SG151129A1 - Container for reticle - Google Patents

Container for reticle

Info

Publication number
SG151129A1
SG151129A1 SG200708881-8A SG2007088818A SG151129A1 SG 151129 A1 SG151129 A1 SG 151129A1 SG 2007088818 A SG2007088818 A SG 2007088818A SG 151129 A1 SG151129 A1 SG 151129A1
Authority
SG
Singapore
Prior art keywords
base
supporting elements
container
rounded
reticle
Prior art date
Application number
SG200708881-8A
Inventor
Li-Wei Liao
Li-Yin Chen
Original Assignee
E Sun Prec Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by E Sun Prec Ind Co Ltd filed Critical E Sun Prec Ind Co Ltd
Priority to SG200708881-8A priority Critical patent/SG151129A1/en
Publication of SG151129A1 publication Critical patent/SG151129A1/en

Links

Abstract

CONTAINER FOR RETICLE A container includes a base, two supporting elements attached to the base along an edge of the base, two other supporting elements attached to the base along an opposite edge of the base and a covering device for covering the base. A flat object can be supported on the supporting elements. Each of the supporting elements includes a primary rounded tooth and a shorter auxiliary rounded tooth separated from the primary rounded tooth. The primary rounded teeth are located further from one another than the auxiliary rounded teeth are from one another as shown in Fig. 2.
SG200708881-8A 2007-09-26 2007-09-26 Container for reticle SG151129A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG200708881-8A SG151129A1 (en) 2007-09-26 2007-09-26 Container for reticle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG200708881-8A SG151129A1 (en) 2007-09-26 2007-09-26 Container for reticle

Publications (1)

Publication Number Publication Date
SG151129A1 true SG151129A1 (en) 2009-04-30

Family

ID=40586508

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200708881-8A SG151129A1 (en) 2007-09-26 2007-09-26 Container for reticle

Country Status (1)

Country Link
SG (1) SG151129A1 (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4171740A (en) * 1976-09-07 1979-10-23 Monsanto Company Wafer packaging system
US5353934A (en) * 1992-08-06 1994-10-11 Dai Nippon Printing Co., Ltd. Substrate holding case
GB2293816A (en) * 1994-10-06 1996-04-10 Shinetsu Polymer Co Wafer carrier with cushioning means
US5743409A (en) * 1993-08-12 1998-04-28 Nikon Corporation Case for housing a substrate
US6108077A (en) * 1998-12-08 2000-08-22 Nanometrics Incorporated Sample support with a non-reflecting sample supporting surface
US6896602B2 (en) * 2001-08-03 2005-05-24 Clariant Finance (Bvi) Limited Wafer holding ring for chemical and mechanical polisher

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4171740A (en) * 1976-09-07 1979-10-23 Monsanto Company Wafer packaging system
US5353934A (en) * 1992-08-06 1994-10-11 Dai Nippon Printing Co., Ltd. Substrate holding case
US5743409A (en) * 1993-08-12 1998-04-28 Nikon Corporation Case for housing a substrate
GB2293816A (en) * 1994-10-06 1996-04-10 Shinetsu Polymer Co Wafer carrier with cushioning means
US6108077A (en) * 1998-12-08 2000-08-22 Nanometrics Incorporated Sample support with a non-reflecting sample supporting surface
US6896602B2 (en) * 2001-08-03 2005-05-24 Clariant Finance (Bvi) Limited Wafer holding ring for chemical and mechanical polisher

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