JP4334992B2 - PCB storage case - Google Patents

Description

  The present invention relates to a substrate storage case for storing a mask substrate vertically in order to store and transport a mask substrate such as a photomask or a photomax blank used for manufacturing a semiconductor element or a liquid crystal display element. The present invention relates to a substrate storage case that stores mask substrates one by one.

  Conventionally, as a substrate storage case for storing a mask substrate in a vertical position with the main surface of the mask substrate perpendicular to the bottom surface of the substrate storage case, a storage groove for storing a plurality of glass substrates aligned at regular intervals An inner casing (also referred to as an inner container or an inner box), a container main body (also referred to as an outer container or a bottom) having an opening at the top for accommodating the inner casing, and an opening of the outer container. A lid body (also referred to as a lid or an upper lid) that closes and a substrate pressing member that is attached to the inner surface of the lid body and holds the glass substrate from above is known (for example, , Patent Document 1 and Patent Document 2). Since the above-described vertically placed substrate storage case can store a plurality of mask substrates in one case at the same time, it is frequently used in the manufacturing process of photomask blanks, photomasks and the like.

  In the substrate storage case described in Patent Document 1, a large number of elastic ribs are arranged side by side at regular intervals on the inner surface of the container body that faces the inner casing, and a large number of storage grooves for mask fitting are arranged. A substrate storage case that is formed and has an opening window that communicates outwardly with the storage groove, and a mask locking projection wall on the slope is formed on the bottom receiving surface on which the mask lower surface of the storage groove is placed. While facing and arranging so that it may become the V-shaped slope which spreads upwards, the receiving surface which contacts a mask side surface is formed in the curved surface which protrudes inward.

  The substrate storage case described in Patent Document 1 tends to generate particles at the contact portion when the central opening window and the main surface of the mask substrate come into contact with each other due to horizontal vibration and shock. In some cases, foreign matter may adhere to the surface. Also, if the amount of protrusion of the curved surface is increased to prevent rattling of the mask substrate, or if the size of the storage groove is set to the limit of the size of the mask substrate, the corner of the mask substrate will hit the rib forming the storage groove. There was a problem that it became difficult to put in the storage groove and it became difficult to take out. In addition, there is a problem that the side surface of the mask substrate and the inner box are rubbed at the time of loading and unloading, and the generation of particles increases and the mask substrate is contaminated.

The substrate storage case described in Patent Document 2 is intended to solve the problems described in Patent Document 1, and a pair of side walls and side walls in which storage grooves for storing glass substrates are formed at regular intervals. A pair of end walls for connecting the container, a container main body having an opening for receiving the middle collar, a lid for closing the opening of the container main body, and the glass substrate attached to the lid for contacting with each glass substrate In the substrate storage case having the substrate holder having the projecting piece, a bottom receiving portion that is in contact with the lower surface of the glass substrate is formed at the lower end portion of the storage groove of the intermediate collar, and the storage groove, the bottom receiving portion, and the substrate pressing Each is a substrate storage case in which a pair of inclined surfaces for holding the glass substrate is formed, and a pair of inclined surfaces formed in each of the storage groove, the bottom receiving portion, and the substrate presser of the substrate storage case Is the edge of the mask substrate A storage case are formed at the same angle of inclination and the chamfer which is formed on the part.
Japanese Utility Model Publication No. 3-81945 JP 2003-264225 A

  However, since the substrate storage case described in Patent Document 2 is in contact with the mask substrate by the ridgeline of the mask substrate, a pair of inclined surfaces formed in each of the storage groove, the bottom receiving portion, and the substrate presser of the substrate storage case, When the mask substrate is put in and out, it rubs against the ridgeline of the mask substrate, the inner storage groove, the bottom receiving part and the substrate pressing resin are scraped to generate particles, and the generated particles become foreign matters and adhere to the mask substrate. The problem of ending up still occurred. In addition, as shown in Patent Document 1 and Patent Document 2, a case for storing a plurality of sheets is conventionally used in a substrate storage case for storing a mask substrate in a vertical position, and when a lid is opened and closed multiple times. There is a problem that foreign matters such as dust are likely to be generated, entrained foreign matters and the like adhere to the surface of the mask substrate, resulting in defective appearance defects in the photomask and the like.

