WO2004035423A1

WO2004035423A1 - Storage container for receiving precision substrates such as wafers

Info

Publication number: WO2004035423A1
Application number: PCT/JP2003/013236
Authority: WO
Inventors: Shigeaki Ueda; Yasuyuki Watanabe
Original assignee: Kabushiki Kaisha Daihachikasei; Pla-Net Corporation
Priority date: 2002-10-17
Filing date: 2003-10-15
Publication date: 2004-04-29
Also published as: DE10393523T5; KR20050057661A; US20060019411A1; JP2004136923A; CN1705597A; DE10393523B4; JP4174557B2; CN100341132C; TW200415091A; KR100738122B1

Abstract

A storage container for receiving precision substrates such as wafers, having increased strength and improved drying ability when washed. The storage container has a letter L-shaped circumferential wall (12) projectingly provided on an outer wall face, the circumferential wall functioning as a gasket insertion groove (12a). A first flange (13) horizontally extending from the lower end face of the letter L-shaped circumferential wall (12) and a second flange (14) horizontally extending from a position 10-30 mm lower than the first flange are respectively formed integrally with the container. Vertical ribs (15) are formed between the lower face of the first flange (13) and the upper face of the second flange (14).

Description

^

· Technical field for precision substrate storage containers such as wafers

[0 0 0 1]

The present invention is intended to accommodate a plurality of precision substrates such as semiconductor wafers (hereinafter, sometimes referred to as “plates”) at equal intervals without contacting each other, and to perform processing such as storage, transportation, cleaning, etching, or drying. The present invention relates to a precision substrate storage container suitable for handling including. Background art

[0 0 0 2]

A precision substrate storage container for storing and transporting precision substrates such as semiconductors and performing processes such as cleaning, etching, and drying includes a cassette in which a plurality of substrates are inserted and held at equal intervals, It consists of a substrate holder that holds the upper end circumferential surface of the inserted substrate, a container body that houses the force set and the substrate holder, a gasket that is attached to the periphery of the opening of the container body, and a lid. It is customary. (See Fig. 1)

[0 0 0 3]

Even if fine dust adheres to substrates such as semiconductors, the quality of subsequent products is significantly impaired by the fact that they adhere to them. Required. For this reason, the container such as the substrate is cleaned for each component before the substrate is stored. In this case, the container body is placed on the washing table in an appropriate state such as an inverted state, or is suspended by a device in which the washing table moves in the vertical direction, and the washing liquid is jetted onto the washing table to be washed. You. Then, compressed air is blown to blow off the residual liquid and dry.

[0 0 0 4]

According to the prior art, since a container such as a semiconductor wafer needs to be airtight enough to withstand various transport conditions, the container body 21 (see FIG. 6) has a large number of ribs and bent portions. The container has a high-strength design, and is easy to handle. For ease of use, a gasket mounting groove 22a is formed slightly below the opening end 22 of the container main body, and then a flange having a shape protruding outward from the container main body from near the bottom surface and folded downward. It is customary to provide the flange 23 entirely or partially (see Fig. 6). These shapes, especially the folded flanges 23, are intended to make it easier for fingers to be hooked during manual handling, and to significantly improve the strength of the container body, especially the opening. However, there was a problem that the folded flange portion hindered washing and drying as described below.

[0 0 0 5]

That is, the washing water is sprayed onto the container body to wash it, and then the container is dried in an inverted state. In this case, the liquid in the container body drops naturally, but the inside of the above-mentioned folded flange 2 3 2 4 has a groove-like shape, in which the washing water is accumulated, and the liquid is scattered by the compressed air. The fact is that it cannot be obtained.

[0 0 0 6]

Plastic, which is a material of the substrate container, is easily charged with static electricity. When the static electricity adsorbs dust and mixes with the remaining water droplets and is dried, spot-like contamination remains in the container. For this reason, a substrate container having a structure in which water droplets are unlikely to remain is required.

