JPH11111835A - Wafer container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To hold down a wafer contained in a wafer container by uniform force, by forming a wafer holder of a connection frame connecting a wafer holding part and a tip a wafer holding part and forming a connection frame and a supporting frame without being directly connected. SOLUTION: A wafer holder 2 mounted on a container lid material 1 is bent to a U-shape formed of opposed two pieces of a square supporting frame 3 for holding a wafer contained in a wafer carrier 8 and is composed of a synthetic resin wafer holding part 4 whose long side direction is branched like a comb. A tip of the wafer holding part 4 is connected by a square connection frame 5. A wafer container is formed without connecting the connection frame 5 and the supporting frame 3. Therefore, an entire of a wafer is held down by almost uniform force for a long period and damage and contamination of a wafer and raising of dusts from a wafer carrier caused by movement of the whole or partial wafer during transpiration, etc., can be prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wafer container for storing and supporting a plurality of wafers such as semiconductor wafers at equal intervals and performing storage, transport or cleaning, etching, drying, and the like. It relates to the wafer holder used.

[0002]

2. Description of the Related Art Conventional wafer carriers
In order to hold down the wafer, the wafer holder attached to the container lid material has only one end fixed to its support frame, so if the wafer is held down for a long time, creep deformation will occur and the holding will be insufficient was there.

[0003] Therefore, an improvement proposed in Japanese Patent Application Laid-Open No. H08-107141, in which the holding portion is bent in a U-shape, the long side direction is branched in a comb shape, and both ends are fixed by a lid or a support frame. Has been proposed. However, in this improvement, since the tip of the U-shaped crosspiece is disposed in contact with the inner surface of the container lid member or is fixed to the support frame, it is good for suppressing individual wafers. Since a load is applied to the wafer restraint and the U-shaped crosspiece at that portion is deformed, it becomes unsuitable for long-term use. In addition, when the wafer is stored, the rebound of the wafer pressing causes deformation near the center of the container lid member, and as a result, a phenomenon in which the pressing pressure of the wafer near the center becomes lower than at both ends. When storing wafers in a wafer storage container, it is necessary to suppress all the stored wafers with a uniform force for a long period of time.

[0004]

SUMMARY OF THE INVENTION The present inventor has conducted research on a wafer holding method for holding a stored wafer with a uniform force when the wafer is stored in a wafer storage container. Reached.

[0005]

SUMMARY OF THE INVENTION The present invention is directed to a wafer container having a wafer holder mounted on a container lid.
A wafer holding portion is formed into a U-shape formed from two opposing sides of a rectangular support frame, and a resin holding portion formed by connecting a tip of the wafer holding portion with a comb-shaped resin holding portion having a long side branched in a comb shape. The present invention relates to a wafer storage container including a connection frame, the connection frame not being directly connected to the support frame.

The present invention relates to the above-mentioned wafer storage container, wherein the connection frame for holding the wafer has an arc shape in which a central portion is slightly outwardly protruded from both ends of its long side. Also, the present invention
The present invention relates to a wafer storage container provided with a locking portion for fixing a support frame for holding a wafer to an inner surface of a container lid, a concave portion for connecting a connection frame for holding a wafer, and a protruding rib for fitting the connection frame.

Further, the present invention relates to the wafer container integrally formed of a synthetic resin.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the drawings. FIG. 1 is an exploded perspective view of a wafer storage container according to the present invention, FIG. 2 is a cross-sectional view of the wafer storage container according to the present invention, and FIG. 3 is a plan view of holding a wafer according to the present invention. FIG. 4 is a front view of holding a wafer according to the present invention, FIG. 5 is a side view of holding a wafer according to the present invention, and FIG. 6 is an inner surface of a container lid member according to the present invention. FIG.

According to the present invention, in order to hold a wafer contained in a wafer carrier, a wafer holder 2 mounted on a container lid 1 is formed from two opposing sides of a rectangular support frame 3. It is composed of a synthetic resin wafer holding portion 4 which is bent in a U-shape and whose long side is branched in a comb shape. The tip of the wafer holding portion 4 is connected by a square connection frame 5, and the connection frame is supported. The present invention relates to a wafer storage container formed without being directly connected to the frame 3, and to a wafer storage container provided with a synthetic resin wafer holder 2 having a long side of the connection frame 5 curved slightly in an arc shape.

