JP3709958B2 - Plate-shaped member storage container, inner box structure thereof, and injection mold for inner box molding - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention is stored in a plate-shaped member storage container suitable for use in storing or transporting a plurality of semiconductor wafers (hereinafter referred to as wafers), disks, or base plates. The present invention relates to a resin inner box structure used for orderly storing a plurality of plate-like members in a member storage container, and more particularly to an inner box structure of a plate-like member storage container in which the resin flow during molding is improved.
[0002]
[Prior art]
Wafers, which are one of the plate-like members, are obtained by thinly slicing a single crystal ingot such as silicon in the direction perpendicular to the axis, but this is thin and brittle, and extremely dislikes contamination. is necessary. In other words, in order to transport wafers in a clean state, the wafers are stored in a wafer storage container (transportation wafer shipping box) in a wafer storage in-line basket (inner box) and covered with an upper lid for airtightness. It is sealed in a state, and further, the outside of the wafer storage container is packed and cardboard packed together with a shock-absorbing material to reduce the impact, and then transported. As described above, the wafer storage container is generally composed of an outer box main body that stores the inner box and an upper lid that encloses the outer box main body. It is necessary to completely seal the joint between the lid and the upper lid. In such a wafer storage container, it is required to both fix the upper lid to the outer box body and to release the locking of the upper lid to the outer box body by a simple operation.
[0003]
Therefore, as a conventional plate-shaped member storage container capable of orderly storing and transporting a plate-shaped member such as a wafer, for example, a wafer storage container as shown in FIGS. 10 to 13 has been proposed. And explain briefly.
[0004]
As shown in the external perspective view of FIG. 10 and the exploded perspective view of FIG. 11, the wafer storage container includes an outer box 1 and an inner box 2 stored in the outer box 1. The outer box body 3 and the upper lid 4 that can be opened and closed with respect to the outer box body 3 are divided. The outer box body 3 is provided with a seal groove 5 having a U-shaped cross section over the entire periphery of the opening having a substantially rectangular shape in plan view, and a packing 6 as a seal member is fitted into the seal groove 5 and disposed. ing. The outer box body 3 is self-supporting with four vertical leg portions 3a provided at the corners of the four corners, and a main body recess portion 3b is provided between a pair of opposite side leg portions 3a, 3a. A hook lever member 7 is attached to the upper portion of the side wall to be formed, and a transport recess 3c used for carrying the storage container is provided on the other opposing side surface. Note that reference numeral 8 in the drawing denotes a wafer presser having a plurality of wafer presser grooves 8a, which is detachably attached to the inner side of the upper lid 4.
[0005]
As shown in FIG. 11, the inner box 2 is a container in which a resin molding material is injection-molded in order to store a plurality of wafers in an orderly manner. Inside the side walls 2a, 2a, a plurality of concave grooves 2b that are long in the vertical direction are provided at equal pitches. The concave groove 2b is in a positional relationship facing the wafer pressing groove 8a on the upper lid 4 side in a locked state, which will be described later, and one wafer W is formed in one set of the concave groove 2b and the wafer pressing groove 8a (see FIG. 12). ) Is stored and held. In addition, the inner box 2 is placed by the lower end portions of the inner box 2 being connected to the side walls 2 a and 2 a being leg portions 2 c and 2 c, and the lower end surface of the leg portion 2 c being in contact with the bottom surface portion of the outer case main body 3.
[0006]
Now, as shown in FIGS. 12 and 13, the hook lever member 7 described above is a member in which two parts of the hook portion 9 and the lever portion 10 are rotatably coupled. Engaging recesses 11 and 11 are formed in the upper portion of the hook portion 9 which is a substantially rectangular plate-like member, and the connecting shaft 13 of the lever portion 10 is pivotally supported by a bearing portion 12 provided in the lower portion. ing. On the other hand, the lever part 10 is a finger-shaped part which is provided with two shafts of a connecting shaft 13 and a mounting shaft 14 provided in parallel on a substantially rectangular plate-like member and partially extends downward near the center of the lower end part. 15 is provided. The mounting shaft 14 is a shaft for pivotally supporting the hook lever member 7 on the outer box body 3, and a pair of ribs 3d, 3d projecting from the opposing side walls of the outer box body 3 respectively. 16 and 16 are supported by both end portions penetrating each other.
