JPS56171590U - - Google Patents
Info
- Publication number
- JPS56171590U JPS56171590U JP6879780U JP6879780U JPS56171590U JP S56171590 U JPS56171590 U JP S56171590U JP 6879780 U JP6879780 U JP 6879780U JP 6879780 U JP6879780 U JP 6879780U JP S56171590 U JPS56171590 U JP S56171590U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6879780U JPS56171590U (enExample) | 1980-05-21 | 1980-05-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6879780U JPS56171590U (enExample) | 1980-05-21 | 1980-05-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS56171590U true JPS56171590U (enExample) | 1981-12-18 |
Family
ID=29662720
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6879780U Pending JPS56171590U (enExample) | 1980-05-21 | 1980-05-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56171590U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62264128A (ja) * | 1986-05-09 | 1987-11-17 | Tokyo Electron Ltd | ウエハ真空処理装置 |
-
1980
- 1980-05-21 JP JP6879780U patent/JPS56171590U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62264128A (ja) * | 1986-05-09 | 1987-11-17 | Tokyo Electron Ltd | ウエハ真空処理装置 |