JP4274682B2 - Precision substrate storage container - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a precision substrate storage container for storing a precision substrate made of a semiconductor wafer, mask glass, various recording media, and the like, and safely storing and transporting the precision substrate while preventing damage and contamination.
[0002]
[Prior art]
As shown in FIG. 9, the conventional precision substrate storage container includes a container body 1, a cassette 3 that stores a plurality of precision substrates (not shown) and is stored in the container body 1, and an open upper surface of the container body 1. A lid 6 that is closed via a seal gasket 5 and a substrate presser 8 that is attached to the back surface of the lid 6 and holds the upper peripheral edge of each precision substrate are provided.
In the container body 1, the upper part of the peripheral wall excluding the substantially side walls is partially folded outward to form a folded flange 40, and the strength of the upper surface opened by the folded flange 40 is reinforced and the external force acting on the wall is buffered. In addition, it functions as a handle during manual operation (see FIGS. 10 to 12). On both side walls of the container main body 1, locking portions 2 protected by the folded flange 40 are formed. In addition, hooks 7 are formed on both side walls of the lid body 6, and the hook bodies 7 are locked to the locking portions 2, whereby the lid body 6 is firmly fitted to the opened upper surface of the container body 1.
[0003]
By the way, conventional precision substrate storage containers are often disposed of after use, but in addition to the recent increase in the size of precision substrates and the increase in the number of storage, cost reduction, resource saving, and consideration for environmental issues And it is getting reused. In the case of such reuse, the container body 1 of the precision substrate storage container is thoroughly cleaned manually by using a cleaning liquid such as a surfactant, rinse water such as pure water or ultrapure water. .
[0004]
[Problems to be solved by the invention]
In recent years, the precision substrate storage container has the container body 1 cleaned manually by using rinse water as described above, and then reused. However, the quality of the manual cleaning is not stable enough. is there. In addition, there are many particles adhering manually and there are many variations in contamination.
[0005]
In order to solve such a problem, the precision substrate storage container may be cleaned, dried, transported, etc. with an automatic cleaning device having a high degree of cleanness, but this method also has a problem. In terms of this point, in the case of cleaning with a cleaning device, the container body 1 is turned upside down and then turned downward, and then the container body 1 is automatically dried. In this case, the peripheral wall of the container body 1 and the folding flange 40 Since a large amount of rinsing water accumulates between the bag portions 41 (see FIG. 12), a major problem arises that drying is delayed and workability is significantly reduced. Further, if rinse water accumulates between the peripheral wall of the container body 1 and the folded flange 40, this portion cannot be sufficiently washed, so that particles and the like are likely to remain, and there is a high risk of contamination of the precision substrate during storage. .
[0006]
In order to solve the above problem, a dedicated reversing device corresponding to the shape of the precision substrate storage container may be installed in the cleaning device, and the container body 1 may be reversed by the reversing device. However, this lacks versatility and increases equipment costs, resulting in a significant increase in cleaning costs.
[0007]
The present invention has been made in view of the above, and can be cleaned with a cleaning apparatus without causing a delay in drying or a decrease in workability, and effectively suppresses the possibility of residual particles or contamination of a precision substrate. An object of the present invention is to provide a precision substrate storage container that can be used.
[0008]
[Means for Solving the Problems]
As a result of intensive studies on the above problems, the present inventor has found that it is only necessary to use a plurality of rims to secure the strength of the opening without forming the folded flange, and the conditions of the rim shape and the number of the rims are examined in detail. Completed the invention.
That is, in order to solve the above-described problems, the present invention includes a container main body that houses a precision substrate and a detachable lid that opens and closes the opening surface of the container main body, and is engaged with both side walls of the peripheral wall of the container main body. Each part is formed, and on both side walls of the lid, each hook is formed to be locked to the locking part of the container body,
The container body includes a flange extending in the direction of the opening surface in the vicinity of the opening end surface of the peripheral wall, a first rim that projects from the vicinity of the end portion of the flange toward the outside of the peripheral wall and surrounds the opening end surface, and the first rim. A plurality of second rims that are located on the wall surface facing the opening surface and project so as to be parallel to the first rim in the outer circumferential wall direction so as to surround the circumferential wall,
The first and second rims are formed on the peripheral wall of the container body, and the first and second rims are omitted in the vicinity of the engaging portion, and the wall faces the opening surface of the container body in the first and second rims. When the back surface that is the side is formed so as to be inclined downward by 1 to 5 ° from the base of the rim toward the tip when the opening surface of the container body is directed downward, the opening surface of the container body is directed downward , than the inclination angle theta ₁ of the second rim located below, it is characterized by having an increased inclination angle theta ₂ of the rear surface of the second rim.
