JP2796502B2 - Wafer holding in wafer storage container - Google Patents
Wafer holding in wafer storage containerInfo
- Publication number
- JP2796502B2 JP2796502B2 JP24258194A JP24258194A JP2796502B2 JP 2796502 B2 JP2796502 B2 JP 2796502B2 JP 24258194 A JP24258194 A JP 24258194A JP 24258194 A JP24258194 A JP 24258194A JP 2796502 B2 JP2796502 B2 JP 2796502B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- lid
- tip
- inward
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67369—Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
- B65D25/02—Internal fittings
- B65D25/10—Devices to locate articles in containers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は半導体ウェーハを損傷、
汚染から防いで安全に輸送し、保管し、取り扱うための
ウェーハ収納容器に用いられるウェーハ抑えに関するも
のである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention
The present invention relates to a wafer holder used for a wafer storage container for transporting, storing, and handling safely while preventing contamination.
【０００２】[0002]
【従来の技術】従来のウェーハ収納容器は、例えば図５
に示すような構造をしていて、ウェーハＷを内箱ａに収
納した後、内箱ａを容器本体ｂに入れ、その嵌合周縁部
にシール部材ｃを装着する。他方、蓋体ｄの内面に、両
側に多数の短冊状の弾性片ｅが片持ち梁状に対設されて
いるウェーハ抑えｆを装着した後、蓋体ｄを容器本体ｂ
に被せて嵌合すると共に、ウェーハ抑えｆで各ウェーハ
Ｗの上縁部を弾性的に支持するという方法で使用してい
た。この構造のウェーハ抑えｆに代えて、図６に示すよ
うに蓋体ｇの内面両側に垂直の弾性板材を二重にして対
設させた構造のウェーハ抑えｈとし、両弾性板材を外側
に曲げることで各ウェーハＷの斜め上縁を弾性的に支持
する方法、図７に示すように弓状弾性片ｉを支持枠ｊの
内面両側で固設したウェーハ抑えとし、弓状弾性片ｉの
中央部で各ウェーハＷの上縁部を弾性的に支持する方
法、図８に示すように蓋体ｋの内面中央部の支持枠と、
これに相対して設けられた１対の係止片ｍと、その両側
よりに設けられた片持ち梁状の弾性片ｎとからなる、ウ
ェーハ抑えを用いて、係止片ｍでウェーハＷの上縁部を
支持すると共に、弾性片ｎの先端部が上方へ曲がること
でウェーハＷの斜め上縁部を弾性的に支持する方法など
が知られている。2. Description of the Related Art A conventional wafer container is shown in FIG.
After the wafer W is stored in the inner box a, the inner box a is put into the container body b, and the sealing member c is attached to the fitting peripheral portion thereof. On the other hand, after mounting a wafer holder f having a large number of strip-shaped elastic pieces e provided on both sides thereof in a cantilever shape on the inner surface of the lid d, the lid d is moved to the container body b.
And the upper edge of each wafer W is elastically supported by the wafer retainer f. In place of the wafer retainer f having this structure, as shown in FIG. 6, a wafer retainer h having a structure in which a vertical elastic plate material is provided on both sides of the inner surface of the lid g in a doubled manner, and both elastic plate materials are bent outward. A method of elastically supporting the upper oblique edge of each wafer W by using a method as shown in FIG. 7, in which the bow-shaped elastic pieces i are fixed to the wafers fixed on both inner surfaces of the support frame j, and the center of the bow-shaped elastic pieces i A method of elastically supporting the upper edge portion of each wafer W with a support frame at the center of the inner surface of the lid k as shown in FIG.
A pair of locking pieces m provided opposite to this, and a cantilever-shaped elastic piece n provided on both sides thereof are used. A method of supporting the upper edge and elastically supporting the oblique upper edge of the wafer W by bending the tip of the elastic piece n upward is known.
