JPH0462460B2 - - Google Patents

Info

Publication number
JPH0462460B2
JPH0462460B2 JP59078451A JP7845184A JPH0462460B2 JP H0462460 B2 JPH0462460 B2 JP H0462460B2 JP 59078451 A JP59078451 A JP 59078451A JP 7845184 A JP7845184 A JP 7845184A JP H0462460 B2 JPH0462460 B2 JP H0462460B2
Authority
JP
Japan
Prior art keywords
cartridge
main body
storage case
case
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59078451A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60223111A (ja
Inventor
Takeo Sato
Hiroto Nagatomo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7845184A priority Critical patent/JPS60223111A/ja
Publication of JPS60223111A publication Critical patent/JPS60223111A/ja
Publication of JPH0462460B2 publication Critical patent/JPH0462460B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
JP7845184A 1984-04-20 1984-04-20 半導体ウェーハ用収納ケース Granted JPS60223111A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7845184A JPS60223111A (ja) 1984-04-20 1984-04-20 半導体ウェーハ用収納ケース

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7845184A JPS60223111A (ja) 1984-04-20 1984-04-20 半導体ウェーハ用収納ケース

Publications (2)

Publication Number Publication Date
JPS60223111A JPS60223111A (ja) 1985-11-07
JPH0462460B2 true JPH0462460B2 (enrdf_load_html_response) 1992-10-06

Family

ID=13662398

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7845184A Granted JPS60223111A (ja) 1984-04-20 1984-04-20 半導体ウェーハ用収納ケース

Country Status (1)

Country Link
JP (1) JPS60223111A (enrdf_load_html_response)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5641050B2 (ja) * 2010-09-17 2014-12-17 富士電機株式会社 ウェハ収納具、及びウェハカセットの収納ケース
CN103021914B (zh) * 2012-12-21 2016-12-28 上海华虹宏力半导体制造有限公司 防止晶圆中心部分下垂的晶舟

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5315252U (enrdf_load_html_response) * 1976-07-19 1978-02-08
GB1545090A (en) * 1976-07-19 1979-05-02 American Safety Equip Safety belt retractor with dual tension retraction means
JPS5343019A (en) * 1976-09-30 1978-04-18 Nippon Steel Corp Refining method for steel with reduced slag formation
JPS5758760U (enrdf_load_html_response) * 1980-09-25 1982-04-07
JPS58158440U (ja) * 1982-04-16 1983-10-22 沖電気工業株式会社 ウエハ洗浄装置
JPS58175628U (ja) * 1982-05-19 1983-11-24 三菱マテリアル株式会社 半導体ウエ−ハの包装容器
JPS5961942A (ja) * 1982-10-01 1984-04-09 Hitachi Ltd 薄板キヤリア治具

Also Published As

Publication number Publication date
JPS60223111A (ja) 1985-11-07

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term