427294B2 publication Critical patent/JPH0427294B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Chemical Vapour Deposition (AREA)
JP2722386A 1986-02-10 1986-02-10 イオン表面処理方法 Granted JPS62185881A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2722386A JPS62185881A (ja) 1986-02-10 1986-02-10 イオン表面処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2722386A JPS62185881A (ja) 1986-02-10 1986-02-10 イオン表面処理方法

Publications (2)

Publication Number Publication Date
JPS62185881A true JPS62185881A (ja) 1987-08-14
JPH0427294B2 JPH0427294B2 (enrdf_load_stackoverflow) 1992-05-11

Family

ID=12215096

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2722386A Granted JPS62185881A (ja) 1986-02-10 1986-02-10 イオン表面処理方法

Country Status (1)

Country Link
JP (1) JPS62185881A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01147052A (ja) * 1987-12-01 1989-06-08 Daido Steel Co Ltd イオン浸炭炉の操業方法および装置
JPH0287063U (enrdf_load_stackoverflow) * 1988-12-22 1990-07-10
JP2020063462A (ja) * 2018-10-15 2020-04-23 株式会社神戸製鋼所 窒化処理装置および窒化処理方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01147052A (ja) * 1987-12-01 1989-06-08 Daido Steel Co Ltd イオン浸炭炉の操業方法および装置
JPH0287063U (enrdf_load_stackoverflow) * 1988-12-22 1990-07-10
JP2020063462A (ja) * 2018-10-15 2020-04-23 株式会社神戸製鋼所 窒化処理装置および窒化処理方法

Also Published As

Publication number Publication date
JPH0427294B2 (enrdf_load_stackoverflow) 1992-05-11

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