JP4282369B2 - Precision substrate storage container - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a precision substrate storage container used for storing, transporting, storing and processing precision substrates such as semiconductor wafers and mask glasses made of silicon or glass.
[0002]
[Prior art]
In recent years, in order to further improve the production volume in the semiconductor industry, a precision substrate made of a silicon wafer or a glass wafer having a large diameter of 300 mm or more has begun to be used. The large-diameter precision substrate is bent by its own weight regardless of whether it is supported vertically or horizontally, so that it is required to be stored safely in a precision substrate storage container so as not to be damaged.
[0003]
Although not shown, this type of precision substrate storage container includes a front open box type container body that aligns and stores a plurality of precision substrates, a lid body that opens and closes the front surface of the container body, and the container body and lid. It is comprised from the endless seal gasket which is interposed between the body and forms a seal | sticker (refer patent document 1). In use, the precision substrate storage container having such a structure is cleaned with a special cleaning liquid made of ultrapure water, isopropyl alcohol, etc., and after the surface is removed, the precision substrate is stored and transported or stored. Used for.
[0004]
By the way, a robotic handle, a bottom plate, and a pair of manual handles are mounted as separate components on the container body of the precision substrate storage container for convenience of automatic transport, identification of the precision substrate, and manual operation. For this reason, a mounting part is formed on the exposed surface of the container body, and a mounting part is formed on another part, and the mounting part and the mounting part are fitted to each other, so that the robotic handle, the bottom plate A pair of manual handles are mounted. The attachment portion and the attachment portion are formed, for example, in a structure including a plurality of L-shaped or U-shaped locking pieces or the like, or formed in a bag path structure in which one is open and the other is closed.
[0005]
[Patent Document 1]
JP 2000-159288 A [0006]
[Problems to be solved by the invention]
Since the conventional precision substrate storage container simply has the mounting part formed on the separate part as described above, when cleaning and drying, water droplets of the cleaning liquid remain on the mounting part of the separate part. There is a problem that the drying operation is delayed or the remaining water drops enter the inside of the container body to increase the contamination.
In order to solve such problems, it is only necessary to remove the separate parts from the container body and clean them individually. However, if this is done, the extra work of attaching and detaching the separate parts becomes indispensable, leading to deterioration in workability and productivity. It will be. Furthermore, when the attachment portion and the attachment portion have a complicated structure such as a bag path and the water drainability is poor, an effect as expected cannot be obtained.
[0007]
The present invention has been made in view of the above, and there is no possibility that the liquid remains in another part and delays the drying operation, or the remaining liquid enters the container body and expands the contamination. It is an object of the present invention to provide a precision substrate storage container that does not cause such deterioration.
[0008]
[Means for Solving the Problems]
In the present invention, in order to solve the above-mentioned problems, a container body of a front open box that houses a precision substrate, a planar inverted U-shaped mounting portion provided on the exposed upper surface of the container body, and a planar inverted U-shaped mounting A robotic handle with a pair of legs extending from the back surface of the gripping plate for gripping, a mounting portion provided on the exposed lower surface of the container body, and a mounting portion attached to the mounting portion via a mounted portion A bottom plate that causes the base plate to face and oppose the lower surface of the container body, and is washed with a cleaning liquid and dried.
The plane inverted U-shaped attachment portion is formed between a pair of guide rails that are opposed to each other on the upper surface of the container body and extend in the front-rear direction of the container body, and a front end portion of the pair of guide rails. And a butting wall that contacts and fixes the robotic handle, and a pair of guide rails are inclined so that the width gradually decreases from the rear side of the container body toward the front side. In addition, each guide rail is bent to have an inverted L-shaped cross section, and on the surface where the cleaning liquid is likely to remain, a wrinkle having an average surface roughness of 70 to 100 μm is formed in a satin-like shape to improve the drainability of the cleaning liquid.
Each leg of the robotic handle is bent to have an L-shaped cross section, and its free end is slidably fitted into the bent side of the guide rail,
The mounting portion is provided at a distance from the lower rear portion of the container main body and includes a pair of holding rails oriented in the front-rear direction of the container main body. Each holding rail is bent into an L shape so that the cleaning liquid can easily remain. On the surface, a wrinkle with an average surface roughness of 70 to 100 μm that improves the drainability of the cleaning liquid is formed in a satin shape, and the short piece of each holding rail is positioned on the front side of the container body,
The body of the part to be attached is formed on both sides of the base plate of the bottom plate, and the stopper protrusion extends forward from the outside of the front of each body, and a notch space is formed between the front of each body and the stopper protrusion. The flexible neck piece forming the head is extended forward, a drop-out preventing projection is formed outside the tip of the neck piece, and the short piece of the holding rail is sandwiched between the stopper projection and the drop-out preventing projection of the neck piece. It is characterized in the thing.