[0007]
Then, a pair of engaging projections 17, 17 are provided on the upper lid 4 having a substantially rectangular shape in plan view on the peripheral edge side walls of the opening. Each of the engaging protrusions 17 and 17 has a shape that enters and engages with the engaging recesses 11 and 11 of the hook portion 9. Here, the engaging protrusions 17 and 17 have a rectangular shape that is slightly smaller than the engaging recess 11. Has an inclined surface that extends slightly outward. In addition, a seal groove 18 (see FIG. 10D) having a U-shaped cross section facing the seal groove 5 of the outer box body 3 is provided on the periphery of the opening of the upper lid 4. The size of the seal groove 18 is set so as to fit outside the both side walls forming the seal groove 5 of the outer box body 3. In addition, ribs are provided so as to protrude from the bottom surface of the seal groove 18 and the bottom surface of the seal groove 5 of the outer box body 3 facing the seal groove 18 over the entire circumference.
[0008]
Hereinafter, the operation of the above-described locking structure will be described together with the locking operation and the locking release operation by the hook lever member 7.
The cross-sectional view of FIG. 12 shows a locked state. In a state where the upper lid 4 is put on the upper end opening of the outer box main body 3 and locked, the seal groove of the upper lid 4 is formed in the outer box main body 3. The seal 6 is fitted to the outside of the seal groove 5 and is pressed between the ribs on both bottoms by pressing the packing 6 disposed in the seal groove 5 of the outer box body 3 so as to seal the seal 6. Thus, the intrusion of outside air from the joint between the upper lid 4 and the outer box body 3 into the storage container is prevented. In such a locked state, the lever part 10 and the finger hook part 15 are stored in the main body recessed part 3b between the leg parts 3a.
[0009]
In order to release the locked state of FIG. 12, a finger is inserted between the finger hook portion 15 and the side wall of the outer box body 3 and the lever portion 10 is pulled in the direction of arrow F. At this time, a sufficient operation space is secured between the finger hooking portion 15 that extends the lower end portion of the lever portion 10 and the side wall of the outer box body 3 that is inclined inward in accordance with the circular wafer shape. . When the lever portion 10 is pulled in this way, the locking portion changes in the order of (a) to (d) shown in FIG. 13, the locking state is released, and the upper lid 4 can be opened. Therefore, this will be briefly described. (A) is in a locked state, and the connecting shaft 13 of the lever portion 11 rotated with the mounting shaft 14 as a fulcrum pulls down the hook portion 9, and as a result, the upper surface of the locking recess 11. It can be seen that pulls down the locking projection 17. (B) shows a state in which the hook lever member 7 is slightly rotated in the releasing direction (counterclockwise) from the locking position with the mounting shaft 14 as a fulcrum. Being in contact with the bottom surface. (C) shows a state of further rotational movement, and the lower surface of the locking recess 11 pushes up the lower surface of the locking projection 17 by the operation of the lever portion 10, so that the upper lid 4 that has been in close contact with the joint is lifted. In this way, it is slightly separated from the outer box body 3. If it will be in such a state, as shown in (d), the upper box 4 can be easily lifted and opened by hand. In addition, when covering the top lid 4 and locking it to the outer box body 3, the operation may be performed in the reverse order of the above-described releasing operation. After the engaging recess 11 is hooked on the engaging protrusion 17, the lever portion 10 is moved. What is necessary is just to press toward an outer case main body side.
