JPH0468028B2 - - Google Patents

Info

Publication number
JPH0468028B2
JPH0468028B2 JP61223334A JP22333486A JPH0468028B2 JP H0468028 B2 JPH0468028 B2 JP H0468028B2 JP 61223334 A JP61223334 A JP 61223334A JP 22333486 A JP22333486 A JP 22333486A JP H0468028 B2 JPH0468028 B2 JP H0468028B2
Authority
JP
Japan
Prior art keywords
substrate
exhaust
zone
cup
drain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61223334A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6377569A (ja
Inventor
Masami Nishida
Nobutoshi Ookami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP61223334A priority Critical patent/JPS6377569A/ja
Priority to KR1019870010128A priority patent/KR920000674B1/ko
Priority to US07/098,476 priority patent/US4838979A/en
Publication of JPS6377569A publication Critical patent/JPS6377569A/ja
Publication of JPH0468028B2 publication Critical patent/JPH0468028B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—
    • H10P72/0424—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Coating Apparatus (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Weting (AREA)
JP61223334A 1986-09-19 1986-09-19 基板の回転式表面処理装置 Granted JPS6377569A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP61223334A JPS6377569A (ja) 1986-09-19 1986-09-19 基板の回転式表面処理装置
KR1019870010128A KR920000674B1 (ko) 1986-09-19 1987-09-12 기판의 회전식 표면처리장치
US07/098,476 US4838979A (en) 1986-09-19 1987-09-18 Apparatus for processing substrate surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61223334A JPS6377569A (ja) 1986-09-19 1986-09-19 基板の回転式表面処理装置

Publications (2)

Publication Number Publication Date
JPS6377569A JPS6377569A (ja) 1988-04-07
JPH0468028B2 true JPH0468028B2 (enExample) 1992-10-30

Family

ID=16796528

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61223334A Granted JPS6377569A (ja) 1986-09-19 1986-09-19 基板の回転式表面処理装置

Country Status (3)

Country Link
US (1) US4838979A (enExample)
JP (1) JPS6377569A (enExample)
KR (1) KR920000674B1 (enExample)

Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3732113C1 (de) * 1987-09-24 1988-10-20 Convac Gmbh Einrichtung zur Inline-Belackung von Compact-Discs
KR970011644B1 (ko) * 1988-04-08 1997-07-12 고다까 토시오 도포 처리 장치
US5168886A (en) * 1988-05-25 1992-12-08 Semitool, Inc. Single wafer processor
US5224504A (en) * 1988-05-25 1993-07-06 Semitool, Inc. Single wafer processor
US5230743A (en) * 1988-05-25 1993-07-27 Semitool, Inc. Method for single wafer processing in which a semiconductor wafer is contacted with a fluid
JP2800008B2 (ja) * 1988-06-27 1998-09-21 東京エレクトロン 株式会社 回転処理装置及び回転処理方法
US5395446A (en) * 1988-11-21 1995-03-07 Kabushiki Kaisha Toshiba Semiconductor treatment apparatus
JPH0628223Y2 (ja) * 1989-06-14 1994-08-03 大日本スクリーン製造株式会社 回転塗布装置
JPH0725256Y2 (ja) * 1989-09-13 1995-06-07 東京応化工業株式会社 スピンナー装置
US5169408A (en) * 1990-01-26 1992-12-08 Fsi International, Inc. Apparatus for wafer processing with in situ rinse
JPH0411728A (ja) * 1990-04-30 1992-01-16 Seiichiro Sogo 半導体ウェハの洗浄装置
US6375741B2 (en) 1991-03-06 2002-04-23 Timothy J. Reardon Semiconductor processing spray coating apparatus
US5416047A (en) * 1990-09-07 1995-05-16 Tokyo Electron Limited Method for applying process solution to substrates
DE9013668U1 (de) * 1990-09-29 1992-01-30 HAMATECH Halbleiter-Maschinenbau und Technologie GmbH, 7137 Sternenfels Vorrichtung für die Halbleitertechnik
JP3241058B2 (ja) * 1991-03-28 2001-12-25 大日本スクリーン製造株式会社 回転式塗布装置及び回転式塗布方法
JP3225441B2 (ja) * 1991-04-23 2001-11-05 東京エレクトロン株式会社 処理装置
US5265632A (en) * 1991-05-08 1993-11-30 Tokyo Electron Limited Cleaning apparatus
US5365031A (en) * 1992-03-23 1994-11-15 Hughes Aircraft Company Apparatus and method for shielding a workpiece holding mechanism from depreciative effects during workpiece processing
US5358740A (en) * 1992-06-24 1994-10-25 Massachusetts Institute Of Technology Method for low pressure spin coating and low pressure spin coating apparatus
US6395086B1 (en) * 1993-04-08 2002-05-28 Chartered Semiconductor Manufacturing Pte Ltd Shield for wafer station
JP3142195B2 (ja) * 1993-07-20 2001-03-07 大日本スクリーン製造株式会社 薬液供給装置
US5591264A (en) * 1994-03-22 1997-01-07 Sony Corporation Spin coating device
US5705223A (en) * 1994-07-26 1998-01-06 International Business Machine Corp. Method and apparatus for coating a semiconductor wafer
US5800670A (en) * 1995-05-20 1998-09-01 Kitano Engineering Co., Ltd. Spreader of an optical disc
US5676360A (en) * 1995-07-11 1997-10-14 Boucher; John N. Machine tool rotary table locking apparatus
US5952045A (en) * 1995-07-27 1999-09-14 Micron Technology, Inc. Method and apparatus for improved coating of a semiconductor wafer
US5611886A (en) * 1995-09-19 1997-03-18 Integrated Solutions, Inc. Process chamber for semiconductor substrates
US5952050A (en) 1996-02-27 1999-09-14 Micron Technology, Inc. Chemical dispensing system for semiconductor wafer processing
US5985031A (en) 1996-06-21 1999-11-16 Micron Technology, Inc. Spin coating spindle and chuck assembly
US5861061A (en) * 1996-06-21 1999-01-19 Micron Technology, Inc. Spin coating bowl
US5759273A (en) * 1996-07-16 1998-06-02 Micron Technology, Inc. Cross-section sample staining tool
KR100508575B1 (ko) * 1996-09-24 2005-10-21 동경 엘렉트론 주식회사 세정처리방법및장치와기판처리용장치
SG76527A1 (en) * 1996-09-24 2000-11-21 Tokyo Electron Ltd Method and apparatus for cleaning treatment
JPH10209102A (ja) * 1997-01-17 1998-08-07 Dainippon Screen Mfg Co Ltd 基板処理装置
US5840365A (en) * 1997-02-07 1998-11-24 The Fairchild Corporation Method and apparatus for spin-coating compact discs
US5916368A (en) * 1997-02-27 1999-06-29 The Fairchild Corporation Method and apparatus for temperature controlled spin-coating systems
JP3336898B2 (ja) * 1997-02-28 2002-10-21 三菱電機株式会社 シリコンウエハ表面の不純物回収方法およびその装置
US5916631A (en) * 1997-05-30 1999-06-29 The Fairchild Corporation Method and apparatus for spin-coating chemicals
US5908661A (en) * 1997-05-30 1999-06-01 The Fairchild Corporation Apparatus and method for spin coating substrates
SG71808A1 (en) * 1997-07-04 2000-04-18 Tokyo Electron Ltd Centrifugal coating apparatus with detachable outer cup
WO1999057754A1 (en) * 1998-05-04 1999-11-11 Cfmt, Inc. Wet processing methods for the manufacture of electronic components
US6536454B2 (en) * 2000-07-07 2003-03-25 Sez Ag Device for treating a disc-shaped object
TW535991U (en) * 2002-05-24 2003-06-01 Winbond Electronics Corp Barrier device
US7819079B2 (en) 2004-12-22 2010-10-26 Applied Materials, Inc. Cartesian cluster tool configuration for lithography type processes
US7798764B2 (en) 2005-12-22 2010-09-21 Applied Materials, Inc. Substrate processing sequence in a cartesian robot cluster tool
US7699021B2 (en) 2004-12-22 2010-04-20 Sokudo Co., Ltd. Cluster tool substrate throughput optimization
US7396412B2 (en) 2004-12-22 2008-07-08 Sokudo Co., Ltd. Coat/develop module with shared dispense
US7651306B2 (en) 2004-12-22 2010-01-26 Applied Materials, Inc. Cartesian robot cluster tool architecture
JP2007324249A (ja) * 2006-05-31 2007-12-13 Hitachi High-Technologies Corp 基板処理装置、基板処理方法、及び基板の製造方法
JP5789546B2 (ja) 2011-04-26 2015-10-07 東京エレクトロン株式会社 塗布処理装置、塗布現像処理システム、並びに塗布処理方法及びその塗布処理方法を実行させるためのプログラムを記録した記録媒体
US20130101372A1 (en) * 2011-10-19 2013-04-25 Lam Research Ag Method and apparatus for processing wafer-shaped articles
CN103456766B (zh) * 2013-09-24 2016-03-16 四川虹视显示技术有限公司 Oled面板减薄装置、减薄系统及减薄方法
US9209062B1 (en) * 2014-05-28 2015-12-08 Spintrac Systems, Inc. Removable spin chamber with vacuum attachment
CN111299070A (zh) * 2018-12-11 2020-06-19 聚昌科技股份有限公司 消除扰流的液气分离式涂布机结构
JP7454989B2 (ja) * 2019-06-05 2024-03-25 東京エレクトロン株式会社 基板処理装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5927229B2 (ja) * 1979-09-19 1984-07-04 富士通株式会社 スピンナ−
JPS58209744A (ja) * 1982-05-31 1983-12-06 Dainippon Screen Mfg Co Ltd 回転式表面処理装置
JPS5990928A (ja) * 1982-11-16 1984-05-25 Dainippon Screen Mfg Co Ltd 回転式表面処理装置

Also Published As

Publication number Publication date
US4838979A (en) 1989-06-13
KR920000674B1 (ko) 1992-01-20
JPS6377569A (ja) 1988-04-07
KR880004554A (ko) 1988-06-04

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