In recent years, with the miniaturization and high density of patterns such as photomasks, the demand for higher quality has increased, and accordingly, mask substrate storage cases such as photomasks also have low dust generation, damage prevention, contamination prevention, Characteristics such as ease of handling have been strongly demanded.
Furthermore, with the increasing use of chemically amplified resists in the photomask manufacturing process, the sensitivity of chemically amplified resists greatly depends on the surrounding environment from resist coating to development. In the substrate storage case, the exposure sensitivity is likely to change due to the influence of the environment outside the case due to the loading and unloading of the substrate multiple times, causing a problem in forming a fine resist pattern. When one mask substrate is to be stored vertically, the above-mentioned problem is also used as a case for storing a plurality of the above-mentioned masks, and is less susceptible to the occurrence of foreign matter such as dust. There is also a problem that there is no suitable substrate storage case dedicated to the mask substrate.

  In the present invention, in the above situation, a mask substrate such as a photomask is stored vertically, and the substrate may be damaged during storage and transportation, or may be contaminated by internal dust generation in the case. It is possible to provide a substrate storage case that is easy to handle, prevents dust generation when the substrate is taken in and out, and is excellent in cleaning and drying of the case itself. Further, the present invention provides a substrate storage case having a high degree of sealing that is not affected by the environment outside the case so that exposure sensitivity is stabilized when resist-coated blanks coated with a chemically amplified resist are stored.

According to a first aspect of the present invention, there is provided a substrate storage case that includes a middle casing for storing one mask substrate in a vertical position, a container body having an opening and accommodating the middle casing, and the opening of the container body. In a substrate storage case having a lid that closes a portion and a substrate presser that is attached to the lid and is in contact with the mask substrate, both ends inside the lower end portion of the intermediate collar form inclined surfaces, and the inclined surfaces are spherical The mask substrate is supported at the four corners of the lower part of the mask substrate by being in contact with the inclined surfaces at both ends inside the lower end of the middle collar at four points, and is attached to the two ends on the inner side of the upper part of the lid. The two substrate holders formed have an inclined surface, and the surface of the substrate holder in contact with the mask substrate is spherical, and by closing the lid, the mask substrate has four corners on the top of the mask substrate. In the tilt of the substrate holder It is obtained so as to be fixed against a plane and four points.

In the substrate storage case according to claim 2 of the present invention, two detachable locking ribs for fitting with the container main body are formed on the two opposite side surfaces on the outer side of the lower end portion of the middle collar. It is what you have.

According to a third aspect of the present invention, there is provided a substrate storage case having a shape in which a lip of the intermediate mask substrate storage port is widened toward the outside.

The substrate storage case according to claim 4 of the present invention is such that the position of the intermediate mask substrate storage port is above the position of the opening of the container body.

In the substrate storage case according to claim 5 of the present invention, a part of the two main wall surfaces facing each other of the middle casing is removed, and a basin is provided.

In the substrate storage case according to claim 6 of the present invention, an O-ring is fitted into a mating portion of the container main body to be combined with the lid, and the container main body is closed with the lid, and then a latch is used. The lid and the container body are fixed so that they can be sealed. By sealing, outside air is shut off and the environment inside the case can be maintained.

The substrate storage case according to claim 7 of the present invention is such that the mask substrate is a photomask blank coated with a chemically amplified resist.

The substrate storage case according to claim 8 of the present invention is such that a removable stand is provided at the lower part of the container body of the substrate storage case.