A wafer holder 2 is mounted on a container lid 1 of the illustrated wafer storage container. At this time, the opening 37 for holding the wafer is fitted and fixed to the locking portion 36 formed on the lid material.

The wafer holder 2 has a wafer holder 4 which is bent in a U-shape formed from two opposing sides of a generally rectangular support frame 3 and whose long side branches in a comb shape. The connecting frame 5 is formed without being directly connected to the support frame 3. The wafer holding portion 4 is made of resin, and has a flexibility to be appropriately deformed when a wafer is stored.
The connection frame 5 can be moved up and down within an appropriate range.

It is preferable that the connection frame 5 for holding the wafer protrudes above the support frame 3. In such a state, when the wafer holder 2 is attached to the container lid 1, the connection frame 5 is pressed downward by the container lid 1, so that the wafer holder 4 fixes the wafer more strongly. It becomes possible.

It is preferable that the long side of the upper end portion of the connection frame 5 is curved in an arc shape so that the upper center portion 20 is formed higher than the upper end portion 21. On the long side, the upper surface center portion 20 of the longer side has an arc shape protruding upward as compared with the upper surface end portion 21. For example, the upper surface center portion 20 is approximately 10 cm longer than the upper surface end portion 21. It is preferable that the shape of the arc is 0.5 to 5 mm higher. In this case, when the connecting frame 5 is mounted on the container lid 1, the inner surface of the container lid 1 has a shape such that the upper surface center portion 20 of the connecting frame 5 hits the inner surface.

When the connecting frame 5 is attached to the container lid 1, it is preferable that the upper surface center portion 20 comes into contact with the lid. However, in some cases, the connecting frame 5 may be formed so as not to contact the lid. When the center does not come into contact with the container lid 1, the distance between the center 20 and the container lid 1 is preferably 5 mm or less. When a wafer is built in, the wafer holding part 4 is pushed by the wafer. The connection frame 5 is pressed against the inner surface of the container lid 1.

Further, the connecting frame 5 of the wafer holder 2 before being set on the container lid 1 protrudes above the support frame 3, and is set on the container lid 1 and hits the inner surface of the lid 1. If you touch
The connecting frame 5 is pushed down, and the downward moving distance is preferably 10 mm or less, more preferably 0 to 3 mm.
It is.

When the container lid 1 on which the wafer holder 2 is mounted is fitted to the container body 6 containing the wafer, the container lid 1
Since the vicinity of the center is weak in strength and easily deformed, the stress is dispersed in the direction of the upper end 21 of the connection frame 5 by making the upper surface center 20 of the connection frame 5 higher than the upper end 21 of the connection frame 5. be able to. That is, the center 2 of the upper surface of the connection frame
Due to the height difference between 0 and the upper end 21 of the connection frame, it is possible to adjust the pressure for holding the wafer near the center and near the periphery. The height difference between the upper surface center portion 20 of the connection frame and the upper surface end portion 21 of the connection frame needs to be changed depending on the material, thickness, etc. of the container lid member 1, but is preferably 0.5 to 5 mm, more preferably 1 to 5 mm.
By setting the thickness to about 2 mm, it is possible to suppress the pressure of the wafer near the center and the vicinity of the periphery to be substantially the same, that is, to suppress the entire wafer with a substantially uniform force.

Even when the wafer holder 2 is mounted on the container lid 1 and the center part 20 of the upper surface of the connection frame 5 does not contact the inner surface of the lid, the container lid 1 is kept in the container body containing the wafer. 6, first, the wafer suppressor 4 is lifted by the wafer, and the center 20 of the upper surface of the connection frame 5 comes into contact with the inner surface of the container lid member 1, and the upper end 21 of the connection frame is made in the same manner as described above.
Will be dispersed.

In the wafer container according to the present invention, the connection frame 5 for connecting the tip of the wafer holding portion 4 for holding the wafer mounted on the container cover 1 is a surface for attaching the support frame to the container cover. Preferably, a recess 10 is formed on the inner surface of the container lid 1 in a rectangular shape in accordance with the shape of the connecting frame 5, for example.
It is preferable that four to eight protruding ribs 9 are formed so that the connection frame 5 fits in the inner portion 0. Recess 10 and protruding rib 9
By restricting the movement of the connection frame 5 in a direction other than the vertical direction, the wafer can be reliably fixed at a predetermined position of the wafer holding portion 4.