[0 0 0 7]

Various mechanisms to be attached to the substrate container to prevent such residual cleaning water are disclosed in the prior art. For example, there is one in which a through hole or a slit is formed in the folded flange (for example, see Patent Document 1). "The first rim is integrally formed near the end of the flange (extended above the opening of the container body) and projects slightly outwardly of the peripheral wall of the container body, taking into account the lateral slide. The front surface is slightly inclined so that the thickness decreases from the root to the tip, and the back surface is also slightly inclined so that the thickness decreases from the root to the tip. " A precision substrate container is disclosed in which a second rim is formed at a similar inclination angle on the bottom side of the main body. (See Patent Document 2)

[0 0 0 8] [Patent Document 1] _ _

Japanese Patent Publication No. 1 9 9 9 1 2 9 7 8 7 7 (Refer to Claim 1 and FIG. 6) [Patent Document 2]

Tokiwaki 2 0 0 2— 1 1 0 7 7 5 Publication (Page 3) Disclosure of the Invention

[0 0 0 9]

When the above-mentioned container for semiconductors and the like, particularly the container body is washed with water and dried with the opening facing downward, the back side of the folded flange portion in the conventional container shown in FIG. 6 has a groove or a reservoir shape (sump). As described above, water droplets stay on the inner side 24 of the substrate container. In order to solve this problem, in the substrate container disclosed in Patent Document 1, in the state where the container is inverted, the flange portion is formed. There was no other choice but to wait for the dripping from the through-holes or slits provided in the machine. In addition, in the substrate container described in Patent Document 2, reinforcement is provided between the orbital first rim and the second rim in order to facilitate the flow of washing water in a direction parallel to the peripheral wall of the container body. The partition ribs cannot be formed, which leaves a problem in the strength in the vertical direction of the periphery of the opening of the container.

[0 0 1 0]

Substrate storage containers are often transported by air, for example, to foreign countries, in which case the substrates are stored in the container on the ground (under atmospheric pressure) and completely sealed with a lid via a gasket. And loaded into the cargo hold of the aircraft for transport. As this aircraft flies, ascending to the sky, the air pressure in the cargo compartment drops extremely, causing an imbalance between the air pressure and the internal pressure of the container, and the lid and container body are attracted in the opening direction. At the same time, the side wall bulges outward, and the opening edges of the lid and the main body are distorted. Then, when the aircraft descends to the ground, the distortion will be deformed again in the direction of restoration due to the atmospheric pressure. At this time, an obstacle has been experienced in which a gap is formed in the gasket portion, the outside air containing dust is sucked into the container, and the substrate is contaminated. Therefore, the substrate container is required to have high pressure resistance as well as cleanliness.

[0 0 1 1]

In the cleaning operation of the substrate storage container, the cleaning liquid adhering to the container after the cleaning is used. There is a step of dispersing the cleaning liquid with compressed air. Thus, it is desirable that the shape of each part of the container has a gradient in the dropping direction of the attached cleaning liquid. However, this is not a requirement. Rather, it is shaped so that the compressed air blown after washing reaches every corner of the container wall, that is, without a hidden angled shadow that is not exposed to the air flow, and as a result, water droplets are scattered by the compressed air. It is desirable to make the shape easy to disappear.

[0 0 1 2]

It is an object of the present invention to provide a substrate storage container having a structure having sufficient strength and good scattering properties due to compressed air of residual cleaning water.

