JPH0462460B2 - - Google Patents

Description

[Detailed Description of the Invention] [Technical Field] The present invention relates to a technology for storing articles, and in particular to a technology that is effective when used in a storage case that can satisfactorily store cartridges that hold plate-like objects in alignment. be.

[Background technology]

In semiconductor manufacturing processes, cartridges are used to hold a plurality of wafers in an array for storage, transportation, and batch processing (Japanese Patent Publication No. 11427/1983). This cartridge is
As schematically illustrated in the figure, a resin material or the like is formed into a frame shape, and a plurality of slits 3 arranged in parallel in the length direction are formed in the lower frame 2, and a wafer W is placed in each of the slits 3. It is designed to be kept in the set state. In this case, the cartridge 1 has one end surface
Usually, the other end surface of the mold is formed into a U shape, and the wafer W is held such that the surface thereof faces toward the other end U-shaped surface.

As a case for storing the cartridge 1 holding the wafer W, a structure shown in FIG. 2 can be considered. This container consists of a main body 4 and a lid 5, and has a flat internal bottom surface, and is configured as a container on which the cartridge 1 is placed horizontally. However, with this case structure, the stored cartridge 1 tends to move within the case 6, and when it moves, abrasion powder is generated due to wear between the cartridge and the case.
A problem occurs in that this becomes a foreign substance and adheres to the surface of the wafer W (the main surface on which a semiconductor region is to be formed, which is also referred to as a mirror surface). In addition, it is necessary to provide some space around the cartridge for storing and taking out the cartridge 1, and the case 6
The whole thing will become larger.

Furthermore, in the case structure described above, the cartridge 1
However, as the wafer W moves within the case 6, the wafer W itself vibrates, causing interference between the wafer surface and the inner surface of the slit of the cartridge 1, resulting in damage to the wafer surface or generation of new foreign matter. was revealed by the present inventor.

[Purpose of the invention]

SUMMARY OF THE INVENTION An object of the present invention is to provide a cartridge storage case that reduces the occurrence of foreign matter within the case and reduces the overall size of the case.

The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

[Summary of the invention]

According to the present invention, there is provided a semiconductor wafer storage case comprising a cartridge holding a plurality of semiconductor wafers and a storage case for storing the cartridge, the cartridges having semiconductor wafers facing each other. A pair of side frames provided with a plurality of slits that can be maintained in an upright state at a predetermined interval, one end face forming an H-shaped structure and the other end face forming an H-shaped structure for supporting the side frames. The storage case is composed of a box-shaped container body in which the cartridge can be stored, and a lid body that covers the box-shaped container body. , one inner surface of the container body is provided with a stepped protrusion that can engage only the H-shaped end surface of the cartridge, and the inner bottom surface of the container body faces the inner surface having the stepped protrusion. It is characterized by a sloped surface that slopes downward.

According to the present invention, the cartridge housed in the case is housed in the box-shaped container so as to be supported diagonally so that the main surface of the wafer in the cartridge always faces upward. Therefore, the movement of the cartridge within the case is reduced to reduce the generation of foreign matter, and the interference between the wafer and the cartridge due to the movement of the cartridge is reduced, thereby preventing the generation of foreign matter and the surface of the wafer from forming inside the slit of the cartridge. This prevents the surface from coming into contact with the surface, reducing damage to its surface.

〔Example〕

FIG. 3 is an exploded perspective view showing a storage case according to an embodiment of the present invention.
and a lid 9 that is placed over the opening of the main body, each of which is integrally formed from a material such as polypropylene, and a cartridge 1 holding a wafer W can be stored inside.

The main body 8 is formed as a nearly cubic container, and the inner bottom surface 11 is inclined in one direction with respect to the legs 10 provided on the bottom surface. Step-like protrusions 14 and 15 are formed on the side wall 12 whose inner bottom surface is inclined and lowered, and on the side walls 13 that sandwich it, respectively. . Among the respective protrusions, the stepped protrusion 14 has approximately half of it protruded in the depth direction of the main body 8 by a small dimension approximately parallel to the side wall surface, and extends from one H-shaped end surface of the cartridge 1. Its vertical and horizontal dimensions are determined so that it can fit exactly into the lower groove 1a on the side. Further, the stepped protrusion 15 has a tapered shape as a whole, and its dimensions, inclination angle, etc. are set so that it can just abut at least the tapered surfaces 1b on both lower sides of the lower cartridge 1. Further, a flange 16 is formed on the upper opening edge of the main body 8, and the opening edge 17 of the lid body 9 can be fitted into this flange 16. The protrusion 18 is integrally formed.

On the other hand, the lower opening edge 17 of the lid body 9 fits into the flange 16 and is covered with the opening of the main body 8, and a part of the opening edge 17 in the circumferential direction engages with the engaging protrusion 18. An engagement notch 19 is formed. Lid body 9
A card holder 20 and the like is formed on the holder so that necessary display cards can be attached thereto.

In addition, as explained in FIG. 1, the cartridge 1 has a plurality of slits 3 formed in the frame 2, and a plurality of wafers W can be erected using the slits 3 and supported in alignment. . In this case, all of the wafers W are supported toward the other end surface having a U-shaped main surface.

