JPH0458185B2 - - Google Patents

Info

Publication number
JPH0458185B2
JPH0458185B2 JP58133309A JP13330983A JPH0458185B2 JP H0458185 B2 JPH0458185 B2 JP H0458185B2 JP 58133309 A JP58133309 A JP 58133309A JP 13330983 A JP13330983 A JP 13330983A JP H0458185 B2 JPH0458185 B2 JP H0458185B2
Authority
JP
Japan
Prior art keywords
barrier metal
metal layer
forming
wiring
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58133309A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6025252A (ja
Inventor
Shoichi Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP13330983A priority Critical patent/JPS6025252A/ja
Publication of JPS6025252A publication Critical patent/JPS6025252A/ja
Publication of JPH0458185B2 publication Critical patent/JPH0458185B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP13330983A 1983-07-21 1983-07-21 半導体装置 Granted JPS6025252A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13330983A JPS6025252A (ja) 1983-07-21 1983-07-21 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13330983A JPS6025252A (ja) 1983-07-21 1983-07-21 半導体装置

Publications (2)

Publication Number Publication Date
JPS6025252A JPS6025252A (ja) 1985-02-08
JPH0458185B2 true JPH0458185B2 (enrdf_load_stackoverflow) 1992-09-16

Family

ID=15101654

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13330983A Granted JPS6025252A (ja) 1983-07-21 1983-07-21 半導体装置

Country Status (1)

Country Link
JP (1) JPS6025252A (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5137579A (ja) * 1974-09-25 1976-03-29 Suwa Seikosha Kk Handotaisochi
JPS55137561U (enrdf_load_stackoverflow) * 1979-03-20 1980-09-30

Also Published As

Publication number Publication date
JPS6025252A (ja) 1985-02-08

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