[0009]
In addition, in the back surface of the wall surface side facing the opening surface of the container body of the first and second rims, the thickness of the base of the first and second rims gradually increases or decreases gradually. It is preferable to change and incline in the longitudinal direction .
[0010]
Here, the precision substrate in the claims includes at least one or a plurality of (for example, 13, 25, 26) semiconductor wafers (for example, 6 inch, 8 inch, 12 inch silicon wafers), Mask glass, various recording media, and the like are included. About a container main body, a top open box type and a front open box type may be sufficient, and a transparent, semi-transparent, and opaque type can be selected suitably. In addition, the number of second rims can be any one or more.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. As shown in FIG. 1, a precision substrate storage container according to the present embodiment includes a top open box type translucent container body 1 and a plurality of unillustrated containers. A cassette 3 in which a single precision substrate is vertically aligned and stored in a detachable manner in the container body 1, and a detachable lid that closes and closes the opened upper surface of the container body 1 through an endless seal gasket 5. 6 and a substrate retainer 8 that is detachably fitted to the back surface of the lid 6 and holds the upper peripheral edge of each precision substrate. The container body 1 includes a flange 10, a first rim 20, and a plurality of substrates. The first and second rims 20, 30, 31 secure the strength and rigidity of the container body 1 instead of the folded flange 40.
[0012]
The container body 1 is integrally molded into a substantially bottomed rectangular tube shape having an open top surface using, for example, polypropylene having excellent particle resistance, chemical resistance, moldability, rigidity, and the like (see FIG. 1). Locking portions 2 are formed to project from the upper portions of both side walls of the container body 1. Further, as shown in the figure, the cassette 3 is formed in a substantially cylindrical shape having upper and lower surfaces opened using polypropylene or the like, and a plurality of support grooves 4 for precision substrates are formed side by side on the inner surfaces of both side walls. Has been. The seal gasket 5 and the substrate holder 8 are formed using various thermoplastic elastomers such as polyolefin and polyester, and rubbers such as fluorine rubber and silicone rubber. In addition, the board | substrate holding | suppressing 8 can also be formed using various synthetic resins.
[0013]
The lid 6 is formed transparent using, for example, polycarbonate having excellent particle resistance, water resistance, heat resistance, impact resistance, transparency and the like (see FIG. 1). A substantially rectangular hook 7 extending downward is formed in the lower part of both side walls of the lid 6 so that it can be bent, and the opening of each hook 7 is fitted and locked to the protrusion of the locking part 2 of the container body 1. By doing so, the lid body 6 is firmly fitted and held on the opened upper surface of the container body 1.
[0014]
As shown in FIGS. 2 to 4, the flange 10 is integrally formed adjacent to the vicinity of the upper end surface of the peripheral wall of the container main body 1, and extends substantially in a tapered direction toward the opening surface of the container main body 1, that is, upward. A recess 11 for storing the seal gasket is defined between the upper end surface of the peripheral wall.
[0015]
As shown in the figure, the first rim 20 is integrally formed in the vicinity of the end of the flange 10 and projects slightly outwardly in the outer peripheral wall direction of the container body 1, that is, in the horizontal outer direction. The front surface 21 is slightly inclined so that the thickness decreases from the root toward the tip, and the back surface 22 is also slightly inclined so that the thickness decreases from the root toward the tip. As shown in FIG. 1, the first rim 20 is formed on most of the peripheral wall instead of the folded flange 40, but the vicinity of the locking portions 2 on both side walls is omitted without being formed. . The front end portion of the first rim 20 is formed to have a width of 1 to 3 mm, preferably 2 mm. Further, the front and back surfaces 21 and 22 of the first rim 20 are inclined at an inclination angle of 1 to 5 °, preferably 3 °. Thereby, when the opening surface is downward, the back surface of the first rim 20 is inclined downward from the base of the rim to the tip.
[0016]
The plurality of (two in this embodiment) second rims 30 and 31 are, as shown in FIGS. 2 to 4, the upper end portion of the outer peripheral surface of the peripheral wall of the container body 1 so as to be parallel to the first rim 20. The container body 1 is formed in a single piece, projects slightly outwardly in the outer peripheral wall direction of the container body 1, that is, in the horizontal outer direction, and is positioned on the bottom side of the container body 1 with respect to the first rim 20. As shown in FIG. 1, the plurality of second rims 30, 31 arranged in the vertical direction are formed on most of the peripheral wall instead of the folded flange 40, but are formed around the locking portions 2 on both side walls. It is omitted without being done.