[0 0 1 3]

In order to solve the above-mentioned problem, the present invention relates to the above-mentioned precision substrate storage container such as a wafer, wherein the container main body 10 has a lower portion corresponding to the height of the gasket 5 from the opening edge thereof. An L-shaped peripheral wall 12 is erected on the outer peripheral wall. Then, the first flange 13 integrally projecting outward from the bottom of the L-shaped peripheral wall is provided except for a predetermined distance D at the center of the front and back sides (sometimes referred to as front and rear sides of the container) of the container. The first flange has the same amount of protrusion as the first flange, and the second flange 14 is formed at the bottom with a distance of 1 cm to several cm (appropriate spacing). Then, a plurality of vertical ribs 15 are provided between the L-shaped peripheral wall 12 (first flange 13) and the second flange 14. A predetermined interval D between the center of the front and back sides of the container main body is located below the L-shaped peripheral wall, at a predetermined height above the second flange 14 and is substantially the same as the L-shaped peripheral wall.横 A horizontal rib 16 with the same amount of lateral protrusion and a locking projection 16a with the lid is attached. The predetermined height corresponds to the distance between the lower end surface of the locking plate 2a hanging down on the front and rear surfaces of the lid 1 and the lower end edge of the engagement hole 2b. Then, a plurality of vertical ribs 17 are formed between the upper surface of the horizontal rib 16 and the bottom surface of the L-shaped peripheral wall. As a result, the strength of the opening of the container is strengthened and the scattering of the residual cleaning liquid by the compressed air is improved.

[0 0 1 4]

The present invention provides the precision substrate storage container such as a wafer according to the above invention, wherein the lower surface of the gasket insertion groove 12a comprising the L-shaped peripheral wall and the first and second flanges are provided. ^

The lower surface is inclined 1 in a direction to rise outward from the side wall of the container body; and the upper surfaces of the first flange and the second flange are in a direction descending outward from the side wall of the container body. Inclusion of the inclination 02 facilitates the dropping of water droplets attached to the back surfaces of the first flange and the second flange when the container body is inverted after cleaning.

[0 0 1 5]

Further, in the present invention, in the precision substrate storage container such as the wafer described above, a protruding ridge 14a is protruded on the lower surface of the leading edge of the second flange, and a similar protruding ridge 16b is protruded on the lateral rib. This prevents the fingers from slipping during handling and improves the strength of the flanges and ribs.

[0 0 1 6]

Further, in the container invention according to the above-described invention, the installation interval of the plurality of vertical ribs 15 may be 0.5 to 3 times the interval between the first flange and the second flange, or the interval between the L-shaped peripheral wall and the horizontal rib. Includes improving the scattering and elimination of residual cleaning liquid by spraying compressed air for drying by setting it to within 5 times.

[0 0 1 7]

Comparing the present invention with the prior art, the substrate container according to the present invention has an L-shaped peripheral wall (first flange), a second flange, and a lateral rib surrounding the edge of the board. By forming a plurality of vertical ribs between the first flange and the second flange, and between the L-shaped peripheral wall and the horizontal rib, a great rigidity is obtained at the opening edge, and the pressure difference during the transportation is reduced. Resistant, eliminating the need to install many flanges as in the conventional example.

[0 0 1 8]

However, the substrate accommodating container according to the present invention is provided with a plurality of vertical ribs between the first flange and the second flange, or between the L-shaped peripheral wall and the horizontal ribs, so that the container shape is laterally partitioned. Many parts were formed, and at the time of washing, depending on the installation posture of the container body, washing water remained in the horizontal compartment, and there was a concern that drying might be delayed. However, after the washing, there is a step of blowing compressed air toward the container as described above, whereby the compressed air blown into the lateral compartment is restrained by the four side walls, ^

Piezoelectric air would be discharged reflected from little attenuation child ^_ and ^ Ku bottom injection rate, the first flange residual moisture of the located there, the second flange, above the edges of the longitudinal ribs such as Will be efficiently scattered. A laterally open pocket constrained by such a wall has a circular or square shape that is excellent for removing water droplets, but the distance between the first and second flanges is, for example, 1.5 cm to 3.0 cm. In this case, by setting the interval between the vertical ribs to 0.5 to 3.5 times (square or rectangular to aspect ratio 3.5), a good water droplet removal effect was obtained. If the intervals between the vertical ribs are set longer than that, and if the pressurized air is blown on the surface of the container in other flat parts, the residual moisture is dispersed on the surface of the container and still remains as small water droplets. Did not scatter. BRIEF DESCRIPTION OF THE FIGURES

[0 0 1 9]

FIG. 1 is an exploded perspective view showing the structure of a substrate storage container according to the present invention, in which the components are separated and shown.