  According to the substrate storage case of the present invention, since the mask substrate is supported and fixed only at the four corners of the lower part of the substrate and the four points of the upper part of the substrate, the mask substrate has few supporting parts, and the photomask It is possible to store the mask substrate such as when it is stored and transported, and it is prevented that the substrate is damaged or contaminated by dust generated inside the case. It has the effect of reducing dust generation such as loading and unloading. Furthermore, the substrate storage case of the present invention is easy to handle, and is divided into each part of the container main body, the lid, the middle, and the substrate holder, so that the case itself has excellent cleaning and drying properties. Is obtained. In addition, according to the substrate storage case of the present invention, when storing resist-coated blanks coated with a chemically amplified resist, since it is not affected by the environment outside the case by improving the sealing property, exposure sensitivity is stabilized and high quality, There is an effect that a high-precision mask can be obtained.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a perspective view showing an embodiment of a substrate storage case according to the present invention. In order to make it easy to understand, main components are shown separated from actual ones. As shown in FIG. 1, the substrate storage case 1 includes a middle collar 3 that accommodates one mask substrate 2, a container body 5 that has an opening 4 and accommodates the middle collar 3, and the opening of the container body 5. 4 has a lid 6 that closes 4 and two substrate holders 7 that are attached to the lid 6 and are in contact with the mask substrate 2.

The mask substrate 2 stored in the substrate storage case 1 of the present invention is a photomask blank coated with a resist such as a photomask (also referred to as a reticle), a photomask blank, or a chemically amplified resist used for manufacturing a semiconductor element or a liquid crystal display element. A light shielding film is provided on the main surface of the substrate mainly made of a glass substrate such as low thermal expansion glass or quartz glass. The main surface of the mask substrate 2 on which the light-shielding film and the pattern are formed and the back surface opposite to the main surface are square, the four side surfaces are rectangular, and the mask substrate has eight corners. The external dimensions of the substrate size are determined by the standard. For example, a typical example is a 6025 substrate (6 × 6 × 0.25 inch (thickness)).
Further, as the mask substrate 2 in the present invention, by increasing the thickness of the substrate storage case 1, a mask substrate with a pellicle can also be stored.

FIG. 2 is a schematic side view showing a state in which the cover body 6 of the substrate storage case 1 of the present invention is removed, and the container body 5 that stores the intermediate casing 3 and the mask substrate 2 stored in the intermediate casing 3 appear. It is. Mask substrate 2, four corner portions 8a of the lower mask substrate (2 places in FIG. 2 drawing near side is shown.) And the inclined surface 9 middle of the lower end portion inside the cage 3 at both ends spherical in the 4 It is supported by contact with dots. The inclined surface 9 of the inner bottom portion of the cage in supporting the four corners 8a of the substrate, have shifted also the same shape in symmetrical.
FIG. 3 is a side view showing a state in which the container body 5 shown in FIG. 2 is closed by the lid body 6 and the container body 5 and the lid body 6 are fixed by the latch 14. The two substrate holders 7 attached to both ends inside the top surface portion of the lid body 6 form a spherical inclined surface. By closing the lid body 6, the mask substrate 2 has four corner portions 10 at the upper portion of the mask substrate. (2 places in FIG. 3 drawing near side is shown.) are fixed in contact with the spherical inclined surfaces and four points of the substrate presser 7 in.

The support part of the substrate storage case of the present invention that supports the mask substrate 2 of the present invention will be described in more detail.
4 is a schematic side sectional view taken along the line AA of the substrate storage case 1 shown in FIG. 1, and FIG. 5 is an enlarged schematic view of the substrate support portion of FIG. 6 is a schematic side sectional view taken along the line BB of the substrate storage case 1, and FIG. 7 is an enlarged schematic diagram of the substrate support portion of FIG.
As shown in FIGS. 4 and 6, both end portions inside the lower end portion of the middle collar 3 form a sloped surface 9 having a spherical shape, and by inserting the mask substrate 2 into the middle collar 3, the mask substrate 2 without contacting the wall surface of Chukago 3, to reach the inclined surface 9 of the lower portion of the mask substrate 2 to form a lower portion inside the spherical surface of the middle basket 3, medium in four corners 8 of the lower mask substrate It is supported at four points in contact with the inclined surfaces 9 that are spherical at both ends inside the lower end of the flange 3. The inclined surface 9 that is spherical is preferably set to have a radius of curvature R4.

