JPS6325070B2 - - Google Patents

Info

Publication number
JPS6325070B2
JPS6325070B2 JP59178764A JP17876484A JPS6325070B2 JP S6325070 B2 JPS6325070 B2 JP S6325070B2 JP 59178764 A JP59178764 A JP 59178764A JP 17876484 A JP17876484 A JP 17876484A JP S6325070 B2 JPS6325070 B2 JP S6325070B2
Authority
JP
Japan
Prior art keywords
auxiliary electrode
glow discharge
gas
workpiece
treated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59178764A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6156273A (ja
Inventor
Akyoshi Takahashi
Naotatsu Asahi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP17876484A priority Critical patent/JPS6156273A/ja
Publication of JPS6156273A publication Critical patent/JPS6156273A/ja
Publication of JPS6325070B2 publication Critical patent/JPS6325070B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
JP17876484A 1984-08-28 1984-08-28 グロー放電による表面処理装置 Granted JPS6156273A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17876484A JPS6156273A (ja) 1984-08-28 1984-08-28 グロー放電による表面処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17876484A JPS6156273A (ja) 1984-08-28 1984-08-28 グロー放電による表面処理装置

Publications (2)

Publication Number Publication Date
JPS6156273A JPS6156273A (ja) 1986-03-20
JPS6325070B2 true JPS6325070B2 (enrdf_load_stackoverflow) 1988-05-24

Family

ID=16054198

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17876484A Granted JPS6156273A (ja) 1984-08-28 1984-08-28 グロー放電による表面処理装置

Country Status (1)

Country Link
JP (1) JPS6156273A (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2631379B2 (ja) * 1987-12-21 1997-07-16 株式会社日立製作所 被膜形成装置
FR2630133B1 (fr) * 1988-04-18 1993-09-24 Siderurgie Fse Inst Rech Procede pour l'amelioration de la resistance a la corrosion de materiaux metalliques
FR2652591B1 (fr) * 1989-10-03 1993-10-08 Framatome Procede d'oxydation superficielle d'une piece en metal passivable, et elements d'assemblage combustible en alliage metallique revetus d'une couche d'oxyde protectrice.
JP4578694B2 (ja) * 2001-02-09 2010-11-10 株式会社カネカ プラズマｃｖｄ装置およびプラズマｃｖｄ装置を用いたシリコン系膜の製造方法
JP4917904B2 (ja) * 2007-02-01 2012-04-18 株式会社ピュアロンジャパン 成膜装置
JP6990162B2 (ja) * 2018-10-15 2022-01-12 株式会社神戸製鋼所 窒化処理装置および窒化処理方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59136476A (ja) * 1983-01-21 1984-08-06 Semiconductor Energy Lab Co Ltd プラズマ気相反応装置

Also Published As

Publication number Publication date
JPS6156273A (ja) 1986-03-20

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