FIG. 2 is a perspective view showing a main body of the substrate storage container.

Fig. 3 is a front view of the substrate container main body. The left half from the center line is an external view, and the right half from the center line is a cross section.

FIG. 4 is a partial longitudinal sectional view showing a gasket insertion groove (12a), a first flange (13), and a second flange (14).

FIG. 5 is a half cut bottom view for explaining a horizontal rib (16) provided at a predetermined interval (D) in the center of the front and back sides of the container.

FIG. 6 shows a conventional example (container main body) of a container for storing substrates and the like, and FIG. 6 (a) is a perspective view thereof, and FIG. 6 (b) is a partial longitudinal sectional view of an AA section.

Fig. 7 shows another conventional example (container main body). Fig. 7 (a) is a front view, and Fig. 7 (b) is an enlarged side view of the circled part in (a). It is sectional drawing. Embodiment of the Invention

[0020] An embodiment of a substrate accommodating container i such as a semiconductor according to the present invention will be described in detail.

[0 0 2 1]

In the container body 10 which is a plastic molded product, the opening end is an opening peripheral wall 11 that fits with the lid 2, and an L-shaped cross-sectional peripheral wall 12 is provided immediately below the outer wall surface of the opening peripheral wall 11. The gasket insertion groove 12a is formed between the outer wall of the peripheral wall 11 and the gasket insertion groove 12a. The first flange 13 (which is protruded in a substantially horizontal direction integrally from the bottom of the L-shaped peripheral wall 12 (therefore, the horizontal bottom of the L-shaped peripheral wall is a portion of the L-shaped peripheral wall, and (The two numbers 1 2 and 13 are given because they are also part of the first flange) around the front and back sides of the container except for a predetermined interval D at the center, and further, A second flange 14 having substantially the same shape and the same amount of protrusion as the first flange 13 is formed at a distance of 1 cm—a few cm (at an appropriate interval) below (the bottom side) the first flange 13, and A plurality of vertical ribs 15 are provided between the L-shaped peripheral wall 12 (first flange 13) and the second flange 14. The interval between the plurality of vertical ribs 15 is ◦ .5 to 3.5 times, preferably 1 to 12 times the vertical interval between the first flange 13 and the second flange 14. (Fig. 2)

[0 0 2 2]

The predetermined distance D at the center of the front and back sides of the container is a distance enough for the locking plate 2a formed in a hanging shape to pass through the lid 2 fitted to the container body (that is, (Spacing equal to the width of the stop plate 2a). In the space D, the L-shaped peripheral wall 12 is located on the bottom surface side of the container with respect to the bottom surface and slightly above the second flange 14, and is substantially the same as the L-shaped peripheral wall. A lateral rib 16 having a laterally projecting amount and further provided with a locking projection 16a is stretched. Several vertical ribs 17 are formed between the horizontal rib 16 and the bottom surface of the L-shaped peripheral wall 12. The interval between the plurality of vertical ribs 17 is set to 0.5 to 3.5 times, preferably 1 to 2 times the vertical interval between the L-shaped peripheral wall 12 and the horizontal ribs 16. In addition, a convex ridge 16 b having a width and a height of about 1 mm to 2 mm is formed at the lower end edge of the horizontal rib 16, and the upper surface of the engaging projection 16 a is The lower end of the vertical rib 17 forms an inclined wall that reaches the tip of the projection 16a to enhance the strength. (See Fig. 2 and Fig. 5)

