JPH0474865B2 - - Google Patents

Info

Publication number
JPH0474865B2
JPH0474865B2 JP61054424A JP5442486A JPH0474865B2 JP H0474865 B2 JPH0474865 B2 JP H0474865B2 JP 61054424 A JP61054424 A JP 61054424A JP 5442486 A JP5442486 A JP 5442486A JP H0474865 B2 JPH0474865 B2 JP H0474865B2
Authority
JP
Japan
Prior art keywords
conductor layer
etching
photoresist
sides
etched
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61054424A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62211930A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5442486A priority Critical patent/JPS62211930A/ja
Priority to US07/017,419 priority patent/US4786545A/en
Priority to GB8704425A priority patent/GB2187331B/en
Publication of JPS62211930A publication Critical patent/JPS62211930A/ja
Priority to GB8901825A priority patent/GB2211351B/en
Priority to SG1392A priority patent/SG1392G/en
Priority to SG1492A priority patent/SG1492G/en
Publication of JPH0474865B2 publication Critical patent/JPH0474865B2/ja
Priority to HK360/93A priority patent/HK36093A/xx
Priority to HK359/93A priority patent/HK35993A/xx
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01013—Aluminum [Al]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01078—Platinum [Pt]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/14—Integrated circuits

Landscapes

  • Wire Bonding (AREA)
JP5442486A 1986-02-28 1986-03-12 基板導体層への突起製造方法 Granted JPS62211930A (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP5442486A JPS62211930A (ja) 1986-03-12 1986-03-12 基板導体層への突起製造方法
US07/017,419 US4786545A (en) 1986-02-28 1987-02-24 Circuit substrate and method for forming bumps on the circuit substrate
GB8704425A GB2187331B (en) 1986-02-28 1987-02-25 Method of forming an integrated circuit assembly or part thereof
GB8901825A GB2211351B (en) 1986-02-28 1989-01-27 Method of forming an integrated circuit assembly or part thereof
SG1392A SG1392G (en) 1986-02-28 1992-01-08 Method of forming an integrated circuit assembly or part thereof
SG1492A SG1492G (en) 1986-02-28 1992-01-08 Method of forming an integrated circuit assembly or part thereof
HK360/93A HK36093A (en) 1986-02-28 1993-04-15 Method of forming an integrated circuit assembly or part thereof
HK359/93A HK35993A (en) 1986-02-28 1993-04-15 Method of forming an integrated circuit assembly or part thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5442486A JPS62211930A (ja) 1986-03-12 1986-03-12 基板導体層への突起製造方法

Publications (2)

Publication Number Publication Date
JPS62211930A JPS62211930A (ja) 1987-09-17
JPH0474865B2 true JPH0474865B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-11-27

Family

ID=12970328

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5442486A Granted JPS62211930A (ja) 1986-02-28 1986-03-12 基板導体層への突起製造方法

Country Status (1)

Country Link
JP (1) JPS62211930A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55138864A (en) * 1979-04-16 1980-10-30 Sharp Corp Method of fabricating semiconductor assembling substrate

Also Published As

Publication number Publication date
JPS62211930A (ja) 1987-09-17

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term