JPH0456453B2 - - Google Patents

Info

Publication number
JPH0456453B2
JPH0456453B2 JP58118079A JP11807983A JPH0456453B2 JP H0456453 B2 JPH0456453 B2 JP H0456453B2 JP 58118079 A JP58118079 A JP 58118079A JP 11807983 A JP11807983 A JP 11807983A JP H0456453 B2 JPH0456453 B2 JP H0456453B2
Authority
JP
Japan
Prior art keywords
film
sin
silicon substrate
integrated circuit
internal stress
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58118079A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6012737A (ja
Inventor
Toshiaki Myajima
Katsuteru Awane
Masayoshi Koba
Atsushi Kudo
Tadayuki Morishita
Kazumasa Kioi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP58118079A priority Critical patent/JPS6012737A/ja
Publication of JPS6012737A publication Critical patent/JPS6012737A/ja
Publication of JPH0456453B2 publication Critical patent/JPH0456453B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
    • H01L21/0217—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Formation Of Insulating Films (AREA)
JP58118079A 1983-07-01 1983-07-01 窒化シリコン膜の製造方法 Granted JPS6012737A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58118079A JPS6012737A (ja) 1983-07-01 1983-07-01 窒化シリコン膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58118079A JPS6012737A (ja) 1983-07-01 1983-07-01 窒化シリコン膜の製造方法

Publications (2)

Publication Number Publication Date
JPS6012737A JPS6012737A (ja) 1985-01-23
JPH0456453B2 true JPH0456453B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-09-08

Family

ID=14727472

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58118079A Granted JPS6012737A (ja) 1983-07-01 1983-07-01 窒化シリコン膜の製造方法

Country Status (1)

Country Link
JP (1) JPS6012737A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0770535B2 (ja) * 1986-06-25 1995-07-31 ソニー株式会社 半導体装置の製造方法
JPH01176067A (ja) * 1987-12-29 1989-07-12 Hoya Corp 窒化シリコン膜の成膜方法
US5264724A (en) * 1989-02-13 1993-11-23 The University Of Arkansas Silicon nitride for application as the gate dielectric in MOS devices
JP2778414B2 (ja) * 1993-05-19 1998-07-23 株式会社デンソー 装置保護膜の製造方法
JP4441109B2 (ja) * 2000-12-08 2010-03-31 株式会社ルネサステクノロジ 半導体装置の製造方法
JP2021147678A (ja) * 2020-03-23 2021-09-27 株式会社アルバック 誘電体膜の形成方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS503119B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-08-23 1975-01-31

Also Published As

Publication number Publication date
JPS6012737A (ja) 1985-01-23

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