[0017]
Similar to the first rim 20, the second rims 30 and 31 are slightly inclined so that the surface 32 decreases in thickness from the root toward the tip, and the back surface 33 also has a thickness from the root toward the tip. Slightly inclined to decrease. The distal end portions of the second rims 30 and 31 are formed with a width of 1 to 3 mm, preferably 2 mm. Further, the front and back surfaces 32 and 33 of the second rims 30 and 31 are inclined at an inclination angle of 1 to 5 °, preferably 3 °. Thereby, when the opening surface is downward, the back surface of the second rim 30 or 31 is inclined downward from the root of the rim to the tip.
[0018]
About the corner part of the first and second rims 30 and 31 and the peripheral wall of the container body 1, the radius of the corner part is appropriately selected from the range of R0.3 to R1.5 mm, preferably R0.5 mm. . This is because, within such a numerical value range, it is difficult for water droplets of rinsing water to remain during cleaning.
[0019]
In the above configuration, the cleaning liquid is sprayed from the cleaning nozzle of the cleaning device onto the container body 1 for cleaning, the container body 1 is turned upside down and the opening is directed downward (see FIG. 5), and then the container body 1 is automatically dried. As a result, the first and second rims 20, 30, and 31 of the rinsing water adhering to the peripheral wall of the container body 1 (see the arrow in the figure) are inclined because the first and second rims 20, 30, and 31 tend to accumulate water droplets. It flows down rapidly and efficiently without accumulating along the inclined rear surface 22 and the inclined rear surface 33 of the second rim 30.
[0020]
According to the above configuration, since a large amount of rinsing water does not accumulate between the peripheral wall of the container body 1 and the first and second rims 30 and 31, the drying work time can be shortened and workability and production can be reduced. Property and drying effect can be remarkably improved. Further, since the residual particles can be greatly suppressed and prevented, the possibility of contamination of the precision substrate during storage can be extremely effectively suppressed and eliminated. In addition, since it is not necessary to install any special inversion device or blower device corresponding to the shape of the container body 1 (particularly, the portion where water droplets easily collect), an inexpensive general-purpose washing / drying device can be used. Therefore, versatility can be improved and the cleaning cost can be reduced.
[0021]
Furthermore, since the first and second rims 20, 30, and 31 having a drainage function also function as a substitute for the folded flange 40, the strength of the opened upper surface of the container body 1 can be extremely effectively reinforced, The external force acting on the peripheral wall is buffered and can be easily used as a handle during manual operation. As a result, damage to the precision substrate and the cassette 3 and deformation due to pressure fluctuation can be suppressed and the safe storage, transportation and transportation of the precision substrate can be greatly expected.
[0022]
Next, FIG. 6 shows a second embodiment of the present invention. In this case, the wall thickness from the center portion of each wall to the corner portion of the first and second rims 20, 30, 31 is shown. The front and back surfaces of the first and second rims 20, 30, and 31 are inclined gradually in the longitudinal direction (left and right direction in the figure). Other parts are the same as those in the above embodiment, and thus the description thereof is omitted.
According to the present embodiment, since the inclined surfaces are formed also in the thickness direction of the first and second rims 20, 30, and 31, a flow path in which the rinsing water flows in the same direction is also formed during cleaning and drying. be able to. Therefore, liquid drainage is good and water droplets are less likely to accumulate.
[0023]
Next, FIG. 7 shows a third embodiment of the present invention. In this case, the wall thickness from the central portion of each wall to the corner portion of the first and second rims 20, 30, 31 is shown. The thickness is gradually increased, and both the front and back surfaces of the first and second rims 20, 30 and 31 are inclined in the longitudinal direction (left-right direction in the figure). Other parts are the same as those in the above embodiment, and thus the description thereof is omitted.
[0024]
Next, FIG. 8 shows a fourth embodiment of the present invention. In this case, the second rims 30 and 31 are formed symmetrically, and the opening surface of the container body 1 is directed downward. The inclination angle θ ₂ of the back surface 33 of the second rim 31 where water droplets are likely to remain is made larger than the inclination angle θ ₁ of the second rim 30 positioned below. Other parts are the same as those in the above embodiment, and thus the description thereof is omitted.
According to this embodiment, not only the removal of rinsing water and water droplets is facilitated, but also the dimensions of the end portions of the second rims 30 and 31 are unnecessarily large, and material loss and thickening are prevented. It can be prevented very effectively. In addition, it is possible to very effectively suppress and prevent the second rims 30 and 31 from being deformed with a simple configuration.
[0025]
【Example】
The container main body 1 of the precision substrate storage container shown in FIG. 1 and the container main body 1 of the precision substrate storage container shown in FIG. 9 were each washed, and then their drying state and drying time were compared.
As a test method, the container main body 1 is completely submerged in pure water and pulled up, and the container main body 1 is turned upside down and left open for 1 minute, and continuously dropped water drops are removed. The container body 1 with the opening surface facing downward was set in a drying device set at 60 ° C., and the time until water droplets completely disappeared from the surface 32 of the container body 1 was measured.
