SG151129A1 - Container for reticle - Google Patents
Container for reticleInfo
- Publication number
- SG151129A1 SG151129A1 SG200708881-8A SG2007088818A SG151129A1 SG 151129 A1 SG151129 A1 SG 151129A1 SG 2007088818 A SG2007088818 A SG 2007088818A SG 151129 A1 SG151129 A1 SG 151129A1
- Authority
- SG
- Singapore
- Prior art keywords
- base
- supporting elements
- container
- rounded
- reticle
- Prior art date
Links
Abstract
CONTAINER FOR RETICLE A container includes a base, two supporting elements attached to the base along an edge of the base, two other supporting elements attached to the base along an opposite edge of the base and a covering device for covering the base. A flat object can be supported on the supporting elements. Each of the supporting elements includes a primary rounded tooth and a shorter auxiliary rounded tooth separated from the primary rounded tooth. The primary rounded teeth are located further from one another than the auxiliary rounded teeth are from one another as shown in Fig. 2.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG200708881-8A SG151129A1 (en) | 2007-09-26 | 2007-09-26 | Container for reticle |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG200708881-8A SG151129A1 (en) | 2007-09-26 | 2007-09-26 | Container for reticle |
Publications (1)
Publication Number | Publication Date |
---|---|
SG151129A1 true SG151129A1 (en) | 2009-04-30 |
Family
ID=40586508
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200708881-8A SG151129A1 (en) | 2007-09-26 | 2007-09-26 | Container for reticle |
Country Status (1)
Country | Link |
---|---|
SG (1) | SG151129A1 (en) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4171740A (en) * | 1976-09-07 | 1979-10-23 | Monsanto Company | Wafer packaging system |
US5353934A (en) * | 1992-08-06 | 1994-10-11 | Dai Nippon Printing Co., Ltd. | Substrate holding case |
GB2293816A (en) * | 1994-10-06 | 1996-04-10 | Shinetsu Polymer Co | Wafer carrier with cushioning means |
US5743409A (en) * | 1993-08-12 | 1998-04-28 | Nikon Corporation | Case for housing a substrate |
US6108077A (en) * | 1998-12-08 | 2000-08-22 | Nanometrics Incorporated | Sample support with a non-reflecting sample supporting surface |
US6896602B2 (en) * | 2001-08-03 | 2005-05-24 | Clariant Finance (Bvi) Limited | Wafer holding ring for chemical and mechanical polisher |
-
2007
- 2007-09-26 SG SG200708881-8A patent/SG151129A1/en unknown
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4171740A (en) * | 1976-09-07 | 1979-10-23 | Monsanto Company | Wafer packaging system |
US5353934A (en) * | 1992-08-06 | 1994-10-11 | Dai Nippon Printing Co., Ltd. | Substrate holding case |
US5743409A (en) * | 1993-08-12 | 1998-04-28 | Nikon Corporation | Case for housing a substrate |
GB2293816A (en) * | 1994-10-06 | 1996-04-10 | Shinetsu Polymer Co | Wafer carrier with cushioning means |
US6108077A (en) * | 1998-12-08 | 2000-08-22 | Nanometrics Incorporated | Sample support with a non-reflecting sample supporting surface |
US6896602B2 (en) * | 2001-08-03 | 2005-05-24 | Clariant Finance (Bvi) Limited | Wafer holding ring for chemical and mechanical polisher |
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