JPH0479932B2 - - Google Patents

Info

Publication number
JPH0479932B2
JPH0479932B2 JP61106487A JP10648786A JPH0479932B2 JP H0479932 B2 JPH0479932 B2 JP H0479932B2 JP 61106487 A JP61106487 A JP 61106487A JP 10648786 A JP10648786 A JP 10648786A JP H0479932 B2 JPH0479932 B2 JP H0479932B2
Authority
JP
Japan
Prior art keywords
wafer
vacuum chamber
vacuum
transfer device
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61106487A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62264128A (ja
Inventor
Yoshiaki Yanagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP10648786A priority Critical patent/JPS62264128A/ja
Priority to US06/911,362 priority patent/US4733632A/en
Publication of JPS62264128A publication Critical patent/JPS62264128A/ja
Publication of JPH0479932B2 publication Critical patent/JPH0479932B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
  • Non-Mechanical Conveyors (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
JP10648786A 1985-09-25 1986-05-09 ウエハ真空処理装置 Granted JPS62264128A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10648786A JPS62264128A (ja) 1986-05-09 1986-05-09 ウエハ真空処理装置
US06/911,362 US4733632A (en) 1985-09-25 1986-09-25 Wafer feeding apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10648786A JPS62264128A (ja) 1986-05-09 1986-05-09 ウエハ真空処理装置

Publications (2)

Publication Number Publication Date
JPS62264128A JPS62264128A (ja) 1987-11-17
JPH0479932B2 true JPH0479932B2 (enExample) 1992-12-17

Family

ID=14434820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10648786A Granted JPS62264128A (ja) 1985-09-25 1986-05-09 ウエハ真空処理装置

Country Status (1)

Country Link
JP (1) JPS62264128A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2919837B2 (ja) * 1988-03-08 1999-07-19 富士通株式会社 ウエーハ搬送具
JPH01307537A (ja) * 1988-06-06 1989-12-12 Takenaka Komuten Co Ltd 制振支持構造
JPH02152820A (ja) * 1988-12-01 1990-06-12 Tel Sagami Ltd 熱処理装置
KR100829923B1 (ko) * 2006-08-30 2008-05-16 세메스 주식회사 스핀헤드 및 이를 이용하는 기판처리방법
JP2008141898A (ja) * 2006-12-05 2008-06-19 Duplo Seiko Corp アクチュエータおよび搬送装置
JP2009290991A (ja) * 2008-05-29 2009-12-10 Iai:Kk ボイスコイルモータとアクチュエータ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56171590U (enExample) * 1980-05-21 1981-12-18
JPS5771260A (en) * 1980-10-17 1982-05-04 Mitsubishi Electric Corp Actuator
JPS584389U (ja) * 1981-06-30 1983-01-12 富士通株式会社 ハンド

Also Published As

Publication number Publication date
JPS62264128A (ja) 1987-11-17

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