[0 0 2 3] The L-shaped peripheral wall 1 2 (first flange 13), second flange 14, vertical rib 15, horizontal rib 16, and vertical rib 17 each contact the wall of the container body 10. The radius of the fillet curve, which is about 1/2 or less of the wall thickness of the container body, is attached to the surface of the fillet, and further from the base end of the fillet curve radius to the tip end of the rib. It is graded so that it becomes thinner. This gradient (for example, 0 1 and Θ 2 in Fig. 4) is a basic value required for a molded product to be easily removed from a mold in plastic injection molding, for example, 1 ° to 15 °. You. In particular, for the L-shaped peripheral wall 12 (the first flange 13), the second flange 14, and the lateral rib 16, it is desirable to slightly increase the slope S 1 on the lower surface side by natural dripping of the residual cleaning liquid. (See Fig. 4)

[0 0 2 4]

However, since the upward slope is formed on the back surface of the second flange 14 in this manner, there is a disadvantage that the fingers put on the container are liable to slip when handling the container. As a solution to this, a ridge 14a having a straight line or an intermittent point 14b for improving drainage is formed at the front end edge of the rear surface of the second flange 14. (See Fig. 2)

[0 0 2 5]

The main points of the substrate storage container have been described above. However, other structural features will be briefly described. In the container main body 10, the column-shaped portions 1 are provided at the lower four corners of the second flange 14. Forming eight. A part of the container side wall 19 on the front and rear sides between the columnar parts 18 is a partially arcuate part 19a, the lower part of which is flat and retreats inside the container, and the container side walls 20 on the left and right sides are They are flat and slightly retreated inside the container from the columnar portions 18, and both of them hang down and are connected to the bottom plate. These structures contribute to the rigidity of the entire container. The lid 2 that covers the container body 10 is integrally formed with a locking plate 2a protruding at two opposing surfaces of the opening edge, and is further engaged with the locking plate 2a. Opening 2b is open.

[0 0 2 6]

The substrate housing cassette 4 has an opening in the vertical direction, one of the opposing side walls has an arc shape below the middle part to narrow the gap, and the inner surface has a large number in the vertical direction. The partition wall 4a is formed, and a base insertion groove for accommodating 41 base plates is formed in the partition wall 4a. Further, the substrate holder 3 has a large number of elastic substrate holding arms 3a formed at the same pitch as the above-mentioned substrate passage groove (between the partition walls 4a and 4a).

[0 0 2 7]

Normally, prior to using the substrate container, the container is washed with water by a washing machine. At this time, the container is hung upside down or slantingly in the washing apparatus with the opening part downward, and the washing water is sprayed. Then, the remaining air is blown off by blowing compressed air and dried. In the case of the substrate storage container of the present invention, as described above, the container-like horizontal section is formed by the first flange 13, the second flange 14, the vertical rib 15, and the like for reinforcing the opening. . Although there is a possibility that the cleaning liquid remains in the lateral compartment, the residual cleaning liquid is easily scattered by the injection of the compressed air as described above.

[0 0 2 8]

Next, a method of using the substrate container 1 of the present invention will be described with reference to FIG. First, a gasket 5 is attached to the container main body 10 at the mouth end thereof, and a substrate housing cassette 4 inserts a substrate (not shown) such as a wafer between the partition walls 4 a to insert the container main body 10 into the container main body 10. Housed within. Next, the substrate holder 3 having the substrate holding arm 3a is placed on the upper end of the substrate housing cassette 4, and the cover 2 is further covered. Then, an engagement through hole 2b of a locking plate 2a integrally projecting from the lower edge of the lid 2 is engaged with an engagement projection 16b formed on the container body 10, and the container is It is sealed.

[0 0 2 9]

The effect of the substrate storage container of the present invention having the above-described structure is as follows.In the present invention, the main body 10 is provided with a first flange 13 of the container when the container is turned upside down at the time of washing or after washing. The cleaning water adhering to the second flange 14 and the lateral ribs 16 flows outward and drops, so that reliable drying can be obtained in a short time. Therefore, no dust adheres during drying.

[0 0 3 0]

By the L-shaped peripheral wall 12, the first flange 13, the second flange 14, the horizontal rib 16 and the plurality of vertical ribs 15, 17, the strength of the substrate container is dramatically improved, Through The airtightness is not broken by the pressure difference in the usual air transportation.