[0009]
Here, the precision substrate in the claims includes at least a 6-inch or 8-inch semiconductor wafer (silicon wafer, etc.) used in the electric, electronic, and semiconductor fields, mask glass, liquid crystal cell, quartz glass, mask substrate, etc. There is no particular limitation on the singular number. The container body can be attached with a lid or subjected to a charging process as necessary .
[0010]
A texture refers to a satin pattern that is applied as a design pattern. The grain is formed in a region where the liquid in the attachment portion and the vicinity thereof is likely to remain, and in a region where the liquid in the attachment portion and the vicinity thereof is likely to remain. Furthermore, the precision substrate storage container can be used at least as a carrier used for manufacturing a semiconductor, an inter-process carrier (FOUP), and a shipping FOSB.
[0011]
According to the present invention, the water repellent function is formed in a region where the cleaning liquid separate from the container main body tends to accumulate, so that the region where the cleaning liquid easily accumulates is difficult to get wet with the cleaning liquid, and the cleaning liquid is repelled. It is possible to prevent the cleaning liquid from accumulating in another part or the like during the drying operation. Therefore, it is possible to shorten the drying time and prevent the remaining cleaning liquid from entering the container body and expanding the contamination.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. As shown in FIGS. 1 to 7, a precision substrate storage container according to the present embodiment is a transparent transparent material that stores a semiconductor wafer having a diameter of 300 mm. The container body 1, the lid body 10 that opens and closes the container body 1, the frame-shaped seal gasket 20 that is interposed between the container body 1 and the lid body 10 to form a seal, and the container body 1 is exposed. A plurality of attachment portions 30 and 30A respectively disposed on the upper and lower surfaces, a robotic handle 40 that is detachably fitted to the attachment portion 30 on the upper surface of the container body, and a detachable fit on the attachment portion 30A on the lower surface of the container body. The bottom plate 50 is combined with each other, and the wrinkles 70 having a predetermined roughness are respectively formed on the surface regions where the cleaning liquid easily remains in the plurality of attachment portions 30 and 30A.
[0013]
As shown in FIG. 1, the container body 1 is injection-molded into a front open box type that is open only on the front surface using a synthetic resin such as polycarbonate, cycloolefin polymer, polyetherimide, etc. that is excellent in lightness and moldability, A plurality of semiconductor wafers (for example, 13, 25, and 26) (not shown) function so as to be aligned and stored at a predetermined pitch in the vertical direction. The container body 1 has sufficient strength, rigidity, and dimensional stability so as not to be deformed, and ensures the normal operation of an automatic transfer device made of AGV (Auto Guided Vehicle).
[0014]
Opposite support units 2 are provided on opposite sides of the inside of the container body 1, and a plurality of support ribs 3 are arranged in parallel in a vertical direction on the opposing surfaces of the pair of support units 2. The peripheral edge of the semiconductor wafer is horizontally supported by a plurality of opposing support ribs 3. Further, the front peripheral edge of the container main body 1 is gradually enlarged outward to form flanges 4, and locked portions 5 located in the vicinity of the rear of the flange 4 are respectively provided on both outer sides of the container main body 1. At the same time, the manual handle 6 for gripping operation is detachably mounted. Each manual handle 6 is formed in, for example, an L shape, a U shape, or the like, and is attached to an attachment portion on the outer side surface of the container body 1 via an attachment portion using an engagement claw and an engagement groove, or an uneven structure. The
[0015]
As shown in FIG. 2, positioning tools 7 fitted to positioning pins of a processing apparatus (not shown) are integrally or detachably provided on both sides of the front and bottom of the bottom surface (bottom surface) of the container body 1. The plurality of positioning tools 7 position the precision substrate storage container to the processing apparatus, and in this state, the semiconductor wafer is loaded or unloaded from the precision substrate storage container to the processing apparatus. Each positioning tool 7 is formed into a substantially flat oval shape using polypropylene, polycarbonate, polybutylene terephthalate, polyether ether ketone, polyether imide, etc., which have excellent wear resistance, and gradually spreads downward. A groove having a substantially V-shaped cross section is cut out.
[0016]
Here, the processing apparatus is an apparatus that positions the precision substrate storage container and automatically removes the lid 10, loads a semiconductor wafer from the positioned precision substrate storage container, and transfers it to another in-process container, or The semiconductor wafer is loaded from the precision substrate storage container with the lid 10 removed, and the semiconductor wafer is supplied to an apparatus that performs various processes such as oxide film formation, photoresist coating, exposure, etching, cleaning, and thin film formation on the semiconductor wafer. Refers to the device.
[0017]
As shown in FIG. 1, the lid body 10 is formed in a substantially rectangular shape that can be fitted to the front surface of the container body 1 and functions to open and close the opening of the container body 1 detachably. A longitudinally long front retainer 11 is detachably mounted on the inner surface of the lid 10 (the surface facing the back of the container body 1). A plurality of support ribs are vertically attached to the front retainer 11 at a predetermined pitch. The front peripheral edge of the semiconductor wafer is horizontally supported by the plurality of support ribs.
[0018]
A seal gasket 20 is detachably fitted to the peripheral edge portion of the lid body 10 through protrusions, grooves, and the like, and the seal gasket 20 exerts a sealing function by being pressed against the inner peripheral portion of the front surface of the container body. The seal gasket 20 is formed using, for example, various polyolefin-based or polyester-based thermoplastic elastomers, fluorine rubber, silicone rubber, or the like. Preferably, molding is performed using a material that generates less organic components that contaminate the semiconductor wafer and has a hardness of 80 ° or less according to the measurement method of JIS K6301A. Further, locking pieces 13 having U-shaped cutouts are rotatably supported on the left and right side portions of the lid body 10, and the cutouts of the respective lock pieces 13 are locked portions of the container body 1. The lid body 10 closes and covers the opening of the container body 1 by being fitted and locked to 5.
[0019]
In the present embodiment, the lid body 10 is simply shown, but the present invention is not limited to this. For example, a latch mechanism that operates by an external operation is built in the lid body 10, and when the lid body 10 is mounted, a plurality of latching claws of the latch mechanism protrude from the peripheral edge of the lid body 10, May be fitted and locked in a plurality of locking holes perforated above and below the inner peripheral surface of the front surface of the container body, and the lid body 10 covering the front surface of the container body 1 may be fixed.
[0020]
As shown in FIG. 3, the attachment portion 30 is formed in a substantially planar U-shape in the vicinity of the exposed upper surface center of the container body 1. The mounting portion 30 includes a pair of guide rails 31 that are opposed to each other on the upper surface of the container body 1, and an abutting wall 32 having a stopper function is integrally formed between the front sides of the pair of guide rails 31. Is done. As shown in FIGS. 3 and 4, the pair of guide rails 31 are inclined inward so that the width gradually decreases from the rear side toward the front side, and each guide rail 31 has an inverted L-shaped cross section. It is formed. The mounting portion 30 having such a structure slides the robotic handle 40 inserted from the rear side between the pair of guide rails 31 to the front side, and makes the robotic handle 40 abut against the abutting wall 32 to fix the positioning. .
[0021]
As shown in FIGS. 6 and 7, the attachment portions 30 </ b> A are formed on both sides of the rear portion of the exposed lower surface of the container body 1. The mounting portion 30A includes a pair of holding rails 33 that are opposed to each other on the lower surface of the container body 1, and each holding rail 33 is formed in an L shape, and the rear side of each holding rail 33 is formed with an opening. At the same time, the front side is closed. The mounting portion 30 </ b> A having such a structure slides and fixes the bottom plate 50 inserted from the rear side between the pair of holding rails 33 to the front side.
[0022]
As shown in FIG. 4, the robotic handle 40 has a flat rectangular gripping plate 41 gripped by a ceiling transporter (not shown), and is formed in an L-shaped cross section so as to extend from both sides of the back surface of the gripping plate 41. It is molded as a separate part having a substantially π-shaped cross section from the pair of legs 42, and the free end portion of each leg 42, which is a mounted portion, is fitted into the bent side of the guide rail 31.
[0023]
As shown in FIG. 5, the bottom plate 50 is provided with a base plate 51 that is close to and opposed to the rear surface of the lower surface of the container body 1, which is an identification area, and a rear end portion of the base plate 51. An RFID system responder (not shown) is fitted and accommodated by selectively supporting a wall plate 59 facing a part (identification region) and either the base plate 51 or the wall plate 59 via a holding mechanism. It is configured as a separate part from the holder 60. The bottom plate 50 is formed using polypropylene, polycarbonate, polybutylene terephthalate, or the like.
[0024]
As shown in FIG. 5, the base plate 51 of the bottom plate 50 is formed of a polygonal flat plate, and a substantially semi-oval-shaped avoiding groove 52 is cut out from the center of the front end portion to the rear. The bottom plate 50 is prevented from improperly interfering with the positioning tool 7 by being fitted to the rear positioning tool 7 from the rear. A plurality of cap holes 53 are formed in the base plate 51 in a round shape at a predetermined interval, and a processing apparatus identifies the specifications of the semiconductor wafer (for example, the number of semiconductor wafers, etc.) in the plurality of cap holes 53. The cap (not shown) is selectively inserted as necessary. At the left and right side portions of the base plate 51, attached portions 54 are disposed, respectively, and each attached portion 54 functions so as to be detachably fitted to the attaching portion 30A of the container body 1.
[0025]
As shown in FIGS. 2, 5, and 7, the mounted portion 54 includes, for example, a main body 55 that projects from the side portion of the base plate 51, and a stopper protrusion 56 that extends forward from the outer front portion of the main body 55. A flexible neck piece 57 extending from the front inner side of the main body 55 to the front and longer than the stopper projection 56, a drop-off prevention projection 58 formed in a substantially triangular shape outside the tip of the neck piece 57, and a stopper projection 56 and a notch space defined between the neck piece 57 and the neck piece 57. The stopper projection 56 and the drop-off prevention projection 58 are positioned inside the long piece of the holding rail 33 to sandwich the short piece, and the bottom plate 50 is firmly attached to the container body 1 by this clamping.
[0026]
The wall plate 59 of the bottom plate 50 is formed in a horizontally long rectangle, and a barcode area is formed on the facing surface that does not face the container body 1. In this bar code area, a bar code is attached, or the bar code is detachably inserted through a pocket.
[0027]
The holder 60 is formed into a hollow substantially semi-cylindrical shape, a substantially U-shaped cross section, etc. using a predetermined thermoplastic resin, and a plurality of drain holes are drilled at predetermined intervals on the back surface, side portions, etc. A plurality of drain holes improve drainage performance during cleaning, and allow visual recognition of the presence or absence of a responder and its breakage. Inside the holder 60, a drop-out preventing claw for restricting drop-out of the responder is provided. A plurality of flanges 4 project outward from the left and right sides of the opening surface of the holder 60, and each flange 4 is detachably locked to the holding mechanism.
[0028]
The transponder is generally formed into a cylindrical shape including an antenna, a transceiver, and a memory, and the surface is covered and protected by glass, synthetic resin, etc. It functions to store the processing in the process or the processing progress.
[0029]
As shown in FIG. 4 and FIG. 7, the crease 70 is provided on the surface of the guide rail 31 and the holding rail 33 and in the vicinity thereof in the region where the cleaning liquid tends to remain in the plurality of attachment portions 30 and 30A. -The surface roughness (Ra) based on 2001 is 10a (10 [mu] m) to 100a (100 [mu] m), preferably 30a to 70a, more preferably 50a (50 [mu] m). To improve.
[0030]
The reason why the average surface roughness (Ra) of the grain 70 is in the range of 10a to 100a is that when it is less than 10a, drainage after washing cannot be improved. On the other hand, when it exceeds 100a, the surface of the grain 70 is rubbed and detached, or particles are likely to adhere to the uneven part of the grain 70. Such a grain 70 is formed by applying electric discharge machining or sand blasting to a cavity of a container body mold and transferring it at the time of molding.
[0031]
According to the above configuration, the rough surface grain 70 that performs water repellency is formed in the region where the cleaning liquid tends to remain in the attachment portions 30 and 30A, so that the robotic handle 40 and the bottom plate 50 can be removed during the drying operation after cleaning. Accumulation of water droplets of the cleaning liquid on the attached portion 54 can be suppressed and prevented very effectively. Accordingly, the drying operation can be speeded up, and the remaining water droplets do not enter the inside of the container body 1 to increase the contamination. Furthermore, since it is not necessary to remove the robotic handle 40 and the bottom plate 50, which are separate parts, from the container body 1 and clean them individually, the extra work of attaching / detaching separate parts is unnecessary, and the workability and productivity are significantly improved. Can be achieved.
[0032]
In the above-described embodiment, the small bottom plate 50 is detachably fitted to the attachment portion 30A on the lower surface of the container body. However, the present invention is not limited to this. For example, the bottom plate 50 is formed in a large size and both side portions thereof are exposed from both side portions of the lower surface of the container main body 1, and opposing plates facing the side walls of the container main body 1 are provided on both side portions of the bottom plate 50, respectively. The manual handle 6 may be detachably attached to the counter plate.
[0037]
【The invention's effect】
As described above, according to the present invention, the wrinkle having an average surface roughness of 70 to 100 μm that performs water repellency is formed in a satin finish in the region where the cleaning liquid tends to remain in the mounting portion. It is possible to effectively suppress and prevent water droplets of the cleaning liquid from accumulating on the attachment parts of the robotic handle and the bottom plate. Accordingly, the drying operation can be speeded up, and the remaining water droplets are less likely to enter the inside of the container body to increase the contamination. In addition, there is no need to remove the robotic handle and bottom plate, which are separate parts, from the container body and clean them individually, eliminating the need for extra work of attaching and detaching separate parts, which improves workability and productivity. it can.
[Brief description of the drawings]
FIG. 1 is an overall perspective view showing an embodiment of a precision substrate storage container according to the present invention.
FIG. 2 is a bottom view showing a container body in an embodiment of a precision substrate storage container according to the present invention.
FIG. 3 is a plan view showing a container body in the embodiment of the precision substrate storage container according to the present invention.
FIG. 4 is a schematic cross-sectional explanatory view showing a mounting portion and a robotic handle in an embodiment of a precision substrate storage container according to the present invention.
FIG. 5 is a perspective explanatory view showing a bottom plate in an embodiment of the precision substrate storage container according to the present invention.
FIG. 6 is a bottom view showing a state in which the bottom plate is removed from the container main body in the embodiment of the precision substrate storage container according to the present invention.
FIG. 7 is an explanatory view showing the relationship between the container body and the bottom plate in the embodiment of the precision substrate storage container according to the present invention.
[Explanation of symbols]
1 Container body 6 Manual handle (separate parts)
10 Lid 30 Mounting part 30A Mounting part 31 Guide rail (Mounting part)
33 Holding rail (mounting part)
40 Robotic handle (separate parts)
42 legs (attachment)
50 Bottom plate (separate parts)
54 Mounted portion 55 Main body 56 Stopper projection 57 Neck piece 58 Fall-off prevention projection 70 Shrinkage

Claims (1)

A container body of a front open box for storing a precision substrate, a planar inverted U-shaped attachment portion provided on the exposed upper surface of the container body, and a planar inverted U-shaped attachment portion. A robotic handle with a pair of legs extending from the back side, a mounting part provided on the exposed lower surface of the container body, and a mounting plate attached to the mounting part via a mounted part, with the base plate close to the rear surface of the container body A precision substrate storage container provided with a bottom plate to be opposed to the substrate and cleaned by a cleaning liquid and dried.
The plane inverted U-shaped attachment portion is formed between a pair of guide rails that are opposed to each other on the upper surface of the container body and extend in the front-rear direction of the container body, and a front end portion of the pair of guide rails. And a butting wall that contacts and fixes the robotic handle, and a pair of guide rails are inclined so that the width gradually decreases from the rear side of the container body toward the front side. In addition, each guide rail is bent to have an inverted L-shaped cross section, and on the surface where the cleaning liquid is likely to remain, a wrinkle having an average surface roughness of 70 to 100 μm is formed in a satin-like shape to improve the drainability of the cleaning liquid.
Each leg of the robotic handle is bent to have an L-shaped cross section, and its free end is slidably fitted into the bent side of the guide rail,
The mounting portion is provided at a distance from the lower rear portion of the container main body and includes a pair of holding rails oriented in the front-rear direction of the container main body. Each holding rail is bent into an L shape so that the cleaning liquid can easily remain. On the surface, a wrinkle with an average surface roughness of 70 to 100 μm that improves the drainability of the cleaning liquid is formed in a satin shape, and the short piece of each holding rail is positioned on the front side of the container body,
The body of the part to be attached is formed on both sides of the base plate of the bottom plate, and the stopper protrusion extends forward from the outside of the front of each body, and a notch space is formed between the front of each body and the stopper protrusion. The flexible neck piece forming the head is extended forward, a drop-out preventing projection is formed outside the tip of the neck piece, and the short piece of the holding rail is sandwiched between the stopper projection and the drop-out preventing projection of the neck piece. A precision substrate storage container characterized by that.

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