Next, FIG. 8 is a schematic top view showing one of the two substrate holders 7 attached to the upper inner both ends of the lid 6 of the substrate storage case 1. FIG. It is a side surface schematic diagram. FIG. 10 is a side cross-sectional view taken along the line CC of the substrate holder 7 of FIG. 8 and shows a state in which a corner of the upper part of the mask substrate is being pressed. FIG. 11 is a side cross-sectional view taken along the line DD of the substrate press shown in FIG. 8 and shows a state in which a corner of the upper portion of the mask substrate is pressed. The two substrate holders 7 have the same shape and the same dimensions. The substrate holder 7 is provided at both ends of the top surface of the lid body 6 or at positions on the side surfaces close to the top surface. The surface of the substrate holder 7 in contact with the mask substrate 1 forms a spherical surface 10, and by closing the lid 6, the mask substrate 2 has four points with the spherical surfaces 10 of the two substrate holders 7 at the upper corners of the mask substrate. Fixed in contact with. The substrate holder 7 having a spherical shape preferably has a radius of curvature R4.

  8 to 11, the guide portion 11, which is an inclined portion following the spherical surface 10 of the substrate holder 7, has a function of making it easy to grasp the corner portion of the upper side surface of the mask substrate 1 and guiding it to the spherical surface 10. Therefore, it is preferable that each guide portion 11 has a spherical shape larger than the spherical surface 10. The lever 12 of the substrate holder 7 connects the fixed portion 13 and the upper portion of the spherical surface 10, and the joint portion with the spherical surface 10 is connected so as to move within a certain range, and the mask substrate 2 is in contact with the substrate holder 7. It also has a function as a cushion at the time, and prevents the mask substrate 2 from being damaged by an unnaturally strong force, and when the lid body 6 is closed, the rigidity of the lever 12 gradually increases the mask substrate. The upper part of 2 moves to the middle of the substrate holder 7 so that the mask substrate 2 is fixed. The fixing part 13 of the substrate holder 7 is attached to the attachment parts of the substrate holder provided at both inner ends of the top surface of the lid 6 or the side surface close to the top surface. The fixing part 13 has a function that can be attached to and detached from the attachment part of the substrate holder. For example, the fixing part 13 can be slidably attached to the attachment part of the substrate holder and can be provided detachably.

In the present invention, by closing the lid 6, as shown in FIGS. 10 and 11, the mask substrate 2 has two points each of two substrate pressers 7 that form a spherical surface at the four corners 8b on the mask substrate. In order to fix the mask substrate 2 more firmly, as shown in FIG. 3, an O-ring is fitted into a portion of the container main body 5 to be fitted with the lid body 6, and the lid body portion is fixed. Further, a protrusion for receiving the latch is provided at each of the mating portions of the container body, and the lid body 6 is closed. It is preferable to seal. In the substrate storage case 1 of the present invention, by providing an O-ring at the portion to be combined with the lid 6 of the container body 5 and using the latch 14, the case can be sealed and the influence of the external environment can be eliminated. As a result, unlike the conventional storage case, it is possible to eliminate the need to attach the lid and the container body together with a tape or the like after the substrate is stored.
Further, in the present invention, the O-ring also serves as a cushioning material when the lid and the container body are overlapped, thereby preventing an unnatural force from being applied to the mask substrate. As the O-ring, it is possible to use a fluorine-based rubber, and examples thereof include a product named “Fluoroplus” (manufactured by Nichias).

  Further, in the substrate storage case 1 of the present invention, when storing a resist-coated blank coated with a chemically amplified resist, etc., after storing the substrate in the substrate storage case 1, an inert gas such as clean nitrogen gas is stored in the case. A substrate that can be stored in a state in which the exposure sensitivity of a resist such as a chemically amplified resist is stabilized without being affected by the external environment if the inside is filled or the lid 6 is closed and hermetically fixed by the latch 14 in the above environment. It becomes a storage case.

As shown in FIGS. 1 to 4, two detachable locking ribs 15 for fitting with the container body 5 are formed on the two opposite side surfaces on the outer side of the lower end portion of the intermediate collar 3 in the present invention. The intermediate rib 3 is fixed by fitting the engagement rib 15 into the engagement portion 16 of the engagement rib provided on the container body 5. The shape and size of the locking rib 15 can be appropriately set according to the size of the mask substrate.
Further, the middle collar 3 in the present invention is provided with one or several locking projections on the inner side of the bottom surface of the container body as in the conventional middle collar locking method, and on the outer bottom surface of the opposed middle collar. It is also possible to provide one to several locking recesses or cuts, and to fit the inner collar into the container body. Furthermore, in order to more firmly fix the center collar to the container body, the above-described locking method using the locking rib 15 on the side surface of the middle collar of the present invention and the conventional latching method for the bottom surface of the middle collar are used in combination. Is also possible.
In the present invention, when cleaning the substrate storage case 1, the intermediate collar 3 can be removed and the locking rib 15 can also be removed and cleaned, so that the shape of the substrate storage case 1 can be simplified, It is easy to dry, and cleaning and drying efficiency are also improved. Further, since the substrate storage case 1 is consumed while being used many times, it is possible to replace only the parts that have become unusable.

  Further, as shown in FIG. 1, in the middle rod 3 according to the present invention, a part of two opposing main wall surfaces of the middle rod 3 is removed, so that dust hardly remains in the middle wall and is easy to clean. It is preferable to have a structure in which the inner flange 3 is reinforced by providing a small portion 17 to prevent warpage or deformation of the intermediate flange 3. Although the short 17 may be unidirectional, in order to increase the strength of the intermediate collar 3, it is more preferable to cross it symmetrically in two directions.

  Moreover, as shown in FIGS. 1-3, it is preferable to make the edge of the mask board | substrate storage port 18 of the middle collar 3 in this invention into the shape which spreads outward toward the outer side, and the mask board | substrate 2 is taken in and out. It is easy and the mask substrate 2 is difficult to come into contact with the intermediate collar 3, so that the generation of dust due to the contact can be suppressed, and foreign matter adhesion to the substrate can be prevented. 1 to 3 exemplify the case where the rim of the storage port 18 is widened in a curved shape toward the outside, but if the lip is widened toward the outside, Alternatively, it may be a straight and divergent shape.

  Further, as shown in FIG. 2, it is preferable that the position of the mask substrate storage port 18 of the middle collar 3 in the present invention is above the position of the opening 4 of the container body 5. In the substrate storage case, dust is likely to be generated from the portion where the container body and the lid are brought together when the lid is opened and closed. Therefore, in order to prevent dust generated when the lid is opened and closed from adhering to the mask substrate, the present invention is provided. As shown in FIG. 4, by making the position of the mask substrate storage opening 18 higher than the position of the opening 4 of the container body, it is possible to prevent surrounding dust from being involved and causing appearance defects due to foreign matter adhering to the mask substrate. Is done.

  In the present invention, the vertically placed substrate storage case 1 can stand alone, but when there is a risk of damaging the expensive mask substrate when the case is inadvertently tilted, It is preferable to provide a removable stand at the bottom of the container body 5 of the substrate storage case 1. As the stand material, plastic or metal can be used, and the shape of the stand can be set as appropriate.

  Further, since the substrate storage case 1 of the present invention is a vertical substrate storage case, it can be arranged in a regular manner like a book on a mask storage shelf or the like, and if a bar code label or an IC tag is attached to the outer surface of the case In addition, it is possible to manage products for each case, and by carrying out automatic loading / unloading of cases from the shelf, automatic transfer of cases, and automatic loading / unloading of boards from / to the case, manual work is reduced and quality problems due to dust are reduced. In addition, the quality and productivity can be improved, and it can contribute to the production, transport and storage of high quality masks.

The material of the middle shell 3, the container body 5, and the lid 6 of the substrate storage case 1 of the present invention is good in that it has impact resistance, low dust generation, and light resistance, and has good cleaning and drying properties and can be reused. . Examples thereof include polyethylene, polypropylene, polycarbonate, polyacetal, polybutylene terephthalate, and ABS resin. Further, since the substrate holder 7 is required to have low dust generation and flexibility, polyethylene, polypropylene, or the like is preferable.
In the substrate storage case 1 of the present invention, the material of the inner casing 3 and the outer container body 5 and the lid 6 are separated, and a soft and slippery material is used for the intermediate casing without directly applying external impact to the substrate. Thus, it is possible to further improve the characteristics as a substrate storage case.
Further, if the substrate storage case is charged during transportation, etc., the photomask pattern is destroyed by the discharge phenomenon or the substrate is contaminated by adsorbing dust in the air, so the inner casing 3, the container body 5, the lid body 6, It is also a preferred form that the substrate holder 7 is formed of a conductive plastic. As the conductive plastic, for example, a resin called trade name Bayon (manufactured by Kureha Chemical Industry Co., Ltd.) or Novalloy (manufactured by Daicel Polymer Co., Ltd.) having a structure in which rubber particles having a low electrical resistivity are dispersed in a hard resin can be used.
Furthermore, the entire substrate storage case can be a colored lid that shields ultraviolet rays. Further, it is also preferable that only the lid is a transparent lid or a colored lid that blocks ultraviolet rays and transmits visible light so that the contents of the case can be easily distinguished from the outside without opening the lid. It is a form.

  The substrate storage case 1 of the present invention does not cause the problem of sink marks at the time of resin molding of the storage case, and it is difficult for dust to collect at the corner portion and the concavo-convex portion of the storage case. It is more preferable to have a structure in which the uneven portion is rounded. Moreover, in order to raise the intensity | strength of a case, as shown in FIGS. 1-3, it is also a preferable form to provide the container main body 5 and the cover body 6 with the trapezoid-shaped recessed part 19, for example.

  As described above, according to the present invention, the mask substrate is not vertically stored but supported by the substrate surface, a part of the surface, or the ridgeline as in the conventional substrate storage case. By supporting at the upper and lower eight corners, the number of contact portions between the support portion and the substrate is reduced as much as possible, and the chance of generating dust is reduced. In the substrate storage case 1 of the present invention, the substrate holder 7 holds the substrate and has a buffering effect, so that the corners of the mask substrate are not damaged, and dust generation from the portion supporting the substrate is also suppressed. Thus, a high-quality and inexpensive substrate storage case is provided.

Next, specific examples of the above-described embodiment will be described.
In order to produce a vertical substrate storage case dedicated to a 6-inch photomask (outer dimensions 6 × 6 × 0.25 (thickness) inches), the container body has an outer dimension of 210 × 50 × 100 (height) mm. A mold having a resin thickness of 4 mm, a lid having an outer dimension of 210 × 50 × 80 (height) mm, and a resin thickness of 3 mm was produced using ABS resin. A middle die was manufactured as a 175 × 30 × 120 mm mold, and the inner side of the lower end portion was formed into a spherical shape with a curvature radius of 4 mm, and a polyethylene resin was used with a resin thickness of 3 mm. Moreover, the rib for latching a middle collar to a container main body was produced with polypropylene resin. The substrate pressing was made of a mold having the shape shown in FIGS. 8 to 11 having a spherical surface in contact with the mask substrate, and the inclined surface of the substrate pressing was made into a spherical shape with a curvature radius of 4 mm, and made of polypropylene resin. The latch used was a polypropylene resin, and the O-ring was made of fluoro rubber.

  Next, each component of the substrate storage case was assembled to prepare a storage case. A locking rib was fitted on the outer side of the lower end of the middle collar, and then the middle collar was fitted into the container body with the retaining rib and fixed. Two substrate holders were slid and attached to both ends inside the top surface of the lid. An O-ring was fitted into a portion to be fitted with the lid of the container main body, the container main body was closed with the lid, and stopped with a latch to form a substrate storage case.

  Next, the lid of the above-mentioned substrate storage case is opened, and a 6-inch photomask blank (external dimensions: 6 × 6 × 0.25 (thickness) inch) coated with an electron beam resist is applied to the middle of the coating surface. It was kept vertical and placed vertically. The four corners at the lower part of the mask substrate were in contact with the spherical inclined surfaces at both ends inside the lower end of the middle collar at four points, and were supported at the same time as positioning.

Next, by closing the lid, the mask substrate was fixed at the four corners on the top of the mask substrate in contact with the spherical inclined surface of the substrate press attached to the lid at four points. Furthermore, the mask substrate was firmly fixed in the substrate storage case by fixing the lid and the container body using a latch. That is, the mask substrate was supported and fixed securely at a total of eight corner portions on the lower and upper sides of the mask substrate.
The substrate storage case of the present invention has reduced dust generation compared to the conventional storage case, and stable resist sensitivity during electron beam drawing or laser drawing when storing blanks coated with chemically amplified resist. As a result, high-accuracy and high-quality masks can be manufactured with good yield. Further, since each component of the substrate storage case is removable, the case can be easily cleaned.

It is a perspective view which shows one Embodiment of the board | substrate storage case of this invention. It is a side view which shows the state which opened the board | substrate storage case of one Example of this invention. It is a side view which shows the state which closed the substrate storage case of one Example of this invention. It is side surface sectional drawing in the AA of the center of the board | substrate storage case shown by FIG. FIG. 5 is an enlarged schematic view of a mask substrate support portion shown in FIG. 4. It is side surface sectional drawing in the BB line of the center of the board | substrate storage case shown by FIG. FIG. 7 is an enlarged schematic view of a mask substrate support portion shown in FIG. 6. It is a top view of the board | substrate holding | maintenance of one Example of this invention. It is a side view of the board | substrate holding | suppressing shown in FIG. It is side surface sectional drawing in CC line of the board | substrate holding | suppressing shown in FIG. 8, and shows the state which is pressing down the corner | angular part of a mask board | substrate upper part. It is side surface sectional drawing in the DD line | wire of the board | substrate holding | suppressing shown in FIG. 8, and shows the state which is pressing down the corner | angular part of a mask board | substrate upper part.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Substrate storage case 2 Mask substrate 3 Middle 4 Opening 5 Container body 6 Lid 7 Substrate holder 8a Substrate lower corner 8b Substrate upper corner 9 Inclined surface 10 Substrate retaining spherical surface 11 Guide portion 12 Lever 13 Substrate retainer Fixing portion 14 Latch 15 Locking rib 16 Locking rib fitting portion 17 Fast 18 Substrate storage port 19 Recess

Claims (8)

A middle collar for storing one mask substrate vertically, a container main body having an opening and accommodating the middle collar, a lid for closing the opening of the container main body, and attached to the lid In a substrate storage case having a substrate holder in contact with the mask substrate, both ends inside the lower end portion of the middle collar form an inclined surface , the inclined surface is spherical, and the mask substrate has four lower portions of the mask substrate. The two substrate holders, which are supported at the corners by being in contact with the inclined surfaces at both ends inside the lower end portion of the middle collar at four points, and attached to the two ends at both ends inside the lid body, form inclined surfaces, The surface of the substrate retainer that contacts the mask substrate is spherical, and the mask substrate is fixed in contact with the inclined surface of the substrate retainer at four points at the four corners of the upper portion of the mask substrate by closing the lid. It is characterized by being Substrate storage case. 2. The substrate storage according to claim 1, wherein two detachable locking ribs for fitting with the container main body are formed on two opposite side surfaces on the outer side of the lower end portion of the intermediate collar. Case. 3. The substrate storage case according to claim 1, wherein an edge of the intermediate mask substrate storage port has a shape that widens toward the outside. Substrate storage case according to any one of claims 1 to 3, characterized in that the position of the mask substrate housing opening in said basket is above the position of the opening of the container body. Some of the two opposite main walls in said cage has been removed, the substrate storage case according to any one of claims 1 to 4, characterized in that Hasukai is provided. An O-ring is fitted in the mating portion of the container main body to be combined with the lid, and after closing the container main body with the lid, the lid and the container main body are fixed using a latch, and can be sealed. The substrate storage case according to any one of claims 1 to 5 . Substrate storage case according to any one of claims 1 to 6, wherein the mask substrate is a photomask blank coated with a chemically amplified resist. The substrate storage case according to any one of claims 1 to 7 , wherein a detachable stand is provided at a lower portion of the container body of the substrate storage case.

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