[0 0 3 1]

In the container body 1 ◦, the convexity 14 a having a break point is formed at the front end edge of the lower surface of the second flange 14, so that dripping of washing water is easy and hand slip during handling is eliminated.

[0 0 3 2]

In the conventional type of substrate storage container, it is usual to fold two sides of the front and back surfaces, insert the palm into the surface of the flange 23, insert the fingertip into the inside 24 of the flange 23, and lift the container. Here, the container is often easily held by one hand because it is easy to handle, which may cause the container to be greatly inclined and damage the housed substrate. On the other hand, the container 10 of the present invention cannot be held by only one outward flange, and the holding requires holding the side wall surface 20 of the container with both hands. As described above, since considerable attention is required for holding the container, safe handling of the container and therefore the substrate can be obtained.

[0 0 3 3]

Explanation of reference numerals

1 Substrate container

2 Lid, locking plate 2a, engaging hole 2b

3 Board holder, elastic holder 3a, board holding arm 3a

4 cassette, partition, board insertion groove 4a,

5 Gasket

1 0 Container body

1 1 Opening wall

1 2 L-shaped peripheral wall, gasket insertion groove 1 2a,

1 3 1st flange

1 4 2nd flange, ridge 14 a, intermittent point 1 4 b

1 5 Vertical rib (between first and second flanges) _u

6 Lateral rib, engaging projection 16a, convex_strip 1_6b, intermittent point 16c7 (between L-shaped peripheral wall and lateral rib) Vertical rib

8 Column

9 Front and rear side walls of container, partially arcuate part 1 9 a

0 Left and right side walls of container

D: Predetermined spacing at the center (provided at the top of the left and right side walls of the container body)

Θ 1, Θ 2: Slope (See Fig. 4)

Claims

The scope of the claims

1. A precision substrate such as a wafer in which a plurality of precision substrates such as wafers are loaded in a container body at equal intervals and the container body is sealed using a lid via a gasket.

(5) In the container, the container body (10) has a gasket insertion groove (12a) formed by erecting an L-shaped peripheral wall (12) on an outer peripheral wall of an edge of the container. A first flange (13) integrally projecting outward from the bottom of the peripheral wall is provided around the front and rear sides of the container except for a predetermined distance (D), and further includes a first flange (13) and a side. In the same direction and at a distance of 1 cm to several cm from the bottom of the container body.

Forming a plurality of vertical ribs (15) between the first flange and the second flange by forming a two-flange (14); and D) is located above the second flange (14), and has a lateral protrusion amount substantially equal to that of the L-shaped peripheral wall, and has a laterally projecting projection (16a) for engaging with the lid. A rib (16) is stretched, and a plurality of ribs are provided between the upper surface of the lateral rib (16) and the bottom surface of the L-shaped peripheral wall (12).

A precision substrate container, such as a wafer, characterized in that 15 or more vertical ribs (17) are formed.

2. The container for precision substrates such as wafers according to claim 1, wherein the lower surface of the gasket insertion groove (12a) formed of the L-shaped peripheral wall and the lower surfaces of the first flange and the second flange are outside the side wall of the container body. The upper surface of the first flange and the upper surface of the second flange are inclined (Θ2) in a direction of descending outward from the side wall of the container body. A container for accommodating precision substrates such as wafers.

3. The container for precision substrates such as wafers according to claim 1, wherein the ridges (14a) and (16b) are continuously or intermittently provided on the lower surface of the leading edge of the second flange (14) and the lateral rib (16). 14 b) A container for precision substrates, such as wafers, characterized by being protruded in (16c).

25 4. The vertical ribs (15) and (17) should be installed within 0.5 to 3.5 times the distance between the first and second flanges or the distance between the L-shaped peripheral wall and the horizontal ribs. The container for precision substrates such as wafers according to claim 1, characterized in that: