JPH0518758Y2 - - Google Patents
Info
- Publication number
- JPH0518758Y2 JPH0518758Y2 JP1986135959U JP13595986U JPH0518758Y2 JP H0518758 Y2 JPH0518758 Y2 JP H0518758Y2 JP 1986135959 U JP1986135959 U JP 1986135959U JP 13595986 U JP13595986 U JP 13595986U JP H0518758 Y2 JPH0518758 Y2 JP H0518758Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- mask
- semiconductor wafer
- sides
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 13
- 235000012431 wafers Nutrition 0.000 claims 6
- 239000003550 marker Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986135959U JPH0518758Y2 (th) | 1986-09-04 | 1986-09-04 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986135959U JPH0518758Y2 (th) | 1986-09-04 | 1986-09-04 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6341156U JPS6341156U (th) | 1988-03-17 |
JPH0518758Y2 true JPH0518758Y2 (th) | 1993-05-18 |
Family
ID=31038632
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986135959U Expired - Lifetime JPH0518758Y2 (th) | 1986-09-04 | 1986-09-04 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0518758Y2 (th) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5917441B2 (ja) * | 1975-02-26 | 1984-04-21 | 豊田工機株式会社 | 測定装置を備えた工具台送り制御装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5917441U (ja) * | 1982-07-23 | 1984-02-02 | 日東電工株式会社 | フオトマスク |
-
1986
- 1986-09-04 JP JP1986135959U patent/JPH0518758Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5917441B2 (ja) * | 1975-02-26 | 1984-04-21 | 豊田工機株式会社 | 測定装置を備えた工具台送り制御装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS6341156U (th) | 1988-03-17 |
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