JP2571206Y2 - Wafer storage container - Google Patents

Description

[Detailed description of the invention]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wafer container capable of safely transporting, storing and handling precision substrates such as semiconductor-related wafers, original masks, and photomasks.

[0002]

2. Description of the Related Art Generally, wafers of precision substrates formed by slicing semiconductor single crystal pillars into thin plates are often transported and stored in large quantities to users in order to make integrated circuits in various electronic devices. In order to protect semiconductor wafers, which are expensive, thin, brittle, and extremely resistant to contamination, from damage and contamination, care must be taken to safely hold and arrange a large number of wafers in a closed container for transportation in handling. Conventionally, in this transport container, each wafer is arranged in a container body having an opening / closing lid at regular intervals so as not to come into contact with and collide with each other. Elastically held by the storage groove formed in the box, ie the carrier,
Vibration during transportation is damped to help prevent breakage of the wafer and generation of fine particles generated by frictional contact of the wafer. In addition, the container body and the opening / closing lid are provided with a business trip edge on the outer peripheral side to prevent warping and deformation, and the locking groove structure of both is provided with a hook that elastically bends in the lid, and the lid is connected to the container. The hook is located on the side of the container body when it is fitted into the main body, and it is locked by a locking member protruding from the side of the container body so that the lid does not come off. The cover is detached from the member and can be opened (Japanese Utility Model Laid-Open No. 1-129836).

[0003]

However, in this type of conventional container, as shown in FIG. 7, the hook b formed on the lid a is actuated inward or outward to disengage the lid a. There is a need. I.e., the force to bend the hook b is for opening and closing at the time of the fitting is required, the thickness to withstand the force of bending, that Do required deflection width c of the hook which can act a force to bend including the thickness. However, it is important to reduce the travel width d and the deflection width c of the hook as much as possible because the travel margin and the flex width cannot be made large due to design restrictions.

[0004] However, in the case of simply made small deflection width of the hook is comprised on the design on the compact, in order to bend the hook b is it requires a large force, during mating of the lid and the container body, the hook Becomes difficult to open, and when it is opened, a local bending force is applied, and deformation due to repeated use tends to remain, resulting in a decrease in openability.

On the other hand, in order to reduce the bending force of the hook,
Although it is conceivable to make the hook thinner, a thin hook causes a problem in that the strength is weakened, which hinders transportation and causes a loss of reliability and makes molding difficult.

[0006] In the present invention is intended to be removed these conventional various disadvantages, attached to the container body and the lid, to enhance removal of the handling property function greatly, improved design of the lid member The purpose is to prevent plastic deformation and simplify the wafer storage processing operation.

[0007]

SUMMARY OF THE INVENTION The present invention provides a container body in which a case-like carrier capable of accommodating a large number of wafers in parallel at regular intervals is removably fitted, and is provided so as to be removably fitted to the container body. And an upper end of the container body
A tongue-shaped locking member protrudes outwardly from an outer peripheral side wall that has traveled from the part , and an elastic hook having an engaging hole for inserting and locking the locking member is attached to the lower end of the lid. Outer side wall bottom edge
From a wafer carrier that protrudes deployed downward, the elastic hooking continuously divided into lid peripheral side wall provided with a slit toward above the lid peripheral side wall lower edge in an extension of its sides, a predetermined It is formed on an elastic hook having a deflection width. In this case, in this case, the locking member
Reinforcement ribs are integrated vertically from the bottom of the root
Preferably, it is provided.

[0008]

When the lid is put on, the elastic hook protruding from the side wall of the lid comes into contact with the locking member of the container body and slides while bending outward, and the locking member is inserted into the engaging hole. Locked and closed. On the other hand, when the lid is opened, if the lower end of the elastic hook having slits on both sides is bent outward without a large force, the engaging hole of the bent elastic hook is easily disengaged from the locking member of the container body and the lid body is opened. Can be removed from the container body, and the wafers stored in parallel can be moved in and out.The required bending width can be obtained without making the elastic hook thin, and it can be deformed into an elastic hook without being locally bent by repeated use. Can be used safely without remaining. In this case, since the locking member is reinforced by the rib,
It does not deform easily and is durable.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIGS. 1 to 6. FIG.
And a lid 3 which is provided so as to be detachably fitted over the container body 2.
In order to engage the container body 2 and the lid 3, a tongue-shaped locking member 4 is projected from the side surface of the container body 2 and the locking member 4 is fitted. An elastic hook 6 having an engaging hole 5 for stopping is integrally provided at the lower edge of the lid side wall, and is provided.
Slits 7, 7 are provided above the lid body from the lower edge of the lid side wall on the extension lines of both sides of the elastic hook 6 to continuously divide the lid body 3, and the wafer is stored as the elastic hook 6 having a predetermined deflection width. Provided in the container.

[0010] As the elastic hook 6, the lid 3 to be fitted in correspondence with the peripheral side wall 2 ₁ Shutcho' from the container main body 2
A pair of slits 7, 7 formed upward from its lower edge to the peripheral side wall 3 ₁ Shutcho' from to form both side edges, there is to have a predetermined deflection width, engaging holes 5,5 Are provided on both sides, and the elastic hook 6 is easily opened by bending so that the free end moves inward and outward. A pair of locking members 4 and 4 are reinforced by ribs 9 and protrude at intervals in a handle recess 8 into which an elastic hook 6 provided in the container body 2 is fitted.

In the container main body 2, a holding piece 11 fitted on the inner surface of the lid 3 and pressing the upper edge of the wafer W is provided.
There is provided a wafer buffer support frame 10 with a ring, and a ring-shaped seal member 12 is interposed at the periphery of the fitting between the container body 2 and the lid 3 to ensure airtightness.
Useful for waterproofing. The carrier 1 is formed of a synthetic resin-based elastic material, is fitted into the bottom surface of the container body 2 so that the carrier 1 can be fitted and held with a gap between the carrier 1 and the upper outer peripheral edge. To form an inner box that is easy to handle in and out of the container body 2 by providing a flange.
V-grooves for accommodating a large number of wafers W in parallel at regular intervals are arranged on both inner sides. The container body 2 and the lid 3
Is a tough structure with ribs in place to respond to changes in internal and external pressure, and is made of polycarbonate, polypropylene, polyethylene, PB
It is preferable to use a highly synthetic resin material made of plastic such as T resin.

[0012]

[Effects of the Invention] As described above, according to the present invention,
Setting a slit in both rhino de resilient hook formed on the lid
The required deflection without thinning the elastic hooks
Because of the width, the toughness can be maintained, and the lid and volume
The container body can be securely connected. Also elastic
A rib is provided on the tongue-shaped locking member that locks the hook
It is tough and can withstand years of use.

[Brief description of the drawings]

FIG. 1 is a front view of a separated state showing an embodiment of the present invention.

FIG. 2 is a perspective view of the example of FIG. 1 in a separated state.

FIG. 3 is a front view showing the assembled and used state of FIG. 1;

FIG. 4 is a partially cut-away side view of FIG. 2;

FIG. 5 is an enlarged vertical sectional view taken along line AA of FIG. 1;

FIG. 6 is an enlarged detailed view taken along line BB of FIG. 3;

FIG. 7 is a front view of a conventional lid locking member.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Carrier 2 Container main body 3 Lid 4 Locking member 5 Engagement hole 6 Elastic hook 7 Slit 8 Handle recess 9 Rib 10 Wafer cushioning material support frame W Wafer

Claims (2)

(57) [Scope of request for utility model registration] 1. A container body in which a case-shaped carrier capable of accommodating a large number of wafers in parallel at regular intervals is removably fitted, and a lid body removably fitted to the container body. A tongue-shaped locking member protrudes outward from an outer peripheral side wall traveled from the upper end of the container body, and an elastic hook having an engagement hole for inserting and locking the locking member is provided. Lid lower end
A wafer storage container protruding downward from the lower edge of the outer peripheral side wall which has been traveled from the upper side, wherein a slit is provided in which the elastic hook faces upward from the lower end edge of the outer peripheral side wall of the lid on an extension of both sides thereof. A wafer storage container formed continuously on the outer peripheral side wall of the lid. 2. A lower part integrally formed on a root portion of the locking member.
Characterized in that reinforcing ribs are provided vertically downward from the surface
The wafer container according to claim 1.