[0010]
As described above, in the above-described locking structure, the locking and unlocking operations can be easily performed only by operating the lever portion 10, and the upper lid 4 is lifted and adhered in the unlocking operation. Since the joint part in the state is cut off, particularly when there is a pressure difference between the inside and outside of the container, the adhesion of the joint part is released as much as possible so that the pressure difference is eliminated and the workability of opening the upper lid 4 is good. In the locked state, the hook lever member 7 holds the upper lid 4 in a lowered state, so that an appropriate compressive force can be maintained on the packing 6 even when a temperature change or a pressure change occurs. Good sealing performance can be secured.
[0011]
[Problems to be solved by the invention]
By the way, in the conventional inner box 2 described above, a gate for injection molding is provided inside the side surfaces of the leg portions 2c and 2c, that is, in the vicinity of G in FIG. In such a gate position, the molding material injected into the mold must immediately collide with the mold wall surface and change direction, so there is a large loss and the molding material is reliably injected to the end. This is disadvantageous for molding. Further, since the above-described conventional inner box 2 is placed in a surface contact state in which the lower end surfaces of the legs 2c and 2c are in contact with the bottom surface of the outer box body 3, the outer box body is affected by changes in atmospheric pressure. When the deformation occurs in 3, this surface contact may become unstable.
[0012]
The present invention has been made in view of the above-described problems of the prior art. By devising the gate position at the time of injection molding, the flow of the molding material in the mold is improved, thereby improving the moldability. It aims at providing the inner box structure of a plate-shaped member storage container.
Another object of the present invention is to provide an injection mold that enables an inner box structure of a plate-shaped member storage container having good moldability.
Furthermore, an object of the present invention is to provide a plate-shaped member storage container that can store an inner box in a stable state even when the outer box body is deformed.
[0013]
[Means for Solving the Problems]
The inner box structure of the plate-shaped member storage container according to the present invention is a plate-like structure in which an outer box main body and an upper lid that is put on and joined to an upper portion of the outer box main body are pressed by a locking means to keep an airtight state. An inner box structure of an injection-molded plate-shaped member storage container that is housed in a member storage container and systematically stores semiconductor wafers that are a plurality of plate-shaped members,
A leg that is open in the upper part of the rectangular in plan view, has a plurality of vertically long concave grooves formed inside a pair of opposing side walls, and has the lower end of the side wall placed on the bottom surface of the outer box body In what is part,
Each of the leg portions is a substantially rectangular plate-like member, and two concave portions are formed on the bottom surfaces of the leg portions, respectively, for a total of four concave portions, and there are gate marks at the time of injection molding in the concave portions. Is set to fit in the recess,
The recess of the leg is provided at a position shifted from a receiving seat that projects from the bottom of the outer box body and places the bottom of the leg of the inner box,
The above- mentioned problem has been solved by the fact that the leg portion is in a state of floating from the bottom surface of the outer box main body without the receiving seat, and the gate trace and the concave portion do not contact the bottom of the outer box main body .
An injection mold for molding the inner box of the plate-shaped member storage container in the present invention is an injection mold for integrally molding the inner box of the plate-shaped member storage container,
The fixed mold plate having the resin passage, the movable mold plate having the core portion projecting from the surface facing the fixed mold plate, and the pair of slide cores detachably provided on both side surfaces of the core portion. By defining a cavity having an inner box shape and arranging a gate communicating with the resin passage on the upper surface portion of the cavity corresponding to the bottom surface of the leg portion of the inner box as a substantially rectangular plate-shaped member, Solved the problem.
The plate-shaped member storage container in the present invention includes an inner box that stores a semiconductor wafer that is a plate-shaped member,
An outer box body that houses the inner box;
An upper lid that is put on and joined to the upper portion of the outer box body;
Locking means that presses between the outer box main body and the upper lid to maintain an airtight state,
The inner box has a rectangular opening in plan view, and a plurality of long grooves in the vertical direction for orderly storing semiconductor wafers, which are a plurality of plate members, are formed inside a pair of opposing side walls, respectively, The lower end portion of the side wall is a leg portion placed on the bottom surface portion of the outer box body,
Both of the leg portions are substantially rectangular plate-like members, and there are plate marks that are set so that there is a gate mark at the time of injection molding in a recess provided on the bottom surface of these leg parts, and the gate mark is set in the recess. In the member storage container,
Protruding a receiving seat for placing the bottom of the leg of the inner box on the bottom of the outer box main body, and providing the receiving seat at a position shifted from the recess of the leg,
The receiving seat is protruded at four positions on the bottom surface of the outer box body corresponding to both ends of a pair of opposing leg portions,
The above-mentioned problem has been solved by the fact that the leg portion is in a state of floating from the bottom surface of the outer box main body without the receiving seat, and the gate trace and the concave portion do not contact the bottom of the outer box main body.
The first aspect of the present invention is a plate-shaped member storage container that keeps an airtight state by pressing between an outer box body and an upper lid that is put on and joined to the upper part of the outer box body by a locking means. Is an inner box structure of an injection-molded plate-like member storage container that neatly accommodates a plurality of plate-like members, and the upper portion of the rectangular in plan view is open and inside a pair of opposite side walls A plurality of concave grooves that are long in the vertical direction are formed, and the lower end portion of the side wall is a leg portion placed on the bottom surface portion of the outer box body, and a convex portion is formed on the bottom surface of the leg portion. It is characterized by being. In this case, the convex portion is a gate mark protruding from a concave portion provided on the bottom surface of the leg portion.
[0014]
Further, the second invention has an opening in the upper part of the rectangular in plan view, a plurality of long grooves in the vertical direction are formed inside the pair of opposite side walls, and the lower end of the side wall is formed on the outer box body. An injection mold for integrally molding an inner box of a plate-like member storage container as a leg part placed on the bottom part,
The fixed mold plate having the resin passage, the movable mold plate having the core portion projecting from the surface facing the fixed mold plate, and the pair of slide cores detachably provided on both side surfaces of the core portion. A cavity having an inner box shape is defined as a substantially rectangular plate-shaped member. The gate is connected to the resin passage on the upper surface of the cavity corresponding to the bottom surface of the leg of the inner box. It is characterized by being disposed .
[0015]
Further, according to a third aspect of the present invention, the locking means presses between the outer box main body that stores the inner box that stores the plate-like member and the upper lid that is put on and joined to the upper portion of the outer box main body so as to be airtight. The inner box has a rectangular opening in plan view, the inner box has a plurality of longitudinally recessed grooves formed inside the pair of opposite side walls, and the lower end of the side wall is the outer box body. In the plate-shaped member storage container in which the gate mark at the time of injection molding exists in the concave portion provided on the bottom surface of the leg portion as the leg portion placed on the bottom surface portion of
A receiving seat for placing the bottom surface of the leg portion of the inner box is projected on the bottom surface of the outer box main body, and the receiving seat is provided at a position shifted from the concave portion of the leg portion.
In this case, it is preferable that the receiving seat protrudes at four positions on the bottom surface of the outer box main body corresponding to both ends of the pair of opposing leg portions.
[0016]
The operation of the present invention will be described below. In the first invention of the present invention , a recess is provided on the bottom surface of the leg portion of the inner box, and there is a gate mark at the time of injection molding in the recess, so that the injection is made from the gate at the position where such a gate mark is formed. The molding material can flow almost straight along the mold cavity forming the side walls and is not immediately forced to change direction. Moreover, in 2nd invention in this invention , the metal mold | die for injection molding which can carry out the injection molding of the inner case by 1st invention is provided. And in 3rd invention in this invention , since the receiving seat protruded from the bottom face of the outer box main body, and this receiving seat was set in the position shifted from the gate position of the leg bottom face, the inner box is the outer box main body. It is supported by the receiving seat in a state of slightly floating from the bottom surface of the outer box main body. In particular, if both ends of the pair of legs are supported by four receiving seats, stable support is possible even when deformation occurs.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings. The embodiments described below are only a few examples of the present invention, and the present invention includes modifications such as design changes without departing from the scope of the claims.
[0018]
1 to 4 show the structure of the inner box 20 according to the present invention. FIG. 1 is a front view seen from the outside of the side wall 20a, FIG. 2 is a plan view, FIG. 3 is a left side view of FIG. It is the figure which expanded the A section of FIG. The overall configuration of the inner box 20 is substantially the same as that of the inner box 2 of FIG. 11 described in the prior art, and an upper surface 21 having a substantially rectangular shape in plan view is opened to receive the wafer W, and relative to form this opening. Side walls 20a and 20a are connected downward to the pair of upper end surfaces 22 and 22 that face each other. Both substantially lower halves of the side walls 20a, 20a form part of the same cylindrical peripheral surface, and the lower end portion of the cylindrical peripheral surface is cut off to form an opening 23. Inside the side walls 20a, 20a, a large number of grooves 20b that are long in the vertical direction are formed at equal pitches (25 rows in the case of FIG. 2), and a pair of opposing grooves are formed on the side walls 20a, 20a. Since 20b and 20b are located on the same parallel plane, one wafer W can be accommodated in one set of concave grooves 20b and 20b as shown by an imaginary line in FIG. The box 20 can store a total of 25 wafers.
[0019]
The side walls 20a and 20a are further suspended downward from the portion where the opening 23 is formed, thereby forming leg portions 20c and 20c parallel to each other. Both the leg portions 20c and 20c are substantially rectangular plate-like members, and there are two gate marks 25 on the bottom surface 24 at the time of injection molding at a total of four locations. The gate mark 25 is set so as to be accommodated in a recess 26 provided on the bottom surface 24. That is, when the inner box 20 is injection-molded, the gate position for injecting the molding material is set to be within the recess 26 provided in the bottom surface 24. Reference numeral 27 in the figure denotes a positioning groove for housing the inner box 20 in the outer box body 3, 28, 29a, 29b are members for connecting the pair of side walls 20a, 20a, and 28a is an orientation flat alignment roller. Each cut-out portion is shown to prevent interference.
[0020]
Next, the structure of a mold for injection molding the inner box 20 will be described with reference to FIG. The mold 50 includes a fixed mold 51, a movable mold 53 having a core portion 52 and movable in the vertical direction, and a movable mold that moves up and down together with the movable mold 53 and slides in the horizontal direction. A cavity 55 having the same shape as described above is formed by the side slide core 54. The cavity 55 in this case is formed so as to be molded with the inner box 20 turned upside down, and the fixed mold plate 51 located at the upper end of the core 52 and the movable slide cores 54, 54 has a gate 56. , 56 are attached. The gates 56 and 56 are connected to a supply source of the molding material 59 through a resin passage 58 provided in the fixed mold 51.
[0021]
With such a mold structure, the gate 56 is disposed on the top surface of the cavity 55 corresponding to the leg bottom surface 24 of the inner box 20. Thus, the molding material 59 injected downward from the highest position of the cavity 55 flows almost straight even after being injected into the cavity 55, and does not collide with the mold wall surface immediately after being injected. . Therefore, there is no large loss that suddenly changes the flow direction when it collides with the wall surface, and the mold structure has a good moldability that allows the molding material 59 to flow smoothly to the end.
[0022]
Next, a state in which the inner box 20 formed by the above-described mold 50 and having the above-described structure is placed on the outer box body 3 and the upper lid 4 is covered and locked will be described.
FIG. 6 is a plan view showing the outer box main body 3 according to the present invention, and an upper portion having a rectangular shape in plan view is opened, and a seal groove 5 is provided over the entire circumference. On the bottom surface 31, a pair of receiving seats 32, 32, a pair of positioning ribs 33, 33, and a center positioning rib 34 are provided corresponding to the legs 20 c, 20 c of the inner box 20. The receiving seat 32 is provided at a position where the bottom surface 24 of the leg portion 20c is placed at both ends, and the top surface is a flat surface having the same height. The positioning pedestal 32 is provided with a positioning projection 35 that restrains the outer surface of the leg portion 20c. The positioning rib 33 constrains the outer surface of the leg portion 20c in the same manner as the positioning projection 35, and the center positioning rib 34 engages with the positioning groove 27 of the leg portion 20c so that the inner box 20 is placed in FIG. Position vertically on the paper.
[0023]
The top cover 4 shown in FIG. 7 is a plan view of the top cover 4 as viewed from the inside. A substantially rectangular seal groove 18 is formed over the entire circumference, and the inner side is reinforced to connect the straight part and the corner part. Ribs 41 are provided. The reinforcing rib 41 has a function of pressing the inner box 20 in a locked state described later.
[0024]
Hereinafter, a state where the upper lid 4 is locked to the outer box body 3 containing the inner box 20 described above will be described with reference to FIG. The operation and action of the hook / lever member 7 and the engaging projection 17 constituting the locking means are the same as those in the prior art, and a detailed description thereof will be omitted here.
In such a locked state, the inner box 20 containing the wafer W is placed on the bottom surface 31 of the outer box body 3. The reinforcing ribs 41 are respectively pressed downward. The inner box 20 is supported by four receiving seats 32 at both ends of the leg portions 20c and 20c, and as shown in FIG. 9, the inner box 20 floats from the bottom surface 31 of the outer box body 3 in the absence of the receiving seats 32. Is in a state. Moreover, since the receiving seat 32 is provided at a position without the gate mark 25, it does not come into contact with the bottom 31. Therefore, even when the outer box body 3 or the like is deformed, the corner portion forming the recess 26 is the bottom. The surface of 31 can be rubbed, and this can prevent foreign matter that has been scraped off and adversely affect the wafer W. Further, in addition to the pressing from above by the reinforcing rib 41, the inner box 20 is also prevented from moving in the lateral direction by the positioning rib 33, the positioning projection 35, etc., so that the inner box 20 is stably housed in the storage container. Held together.
[0025]
In the embodiment described so far, the hook lever member 7 and the locking projection 17 are employed as the locking means, but the present invention described above is not limited to this, and the upper lid 4 is attached to the outer box body. The thing of the other structure which can maintain the state pressed to 3 may be sufficient.
[0026]
【The invention's effect】
According to the present invention described above, the following effects can be obtained. According to the first aspect of the present invention, since the flow of the molding material is good and the moldability is improved, the yield is increased. Further, according to the second invention of the present invention, an injection mold having a good flow of molding material and good moldability, and thus high yield can be provided. Furthermore, according to the third aspect of the present invention , the inner box can be stored and held in a stable state, and there is no interference that generates unnecessary foreign matter inside.
[Brief description of the drawings]
FIG. 1 is a front view showing an inner box structure of a plate-shaped member storage container according to the present invention.
FIG. 2 is a plan view of FIG.
FIG. 3 is a side view of FIG. 1;
4A is an enlarged view of part A in FIG. 1, and FIG. 4B is a view taken in the direction of arrow B in FIG.
FIG. 5 is a cross-sectional view showing the configuration of an injection mold according to the present invention.
FIG. 6 is a plan view showing the configuration of the outer box body according to the present invention.
FIG. 7 is a plan view on the inner surface side showing the configuration of the upper lid according to the present invention.
FIG. 8 is a cross-sectional view showing a locked state of the plate-shaped member storage container according to the present invention.
9 is a cross-sectional view of the state in which the inner box is placed at a predetermined position of the outer box main body as viewed along the line CC in FIG.
FIG. 10 is a perspective view showing an appearance of a plate-shaped member storage container.
11 is an exploded perspective view showing the configuration of the plate-shaped member storage container of FIG.
FIG. 12 is a cross-sectional view of a conventional plate-shaped member storage container in a locked state.
13A and 13B are views showing the operation of the locking means, where FIG. 13A is a cross-sectional view of a main part showing a locked state, and FIG. 13B is a cross-sectional view of a main part showing a state in which the upper lid is pushed down by the hook part. (C) is principal part sectional drawing which shows the state which the hook part started pushing up the upper cover, (d) is principal part sectional drawing which shows the state which the upper cover opened.
[Explanation of symbols]
1 Outer box 2, 20 Inner box 3 Outer box body 4 Upper lid 5, 18 Seal groove 6 Packing (seal member)
7 Hook lever member (locking means)
11 Engaging recess 17 Engaging projection (locking means)
20a Side wall 20b Concave groove 20c Leg 25 Gate mark 26 Recess 32 Receiving seat 33 Positioning rib 34 Central positioning rib 35 Positioning projection 41 Reinforcement rib 51 Fixed mold plate 52 Core unit 53 Movable plate 54 Movable slide core 55 Cavity 56 Gate 57 Insert 58 Resin passage 59 Molding material W Wafer

Claims (3)

A plurality of plate-shaped members are housed in a plate-shaped member storage container that is pressed between the outer box main body and the upper lid that is put on and joined to the upper portion of the outer box main body and is kept in an airtight state by the locking means. It is an inner box structure of an injection-molded plate-shaped member storage container for orderly storing semiconductor wafers ,
A leg that is open at the top of the rectangular in plan view, has a plurality of vertically long concave grooves formed inside the pair of opposite side walls, and the lower end of the side wall is placed on the bottom surface of the outer box body In what is part,
The legs are both substantially rectangular plate member, respectively on the bottom surface of the leg at two concave portions of the total four positions are formed, it is in the recess there is a gate mark at the time of injection molding, the gate It is set so that the mark fits in the recess,
The concave portion of the leg portion is provided at a position that is protruded from the bottom surface of the outer box main body and shifted from the receiving seat for placing the leg bottom surface of the inner box,
A plate-shaped member storage in which the leg portion is in a state of floating from the bottom surface of the outer box main body without the receiving seat, and the gate trace and the concave portion do not contact the bottom of the outer box main body. Container inner box structure. An injection mold for integrally molding the inner box of the plate-shaped member storage container according to claim 1 ,
The fixed mold plate having the resin passage, the movable mold plate having the core portion projecting from the surface facing the fixed mold plate, and the pair of slide cores detachably provided on both side surfaces of the core portion. A cavity having an inner box shape is defined, and a gate communicating with the resin passage is disposed on an upper surface portion of the cavity corresponding to a bottom surface of a leg portion of the inner box which is a substantially rectangular plate-shaped member. An injection mold for molding an inner box of a plate-shaped member storage container. An inner box containing a semiconductor wafer as a plate-like member ;
An outer box body that houses the inner box ;
An upper lid that is put on and joined to the upper portion of the outer box body ;
Locking means that presses between the outer box main body and the upper lid to maintain an airtight state ,
The inner box has a rectangular opening in plan view, and a plurality of long grooves in the vertical direction for orderly storing semiconductor wafers, which are a plurality of plate members, are formed inside a pair of opposing side walls, respectively, The lower end portion of the side wall is a leg portion placed on the bottom surface portion of the outer box body ,
Wherein a plate-like member leg portions are both substantially rectangular, the gate remain at the time of injection molding is present in a recess provided on the bottom surface of the leg portion, the plate which the gate remain is Ru is set to fit in the recess In the member storage container,
Projecting a seat for mounting the leg bottom of the inner box to the bottom of the outer box body, Rutotomoni provided at a position shifted the seat from the recesses of the leg portion,
The receiving seat is protruded at four positions on the bottom surface of the outer box body corresponding to both ends of a pair of opposing leg portions,
The plate member storage, wherein the leg portion is in a state of floating from the bottom surface of the outer box main body without the receiving seat, and the gate mark and the concave portion do not contact the bottom of the outer box main body. container.

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