【０００３】[0003]
【発明が解決しようとする課題】しかし、図５、図６お
よび図８に示すウェーハ抑えはいずれも一端だけが蓋体
または支持枠に固定された垂直または片持ち梁状の弾性
片でウェーハＷを支持する構造になっているため、弾性
片の撓み部分がクリープ変形を起こし易く、とくにウェ
ーハを長期間保管すると、クリープ変形によって弾性片
の反発力が低下し、ウェーハ保持力が弱まって輸送中に
ウェーハが回転したりガタついたりして擦れが発生し、
ウェーハまたはウェーハ抑えの摩耗による発塵でウェー
ハが汚染される可能性が大きかった。その点、図７に示
す弓状弾性片ｉは両側で保持されているためクリープ変
形のおそれはないが、構造的にウェーハの上面全体を覆
う状態になるため、このウェーハ抑えが邪魔になって、
容器に収納したウェーハの枚数を蓋体の外側から確認す
ることができず、作業性を著しく損ねるという不都合が
あった。さらに、ウェーハＷの形状には、基準位置を示
す方式として、図６に示すような頂部の一部にだけ切り
欠きのあるノッチ式Ｗ1 と、図８に示すような上部がフ
ラットになったオリフラ式Ｗ2 とがあるため、ウェーハ
抑えの形状によっては両方式の保持力に差が生じ、一方
では満足しても他方ではウェーハの回転やガタつきによ
る発塵汚染が生ずるという問題があった。したがって、
本発明の目的は、クリープ変形を起こしたり、作業性を
損ねることがなく、しかもウェーハの形状が変わっても
保持力に影響を与えることのないウェーハ収納容器のウ
ェーハ抑えを提供するものである。However, each of the wafer holders shown in FIGS. 5, 6 and 8 is a vertical or cantilevered elastic piece having only one end fixed to a lid or a support frame. The structure that supports the elastic piece tends to cause creep deformation at the bent portion of the elastic piece.Especially, when the wafer is stored for a long time, the repulsive force of the elastic piece decreases due to the creep deformation, the wafer holding force weakens, and the wafer is transported. The wafer rotates and rattles, causing rubbing,
There was a high possibility that the wafer would be contaminated by dust generated by abrasion of the wafer or the wafer holder. In this regard, the arcuate elastic piece i shown in FIG. 7 is held on both sides, so there is no danger of creep deformation. However, since it is structurally covering the entire upper surface of the wafer, this wafer restraint is an obstacle. ,
The number of wafers stored in the container cannot be checked from the outside of the lid, and there is a disadvantage that workability is significantly impaired. Furthermore, the shape of the wafer W, as a method for indicating the reference position, a notch type W 1 with a lack only outright the portion of the top portion as shown in FIG. 6, the upper shown in FIG. 8 becomes flat since there is a orientation flat type W 2, a difference in the holding power of both systems depending on the shape of the wafer is suppressed occurs, while in the other be happy there is a problem that dust pollution caused by the rotation and backlash of the wafer occurs . Therefore,
SUMMARY OF THE INVENTION It is an object of the present invention to provide a wafer holder for a wafer storage container which does not cause creep deformation or impair workability and does not affect the holding force even if the shape of the wafer changes.
【０００４】[0004]
【課題を解決するための手段】本発明の上記ウェーハ抑
えは、蓋体の底面に装着されて、内箱に収納された各ウ
ェーハの上縁を弾性的に支持するウェーハ抑えが、直方
形をした支持枠と、この内のウェーハの配列方向に平行
な相対する二辺に、それぞれの基部が連設された２条の
対向する整列した板バネ状の弾性部材とからなり、各弾
性部材は基部から互いに垂線に対し２〜５°内側に傾い
た角度で下降した後、Ｒを描いて50〜70°の勾配で内方
へ上昇し、次いで垂線に対し２〜５°内側に傾いた角度
で上昇して先端部に至るＵ字状に屈曲すると共に、幅方
向が櫛状に分岐してそれぞれの先端部が蓋体の底面に設
けられた係止部において底面に接して係合されてなるも
のである。また上記ウェーハ抑えは、蓋体の底面に装着
されて、内箱に収納された各ウェーハの上縁を弾性的に
支持するウェーハ抑えが、直方形をした支持枠と、この
内のウェーハの面方向に平行な相対する二辺に、それぞ
れの基部と先端部とが両側部で、基部を外側に先端部を
内側にして連設され、それぞれの中程が幅方向に櫛状に
分岐している２条の整列した板バネ状の弾性部材とから
なり、各弾性部材は、基部から互いに垂線に対し２〜５
°内側に傾いた角度で下降した後、Ｒを描いて50〜70°
の勾配で内方へ上昇し、次いで垂線に対し２〜５°内側
に傾いた角度で上昇して先端部に至る、Ｕ字状に屈曲し
たものからなっていてもよい。According to the present invention, there is provided a wafer holder which is mounted on a bottom surface of a lid and elastically supports an upper edge of each wafer housed in an inner box. Support frame, and two opposite sides parallel to the arrangement direction of the wafers in the two sides.