In order to restrict the movement of the connecting frame 5, the connecting frame 5 may be fitted and sandwiched between the parallel protruding ribs 9 without providing the concave portion 10. However, it is easy to clean and has good workability, it is easy to position when the wafer holder 2 is mounted on the container lid 1, and the inner surface of the container lid 1 is made three-dimensional from a flat surface. Since the rigidity of the container lid 1 can be increased by this, it is preferable to provide the recess 10 in the container lid 1.

The wafer holder according to the present invention can be integrally formed of a synthetic resin such as polypropylene, polyethylene, ABS, polystyrene, polycarbonate, polybutylene terephthalate, polyester elastomer, polyolefin elastomer, and polystyrene elastomer. Further, it is preferable that the container lid member and the container body are also formed of a synthetic resin.

The wafer container according to the present invention comprises:
A container lid member 1 to which a wafer holder 2 is attached; (2) an opening for taking in and out the wafer, a pair of side walls facing each other, and a pair of end walls facing each other, and the wafer is placed on the inner surface of the side wall. Numerous support ribs 3 at equal intervals to support
(3) Container lid material 1 on which wafer carrier 8 is formed
(7) a packing 7 used between the container and the container body 6;
In general, the container body 6 accommodates the wafer carrier 8 and has the container lid 1 attached thereto.

The wafer carrier 8 according to the present invention has a flat portion 32 formed along a wafer outlet on a side wall standing upright and opposed to each other, and a continuous portion extending from the flat portion to the back from the wafer outlet. It is preferable to have an inwardly curved lower portion that is formed toward it. A large number of support ribs 31 are formed at equal intervals on the inner surfaces of the side wall portions that are erected to face each other. The supporting ribs are formed at equal intervals in a multistage manner on the entire left and right side wall portions, and are paired on the left and right to support the wafer. Further, the wafer carrier 8 preferably has a handle 33 on one of the end walls where the supporting ribs are not formed.

Further, in the wafer storage container of the present invention, the locking portion 34 formed on the side edge of the container lid 1 is formed on the side wall of the container main body 6 particularly when the wafer storage container is assembled with a built-in wafer. By connecting to the engaging portion 35, the wafer holding portion 4
Can fix the wafer in a better condition.

[0024]

According to the present invention, the wafer storage container provided with the wafer holder can hold the whole wafer with a substantially uniform force for a long period of time, and the whole or a part of the wafer moves during transportation or the like. Damage and contamination of the wafer and generation of dust from the wafer carrier can be prevented.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view of a wafer storage container according to the present invention.

FIG. 2 is a sectional view of a wafer storage container according to the present invention.

FIG. 3 is a plan view of holding down a wafer according to the present invention.

FIG. 4 is a front view of holding down a wafer according to the present invention.

FIG. 5 is a side view of a wafer holding device according to the present invention.

FIG. 6 is a perspective view showing an inner surface of a container lid member according to the present invention.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 container lid material 2 wafer holder 3 support frame (mounting surface to container lid member) 4 wafer holder 5 connection frame 6 container body 7 packing 8 wafer carrier 9 protruding rib 10 depression 20 connection frame upper surface center 21 connection frame upper surface Edge 30 wafer

Claims (3)

[Claims] In a wafer container equipped with a wafer holder mounted on a container lid member, the wafer holder is bent into a U-shape formed from two opposing sides of a rectangular support frame, and is extended in a long side direction. Consists of a resin-made wafer holding portion branched in a comb shape, and a resin-made connection frame connecting the tips of the wafer holding portion,
A wafer container, wherein the connection frame is not directly connected to the support frame. 2. The wafer storage container according to claim 1, wherein the connection frame for holding the wafer has an arc shape whose central portion is slightly outwardly protruded from both ends of its long side. 3. An inner surface of a container lid member, wherein a locking portion for fixing a support frame for holding a wafer, a concave portion for joining a connection frame for holding a wafer, and a protruding rib for fitting the connection frame are provided. The wafer storage container according to claim 1 or 2, wherein