According to the storage case 7 having the above configuration, if the cartridge 1 is placed in the main body 8 in the state shown in FIG. 3 and the lid body 9 is fitted into the main body 8, the state shown in FIGS. will be stored in. That is, cartridge 1
The lower groove 1a on one end side engages with the stepped protrusion 14 at the center, and the stepped protrusions 15 on both sides abut against the tapered surfaces 1b on both sides of the cartridge 1. Further, the lower edge of the other end surface of the cartridge 1 is brought into contact with the inner lower edge of the main body 8. As a result, the cartridge 1 is restrained from moving in both directions by the contact between the stepped protrusions 15 on both sides and the tapered surface 1b, and the engagement between the stepped protrusions 14 and the lower groove 1a and the lower edge on the other end surface. Due to contact with the main body 8, it is restrained in both end directions. Therefore, movement of the cartridge 1 within the case (main body) 7 is generally reduced.

On the other hand, since the inner bottom surface 11 of the main body 8 is inclined, the cartridge 1 housed in the main body 8 is supported diagonally with respect to the mounting surface of the case 7. As a result, the space around the cartridge 1 required for storing and taking out the cartridge 1 can be reduced.
The size of the main body 8 can be reduced accordingly. Further, due to the presence of the stepped protrusion 14, the cartridge 1 is stored only in the direction in which the lower groove 1a engages with the stepped protrusion 14, in other words, in the direction in which one end surface side of the cartridge 1 is inclined to be lower. (In the opposite direction, the other end surface side and the stepped protrusion 14 interfere with each other and cannot be stored.) Therefore, the main surface of the wafer W is directed upward, and the surface of the wafer W is Damage to the wafer surface (especially damage to the main surface of the wafer) is prevented by preventing interference with the inner surface of the slit 3.
In addition, the generation of new foreign substances associated with this can be reduced.

Further, since the lid 9 can be fitted to the main body 8 only when the engagement protrusion 18 provided on the flange 16 of the main body 8 and the engagement notch 19 provided on the lid 9 match, the lid 9 can be fitted to the main body 8. 8 is always fitted in a fixed direction. Therefore, depending on the position of the card holder on the outside of the lid 9 or other marks, it is possible to determine the direction of the storage case even when the lid is closed, in other words, the direction in which the main surfaces of the stored cartridges 1 and wafers W are facing. can be judged and work efficiency can be improved.

〔effect〕

(1) A step-like protrusion is formed in the main body of the case so that the cartridge stored in the case always faces in a fixed direction due to the step-like protrusion, and moreover, the cartridge is stored tilted in a fixed direction. As a result, the wafers held in the stored cartridges are always supported with their main surfaces facing upward, which prevents interference between the wafer surfaces and the cartridges and prevents damage to the wafer surfaces (especially wafers). Damage to the main surface) and generation of foreign matter can be significantly reduced.

(2) Since the cartridge is stored diagonally, the space around the cartridge required for storing and taking out the cartridge can be reduced, thereby making it possible to downsize the case.

(3) Since the cartridge is restrained from moving by the stepped protrusion or inner surface of the case body, the generation of foreign matter due to the movement of the cartridge within the case can be significantly reduced.

(4) Since the lid body is always fitted in a fixed direction to the main body due to the engaging protrusion and the engaging notch, the orientation of the stored cartridges and wafers can be determined even when the case lid is attached. , work efficiency can be improved.

Although the invention made by the present inventor has been specifically explained based on the examples above, the present invention is not limited to the above examples, and it is understood that various changes can be made without departing from the gist of the invention. Needless to say. For example, if the structure of the cartridge is different, the structure of the stepped protrusion can be changed accordingly. Furthermore, the structure of the engaging portion that determines the direction between the lid and the main body can be changed as appropriate. Furthermore, the outer shape of the case, the inclination angle of the inner bottom surface, etc. can be arbitrarily set.

[Application field]

In the above explanation, the invention made by the present inventor was mainly applied to a storage case for a cartridge for holding semiconductor wafers, which is the background field of application, but the invention is not limited to this. It can be similarly applied as a general storage case for cartridges that hold wafer-like objects side by side.

[Brief explanation of the drawing]

Fig. 1 is a perspective view of the cartridge, Fig. 2 is a sectional view of the cartridge stored in the storage case, Fig. 3 is a partially exploded perspective view of the storage case which is an embodiment of the present invention, and Fig. 4 3 is a cross-sectional view taken along the line A-A in FIG. 3, and FIG. 5 is a cross-sectional view taken along the line B-B in FIG. 3. 1... Cartridge, 1a... Lower groove, 1b...
... Tapered surface, 7 ... Storage case, 8 ... Main body, 9
... Lid body, 11 ... Inner bottom surface, 14 ... Stepped protrusion,
15... Stepped protrusion, 16... Flange, 17...
Opening edge, 18... Engaging protrusion, 19... Engaging notch, W... Wafer.

Claims (1)

[Claims] 1 A semiconductor wafer storage case consisting of a cartridge holding a plurality of semiconductor wafers and a storage case for storing the cartridge, wherein the cartridges are arranged so that the semiconductor wafers face each other and are kept at a predetermined interval. A pair of side frames provided with a plurality of slits that can be held in an upright state, and one of which is H for supporting the side frames.
The storage case is a box-shaped container in which the cartridge can be stored, and the storage case is a box-shaped container in which the cartridge can be stored. It consists of a main body and a lid covering the main body, and one inner surface of the container main body is provided with a stepped protrusion that can engage only the H-shaped end face of the cartridge,
A storage case for semiconductor wafers, characterized in that the inner bottom surface of the container body forms an inclined surface that becomes lower toward the inner surface having the step-like protrusion.