[0026]
As a result of the test, water droplets did not partially accumulate in the container body 1 of the precision substrate storage container shown in FIG. 1, but water droplets partially remained in the container body 1 of the precision substrate storage container shown in FIG. Moreover, the removal time of the water droplet adhering to the container main body 1 shown in FIG. 1 was able to be shortened to 1/2 that of the container main body 1 shown in FIG.
[0027]
【The invention's effect】
As described above, according to the present invention, there is an effect that it is possible to perform cleaning or the like with the cleaning device without causing a delay in the drying operation and a decrease in workability. Also, through this, it becomes possible to effectively suppress and eliminate the possibility of residual particles and the like and contamination of the precision substrate. That is, since a large amount of rinse water does not accumulate between the peripheral wall of the container body and the first and second rims, the drying work time is shortened, and workability, productivity, and drying effect can be improved. it can. In addition, since particles and the like can be prevented from remaining, the possibility of contamination of the precision substrate during storage can be suppressed.
In addition, since it is not necessary to install any special inversion device or blow device corresponding to the shape of the container body, an inexpensive general-purpose washing and drying device can be used. Therefore, versatility can be improved and the cleaning cost can be reduced. In addition, since the first and second rims having a drainage function also function as a substitute for the conventional folded flange, it is possible to effectively reinforce the strength of the open end surface of the container body and to apply external force acting on the peripheral wall. It can be buffered and easily used as a handle during manual operation. As a result, damage to the precision substrate and deformation due to pressure fluctuation can be suppressed, and safe storage, transportation and transportation of the precision substrate can be expected.
Furthermore, it is possible not only to easily remove rinse water and water droplets, but also to effectively prevent the size of the end portion of the second rim from becoming larger than necessary, material loss, and thickening. Furthermore, deformation of the second rim can be suppressed with a simple configuration.
[Brief description of the drawings]
FIG. 1 is an exploded perspective view showing an embodiment of a precision substrate storage container according to the present invention.
FIG. 2 is an explanatory view showing a container body in an embodiment of a precision substrate storage container according to the present invention.
FIG. 3 is a main part explanatory view showing a portion III in FIG. 2 in an enlarged manner.
4 is a sectional view taken along line IV-IV in FIG. 3;
FIG. 5 is an explanatory view showing a state in which the container body in the embodiment of the precision substrate storage container according to the present invention is dried upside down.
FIG. 6 is a main part enlarged explanatory view showing a second embodiment of the precision substrate storage container according to the present invention.
FIG. 7 is a main part enlarged explanatory view showing a third embodiment of the precision substrate storage container according to the present invention.
FIG. 8 is an explanatory cross-sectional view of a relevant part showing a fourth embodiment of a precision substrate storage container according to the present invention.
FIG. 9 is an exploded perspective view showing a conventional precision substrate storage container.
FIG. 10 is an explanatory view showing a container body of a conventional precision substrate storage container.
FIG. 11 is an explanatory view of relevant parts showing an X portion of FIG. 10 in an enlarged manner.
12 is a sectional view taken along line XII-XII in FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Container body 6 Lid 10 Flange 20 First rim 21 Front surface 22 Back surface 30 Second rim 31 Second rim 32 Front surface 33 Back surface

Claims (2)

A container body for storing a precision substrate and a detachable lid body that opens and closes the opening surface of the container body. Locking portions are formed on both side walls of the peripheral wall of the container body. , A precision substrate storage container in which a hook to be locked to the locking portion of the container body is formed,
The container body includes a flange extending in the direction of the opening surface in the vicinity of the opening end surface of the peripheral wall, a first rim that projects from the vicinity of the end portion of the flange toward the outside of the peripheral wall and surrounds the opening end surface, and the first rim. A plurality of second rims that are located on the wall surface facing the opening surface and project so as to be parallel to the first rim in the outer circumferential wall direction so as to surround the circumferential wall,
The first and second rims are formed on the peripheral wall of the container body, and the first and second rims are omitted in the vicinity of the engaging portion, and the wall faces the opening surface of the container body in the first and second rims. When the back surface that is the side is formed so as to be inclined downward by 1 to 5 ° from the base of the rim toward the tip when the opening surface of the container body is directed downward, the opening surface of the container body is directed downward , A precision substrate storage container characterized in that the inclination angle θ ₂ of the back surface of the second rim is made larger than the inclination angle θ ₁ of the second rim located below .   On the back surface of the wall surface side facing the opening surface of the container body of the first and second rims, the thickness of the base of the first and second rims gradually changes in the direction of gradually increasing or decreasing. The precision substrate storage container according to claim 1, which is inclined in the longitudinal direction.

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