It consists of opposing aligned leaf-spring-like elastic members, each of which inclines from the base inward by 2-5 ° with respect to the perpendicular to each other.
After descending at an angle, draw R and move inward at a gradient of 50-70 °.
And then tilted inward by 2-5 ° to the vertical
And bends in a U-shape reaching the tip , and the width direction branches in a comb-shape, with each tip located on the bottom of the lid.
It is those formed by engaging in contact with the bottom surface in the eclipsed the locking portion. In addition, the wafer holder is mounted on the bottom surface of the lid and elastically supports the upper edge of each wafer housed in the inner box. The wafer holder has a rectangular support frame, and the surface of the wafer inside the square. On both sides parallel to the direction, the base and the tip are connected on both sides, with the base outside and the tip inside, and the middle of each is comb-shaped in the width direction.
It is composed of two divergent leaf spring-like elastic members that are aligned, and each elastic member is 2 to 5 with respect to a perpendicular to each other from the base.
° After descending at an angle inclined inward, draw R and 50-70 °
Ascending inward, then 2-5 ° inside the perpendicular
It may be made of a U-shaped bend that rises at an inclined angle to the tip .
【０００５】以下、本発明のウェーハ収納容器のウェー
ハ抑えについて、例示した図１〜図３に基づいて詳細に
説明する。図１はウェーハを個別に担持する箱状の本体
と本発明のウェーハ抑えを装着した蓋体との関係を示す
もので、図（ａ）は蓋体を嵌合する前の状態での縦断面
説明図、図（ｂ）は蓋体を嵌合した後の状態での部分縦
断面説明図である。図２は図１（ａ）における蓋体の底
面説明図である。図３はウェーハ抑えの別の実施態様を
示す説明図である。上記各図において、１はウェーハＷ
を収納する内箱、２はこの内箱１を収納・係止する容器
本体、３は蓋体、４は本発明のウェーハ抑えである。ウ
ェーハ抑え４は、直方形をした支持枠５と、その内のウ
ェーハの配列方向に平行な相対する二辺に、それぞれの
基部Ａが連設され、基部Ａから下方内側にＵ字状に屈曲
する（Ｂ〜Ｄ）と共に幅方向が櫛状に分岐し、先端部Ｅ
が蓋体３の底面に設けられた係止部において底面に接し
て係合されている、左右対称の整列した板バネ構造の弾
性部材６とからなり、支持枠５の周縁が蓋体３の底面の
適所に設けられた係止部７と嵌合することで、蓋体３に
着脱自在に装着されている。また、８は蓋体３を容器本
体２に被せたときに、容器本体２の開口周縁で係止する
ための係止部、９は弾性部材６の（各櫛刃部分の）Ｃ位
置の両側に設けられた突縁で、この間にそれぞれのウェ
ーハＷの周縁を挿入・支持する。なお、この挿入・支持
機構は各櫛刃部分に沿う縦溝とすることもできる。Hereinafter, the wafer holding device of the wafer container of the present invention will be described in detail with reference to FIGS. FIG. 1 shows the relationship between a box-shaped main body for individually supporting wafers and a lid mounted with a wafer holder according to the present invention, and FIG. 1A shows a longitudinal section before the lid is fitted.
Illustration, FIG. (B) is a partial longitudinal sectional view in a state after fitting the lid. FIG. 2 is an explanatory bottom view of the lid in FIG. FIG. 3 is an explanatory view showing another embodiment of wafer holding. In the above figures, 1 is a wafer W
Is a container body for storing and locking the inner box 1, 3 is a lid, and 4 is a wafer holder of the present invention. The wafer holder 4 has a rectangular parallelepiped support frame 5 and two opposite bases parallel to the arrangement direction of the wafers. Each base A is continuously provided, and is bent downward and inward from the base A in a U-shape. (B to D), the width direction branches in a comb shape, and the tip E
There has been engaged in contact with the bottom surface in the engaging portion provided on the bottom surface of the lid 3, an elastic member 6 which of aligned leaf springs symmetrical structure, the periphery of the support frame 5 of the cover 3 It is detachably attached to the lid 3 by fitting with a locking portion 7 provided at an appropriate position on the bottom surface. Reference numeral 8 denotes a locking portion for locking at the periphery of the opening of the container main body 2 when the lid 3 is put on the container main body 2, and 9 denotes both sides of the elastic member 6 at the C position (of each comb blade portion). The peripheral edge of each wafer W is inserted and supported between the projecting edges. The insertion / support mechanism may be a vertical groove along each comb blade portion.
【０００６】ウェーハ抑え４は、弾性部材６の先端部Ｅ
が蓋体３の底面に設けられた係止部において底面に接し
て係合され、弾性部材６が蓋体３に対し基部Ａと先端部
Ｅの２ケ所で両持ち梁の状態になっているため、ウェー
ハＷを収納した内箱１を容器本体２に入れて蓋体３を被
せたときに、弾性部材６がウェーハＷに小さな力で接触
し、ウェーハＷの周側縁を内箱１の内側壁に設けられた
縦溝の中心に誘導する。さらに、蓋体３を押し込んで完
全に容器本体２に被せたときは、左右一対の弾性部材
６、６はそれぞれのＣ位置下面でウェーハＷを左右斜め
上縁より弾性的に保持すると共に、基部Ａと先端部Ｅの
２個所で蓋体３に支持されることになる［図１（ｂ）参
照］ため、弾性部材６の変形が分散され、ウェーハ抑え
４の耐久力が向上する。[0006] The wafer holder 4 is provided with a tip E of the elastic member 6.
There are engaged in contact with the bottom surface in the engaging portion provided on the bottom surface of the lid 3, the elastic member 6 is in a state of a doubly supported beam with two positions of the base A and the distal end portion E to the lid 3 Therefore, when the inner box 1 containing the wafer W is put into the container main body 2 and the lid 3 is covered, the elastic member 6 comes into contact with the wafer W with a small force, and the peripheral edge of the wafer W is brought into contact with the inner box 1. It is guided to the center of the vertical groove provided on the inner wall. Further, when the lid 3 is pushed in to completely cover the container main body 2, the pair of left and right elastic members 6, 6 elastically hold the wafer W on the lower surface of each C position from the upper left and right diagonal edges. A and the tip E are supported by the lid 3 at two places (see FIG. 1B), so that the deformation of the elastic member 6 is dispersed, and the durability of the wafer holder 4 is improved.
【０００７】弾性部材の形状は、図３に示すように、基
部Ａから互いに垂線に対し２〜５°内側に傾いた角度で
下降した（Ｂ位置）後、Ｒを画いて50〜70°の勾配で内
方へ上昇し（Ｃ位置）、その後さらに、垂線に対し２〜
５°内側に傾いた角度で上昇し（Ｄ位置）先端部Ｅに至
る、下方内側の角がとれたＵ字状をしていること、とく
には図３に記載の数値からなる形状をしていることが好
ましく、これによればウェーハＷと弾性部材16との接触
面積が大きくなり、ウェーハ抑え14の耐久性が一層向上
する。このため弾性部材16の厚みを 0.5〜 3.0mmの範囲
に薄くできる利点もある。ウェーハ抑え14には、支持枠
15の両側部に上記の形状の弾性部材16を設けると共に中
央部に左右１対の係止片17を設けてもよい。これによれ
ば上部がフラットになったオリフラ式のウェーハＷを収
納する場合に、より有効に保持することができる。The shape of the elastic member is, as shown in FIG. 3, at an angle inclined inward from the base A by 2 to 5 degrees with respect to the perpendicular to each other.
After the lowered (B position), and Egai the R rises inwardly with a gradient of 50-70 ° (C position), then further 2 to perpendicular
It has a U-shape with a lower inner angle, which rises at an angle inclined inward by 5 ° (position D) and reaches the tip end E. In particular, the shape has the numerical values shown in FIG. Preferably, the contact area between the wafer W and the elastic member 16 is increased, and the durability of the wafer holder 14 is further improved. Therefore, there is an advantage that the thickness of the elastic member 16 can be reduced to a range of 0.5 to 3.0 mm. Support frame for wafer holder 14
The elastic member 16 having the above-mentioned shape may be provided on both sides of the pair 15 and a pair of left and right locking pieces 17 may be provided in the center. According to this, when the wafer W of the orientation flat type having the flat upper part is stored, it can be held more effectively.
【０００８】図４は本発明のウェーハ抑えの更に別の実
施態様を、蓋体の内面に装着した状態で示す底面図であ
る。このウェーハ抑え24は、図２に示したウェーハ抑え
４に比べて、直方形をした支持枠25と、左右対称の整列
した板バネ状の弾性部材26とからなる点について共通す
るものの、２条の板バネ状の弾性部材26が、支持枠25の
ウェーハの面方向に平行な相対する二辺に、それぞれの
基部Ａと先端部Ｅとが両側部で、基部を外側に先端部を
内側にして連設され、その中程は下方にＵ字状に屈曲す
ると共に、垂下部Ｂの途中から上昇部Ｄの途中までの間
で幅方向が櫛状に分岐したものからなる点が相違してい
る。この実施態様は蓋体３の底面が凹凸形状をしていた
り、弾性部材26の先端部を蓋体３の底面に接して配設す
ることが困難な場合に有効な構造で、弾性部材26の先端
部を支持枠25に連結することで、蓋体３の底面に弾性部
材26の先端部を係合させたのと同じ効果が得られる。本
発明によるウェーハ抑え４、14、24には、透明または着
色無地の、ＰＥ、ＰＰなどのポリオレフィン、ＡＢＳ、
ＰＳ、ＰＣ、ＰＢＴなどの熱可塑性樹脂およびポリエス
テル系、ポリオレフィン系、ポリスチレン系などの熱可
塑性エラストマーが用いられる。FIG. 4 is a bottom view showing still another embodiment of the wafer holding device according to the present invention, which is mounted on the inner surface of a lid. The wafer retainer 24 is different from the wafer retainer 4 shown in FIG. 2 in that a rectangular support frame 25 and a left-right symmetrically aligned leaf spring-like elastic member 26 are common. The leaf spring-like elastic member 26 has two bases A and a front end E on opposite sides parallel to the surface direction of the wafer of the support frame 25, with the base outside and the front end inside. The middle part is bent downward in a U-shape, and the width direction is branched in a comb shape from the middle of the hanging part B to the middle of the rising part D. I have. This embodiment or the bottom surface of the lid 3 has a concave-convex shape, a valid structure may be difficult to dispose in contact with the tip portion of the elastic member 26 to the bottom surface of the lid 3, the elastic member 26 By connecting the distal end to the support frame 25, the same effect can be obtained as when the distal end of the elastic member 26 is engaged with the bottom surface of the lid 3. The wafer holders 4, 14, and 24 according to the present invention include transparent or colored plain polyolefins such as PE and PP, ABS,
Thermoplastic resins such as PS, PC and PBT and thermoplastic elastomers such as polyester, polyolefin and polystyrene are used.
【０００９】[0009]
【作用】多数のウェーハＷを収納した内箱１を、容器本
体２内に収納・係止する。一方、蓋体３の底面に本発明
のウェーハ抑え４を装着した後、蓋体３を容器本体２に
被せ、その開口周縁で嵌合・係止する。このとき、容器
内ではウェーハ抑え４が弾性部材６の先端部Ｅと基部Ａ
の２ケ所で両持ち梁の状態となって変形が分散され、ウ
ェーハ抑え４の耐久力が向上すると共に、弾性部材６の
Ｃ位置下面でウェーハＷの左右斜め上縁を弾性的に保持
し、ウェーハＷのがたつきによる発塵を防止する。The inner box 1 containing a large number of wafers W is stored and locked in the container body 2. On the other hand, after the wafer holder 4 of the present invention is mounted on the bottom surface of the lid 3, the lid 3 is put on the container main body 2 and fitted and locked at the periphery of the opening. At this time, in the container, the wafer holder 4 is connected to the distal end E and the base A of the elastic member 6.
In two places, the state becomes a doubly supported beam, the deformation is dispersed, the durability of the wafer holder 4 is improved, and the upper left and right upper edges of the wafer W are elastically held on the lower surface of the elastic member 6 at the C position. The generation of dust due to rattling of the wafer W is prevented.
【００１０】[0010]
【発明の効果】本発明のウェーハ収納容器のウェーハ抑
えによれば、下記の効果を奏する。 1)従来のものよりもクリープ変形が少なく、ウェーハ保
持力の低下が少なくなり、長期保管後の輸送においても
パーティクルの発生を抑制することができる。 2)弾性部材が両側に２列に設けられているので、中央部
からの収納されているウェーハの透視・確認が容易であ
る。 3)ノッチ式ウェーハ、オリフラ式ウェーハの別なく、同
じ保持力が安定的に付与される。According to the wafer holding device of the present invention, the following effects can be obtained. 1) Less creep deformation than conventional ones, less decrease in wafer holding force, and can suppress generation of particles even in transportation after long-term storage. 2) Since the elastic members are provided in two rows on both sides, it is easy to see through and check the stored wafer from the center. 3) The same holding force is stably applied regardless of the notch type wafer and the orientation flat type wafer.
【図１】ウェーハを収納する本体と本発明のウェーハ抑
えを装着した蓋体との関係を示すもので、図（ａ）は蓋
体を嵌合する前の状態での縦断面説明図、図（ｂ）は蓋
体を嵌合した後の状態での部分縦断面説明図である。FIG. 1 shows a relationship between a main body for accommodating a wafer and a lid on which a wafer holder of the present invention is mounted, and FIG. 1A is a longitudinal sectional explanatory view showing a state before the lid is fitted. (B) is a partial longitudinal cross-sectional explanatory view in a state after the lid is fitted.
【図２】図１（ａ）に示した本発明のウェーハ抑えの詳
細を示す蓋体の底面説明図である。FIG. 2 shows details of the wafer holder of the present invention shown in FIG.
It is bottom surface explanatory drawing of the lid which shows thin .
【図３】本発明のウェーハ抑えの別の実施態様を示す正
面説明図である。 Positive showing another embodiment of the wafer kept in the present invention; FIG
It is a surface diagram.
【図４】本発明のウェーハ抑えの別の実施態様を、蓋体
の内面に装着した状態で示す底面図である。FIG. 4 is a bottom view showing another embodiment of the wafer holder according to the present invention, which is mounted on an inner surface of a lid.
【図５】従来のウェーハ収納容器の一例を示す分解斜視
図である。FIG. 5 is an exploded perspective view showing an example of a conventional wafer storage container.
【図６】従来のウェーハ収納容器の他の例を示す縦断面
図である。FIG. 6 is a longitudinal sectional view showing another example of a conventional wafer storage container.
【図７】従来のウェーハ抑えの別の例を示す縦断面図で
ある。FIG. 7 is a longitudinal sectional view showing another example of a conventional wafer holding device.
【図８】従来のウェーハ収納容器の更に別の例を示すも
ので、図（ａ）は蓋体を嵌合する前の状態での縦断面
図、図（ｂ）は蓋体を嵌合した後の状態での部分縦断面
図ある。8A and 8B show still another example of the conventional wafer storage container, in which FIG. 8A is a longitudinal sectional view showing a state before the lid is fitted, and FIG. FIG. 10 is a partial longitudinal sectional view in a later state.
１‥内箱、 ２‥容器本体、 ３‥蓋体、 ４、14、24‥ウェーハ抑
え、 ５、15、25‥支持枠、 ６、16、26‥弾性
部材、 ７、８‥係止部、 ９‥突縁、 17‥係止片、 Ａ‥基部、 Ｂ‥垂下部、 Ｃ‥斜め上昇部、 Ｄ‥上昇部、 Ｅ‥先端部、 Ｗ‥ウェーハ、 Ｗ1 ‥ノッチ式ウェ
ーハ、 Ｗ2 ‥オリフラ式ウェーハ。1 ‥ inner box, 2 ‥ container body, 3 ‥ lid, 4, 14, 24 ‥ wafer holder, 5, 15, 25 ‥ support frame, 6, 16, 26 ‥ elastic member, 7, 8 ‥ locking part, 9 ‥ flange, 17 ‥ engaging piece, A ‥ base, B ‥ hanging parts, C ‥ slant rising portion, D ‥ ascender, E ‥ tip, W ‥ wafer, W 1 ‥ notch type wafer, W 2 ‥ Oriflat type wafer.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 実開 平６−79152（ＪＰ，Ｕ) 実開 平６−55259（ＪＰ，Ｕ) ──────────────────────────────────────────────────続 き Continuation of front page (56) References Japanese Utility Model Hei 6-79152 (JP, U) Japanese Utility Model Hei 6-55259 (JP, U)
Claims (2)
た各ウェーハの上縁を弾性的に支持するウェーハ抑え
が、直方形をした支持枠と、この内のウェーハの配列方
向に平行な相対する二辺にそれぞれの基部が連設された
２条の対向する整列した板バネ状の弾性部材とからな
り、各弾性部材は基部から互いに垂線に対し２〜５°内
側に傾いた角度で下降した後、Ｒを描いて50〜70°の勾
配で内方へ上昇し、次いで垂線に対し２〜５°内側に傾
いた角度で上昇して先端部に至るＵ字状に屈曲すると共
に、幅方向が櫛状に分岐してそれぞれの先端部が蓋体の
底面に設けられた係止部において底面に接して係合され
てなることを特徴とするウェーハ収納容器のウェーハ抑
え。A wafer holder mounted on a bottom surface of a lid and elastically supporting an upper edge of each wafer housed in an inner box has a rectangular support frame, and an arrangement direction of wafers in the support frame. And two oppositely arranged leaf-spring-like elastic members having their respective bases connected to two opposing sides parallel to each other . Each of the elastic members is within 2 to 5 ° with respect to a perpendicular to each other from the base .
After descending at an angle inclined to the side, draw R
Rise inward, then incline 2-5 degrees inward with respect to the vertical
Ascends at an angle and bends in a U-shape reaching the tip , the width direction branches in a comb shape, and each tip is the lid.
Wafer suppress the wafer carrier, characterized in that formed by engaging in contact with the bottom surface in the engaging portion provided on the bottom surface.
た各ウェーハの上縁を弾性的に支持するウェーハ抑え
が、直方形をした支持枠と、この内のウェーハの面方向
に平行な相対する二辺に、それぞれの基部と先端部とが
両側部で、基部を外側に先端部を内側にして連設され、
それぞれの中程が幅方向に櫛状に分岐している２条の整
列した板バネ状の弾性部材とからなり、各弾性部材は、
基部から互いに垂線に対し２〜５°内側に傾いた角度で
下降した後、Ｒを描いて50〜70°の勾配で内方へ上昇
し、次いで垂線に対し２〜５°内側に傾いた角度で上昇
して先端部に至る、Ｕ字状に屈曲したものからなること
を特徴とするウェーハ収納容器のウェーハ抑え。2. A rectangular support frame mounted on a bottom surface of a lid and elastically supporting an upper edge of each wafer housed in an inner box. On two opposite sides parallel to each other, the base and the tip are on both sides, and the base is outside and the tip is inside ,
Each middle part is composed of two aligned leaf spring-like elastic members branched in a comb shape in the width direction .
At an angle inclined 2 to 5 degrees inward with respect to the perpendicular to each other from the base
After descending, draw R and rise inward at a gradient of 50-70 °
And then rise at an angle inclined inward by 2 to 5 degrees with respect to the perpendicular
The wafer holding container is characterized in that it is bent in a U-shape to a tip portion .
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24258194A JP2796502B2 (en) | 1994-10-06 | 1994-10-06 | Wafer holding in wafer storage container |
| GB9519637A GB2293816B (en) | 1994-10-06 | 1995-09-26 | Wafer carrier with cushioning means |
| FR9511276A FR2725960B1 (en) | 1994-10-06 | 1995-09-26 | WAFER SUPPORT, ESPECIALLY SEMICONDUCTOR SILICON |
| KR1019950034154A KR960015841A (en) | 1994-10-06 | 1995-10-05 | Wafer Carrier with Shock Absorber |
| DE19537193A DE19537193A1 (en) | 1994-10-06 | 1995-10-06 | Wafer carrier with padding device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24258194A JP2796502B2 (en) | 1994-10-06 | 1994-10-06 | Wafer holding in wafer storage container |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08107141A JPH08107141A (en) | 1996-04-23 |
| JP2796502B2 true JP2796502B2 (en) | 1998-09-10 |
Family
ID=17091198
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24258194A Expired - Lifetime JP2796502B2 (en) | 1994-10-06 | 1994-10-06 | Wafer holding in wafer storage container |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2796502B2 (en) |
| KR (1) | KR960015841A (en) |
| DE (1) | DE19537193A1 (en) |
| FR (1) | FR2725960B1 (en) |
| GB (1) | GB2293816B (en) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5788082A (en) * | 1996-07-12 | 1998-08-04 | Fluoroware, Inc. | Wafer carrier |
| US5711427A (en) * | 1996-07-12 | 1998-01-27 | Fluoroware, Inc. | Wafer carrier with door |
| US6193090B1 (en) | 1999-04-06 | 2001-02-27 | 3M Innovative Properties Company | Reusable container |
| KR20010053787A (en) * | 1999-12-01 | 2001-07-02 | 마이클 디. 오브라이언 | handling device for wafer |
| DE10151320B4 (en) * | 2001-10-17 | 2006-02-09 | Infineon Technologies Ag | disk support |
| JP4903893B2 (en) * | 2003-12-02 | 2012-03-28 | ミライアル株式会社 | Thin plate support container lid |
| KR100832702B1 (en) * | 2003-12-24 | 2008-05-28 | 동부일렉트로닉스 주식회사 | Semiconductor wafer cleaning apparatus |
| US20060042998A1 (en) * | 2004-08-24 | 2006-03-02 | Haggard Clifton C | Cushion for packing disks such as semiconductor wafers |
| JP4606294B2 (en) * | 2005-09-27 | 2011-01-05 | Ｏｋｉセミコンダクタ株式会社 | Wafer carrier and method of manufacturing semiconductor device using the same |
| KR101472145B1 (en) * | 2006-11-07 | 2014-12-12 | 신에츠 폴리머 가부시키가이샤 | Substrate storage container |
| SG151129A1 (en) * | 2007-09-26 | 2009-04-30 | E Sun Prec Ind Co Ltd | Container for reticle |
| DE102010005202B4 (en) * | 2010-01-21 | 2020-04-09 | Q-Cells Se | Magazine for a photovoltaic wafer and / or cell stack with a magazine insert for receiving the same |
| CN102582670A (en) * | 2011-10-17 | 2012-07-18 | 上海华力微电子有限公司 | Safety masking plate carrying cart |
| JP2016149492A (en) * | 2015-02-13 | 2016-08-18 | ミライアル株式会社 | Substrate housing container |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4043451A (en) * | 1976-03-18 | 1977-08-23 | Fluoroware, Inc. | Shipping container for silicone semiconductor wafers |
| US4557382A (en) * | 1983-08-17 | 1985-12-10 | Empak Inc. | Disk package |
| IT1181778B (en) * | 1985-05-07 | 1987-09-30 | Dynamit Nobel Silicon Spa | CONTAINER FOR THE STORAGE AND TRANSPORT OF SILICON DISKS (SLICES) |
| US5207324A (en) * | 1991-03-08 | 1993-05-04 | Fluoroware, Inc. | Wafer cushion for shippers |
| JP2586364Y2 (en) * | 1992-12-28 | 1998-12-02 | 住友シチックス株式会社 | Transport wafer case |
| JPH0679152U (en) * | 1993-04-22 | 1994-11-04 | 株式会社大八化成 | Structure of semiconductor wafer transport container |
| JP2908985B2 (en) * | 1994-07-19 | 1999-06-23 | 信越ポリマー株式会社 | Wafer holding in wafer storage container |
-
1994
- 1994-10-06 JP JP24258194A patent/JP2796502B2/en not_active Expired - Lifetime
-
1995
- 1995-09-26 GB GB9519637A patent/GB2293816B/en not_active Expired - Fee Related
- 1995-09-26 FR FR9511276A patent/FR2725960B1/en not_active Expired - Fee Related
- 1995-10-05 KR KR1019950034154A patent/KR960015841A/en not_active Application Discontinuation
- 1995-10-06 DE DE19537193A patent/DE19537193A1/en not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| GB2293816B (en) | 1998-06-10 |
| JPH08107141A (en) | 1996-04-23 |
| FR2725960A1 (en) | 1996-04-26 |
| GB9519637D0 (en) | 1995-11-29 |
| FR2725960B1 (en) | 1998-04-03 |
| KR960015841A (en) | 1996-05-22 |
| GB2293816A (en) | 1996-04-10 |
| DE19537193A1 (en) | 1996-04-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2796502B2 (en) | Wafer holding in wafer storage container | |
| US5273159A (en) | Wafer suspension box | |
| JP5253410B2 (en) | Retainer and substrate storage container | |
| JP5270668B2 (en) | Retainer and substrate storage container provided with retainer | |
| JP4153874B2 (en) | Wafer carrier with wafer holding system | |
| EP0530332B1 (en) | Cushioned cover for wafer container | |
| TWI466221B (en) | Substrate storage container | |
| JP5385130B2 (en) | Reusable elastic cushion for wafer storage containers | |
| WO1992016964A2 (en) | Cushioned cover for wafer container | |
| TW200822268A (en) | Wafer cassette | |
| JP5094093B2 (en) | Substrate storage container | |
| JPH088332A (en) | Wafer basket in wafer container | |
| JP2736877B2 (en) | Glass plate transport container | |
| JP2908985B2 (en) | Wafer holding in wafer storage container | |
| JP4852023B2 (en) | Retainer and substrate storage container | |
| JP4181926B2 (en) | Substrate storage container | |
| JP3177003B2 (en) | Semiconductor wafer transport container | |
| JP2011138863A (en) | Substrate housing container | |
| JP4764865B2 (en) | Retainer and substrate storage container | |
| JPH10279071A (en) | Wafer contact preventive device | |
| TWI431716B (en) | A storage box for handling jigs | |
| JPH11111835A (en) | Wafer container | |
| JPH0563064A (en) | Wafer keeper of wafer container | |
| JPH06204328A (en) | Wafer case | |
| JPH0655259U (en) | Wafer case for transportation |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313117 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |