JPH0447980B2 - - Google Patents

Info

Publication number
JPH0447980B2
JPH0447980B2 JP58206414A JP20641483A JPH0447980B2 JP H0447980 B2 JPH0447980 B2 JP H0447980B2 JP 58206414 A JP58206414 A JP 58206414A JP 20641483 A JP20641483 A JP 20641483A JP H0447980 B2 JPH0447980 B2 JP H0447980B2
Authority
JP
Japan
Prior art keywords
insulating layer
wiring
semiconductor device
vertical
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58206414A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6098655A (ja
Inventor
Tadayoshi Enomoto
Masaaki Yasumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP58206414A priority Critical patent/JPS6098655A/ja
Publication of JPS6098655A publication Critical patent/JPS6098655A/ja
Publication of JPH0447980B2 publication Critical patent/JPH0447980B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W90/00—
    • H10W72/07251—
    • H10W72/20—
    • H10W90/297—
    • H10W90/722—

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP58206414A 1983-11-02 1983-11-02 半導体装置 Granted JPS6098655A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58206414A JPS6098655A (ja) 1983-11-02 1983-11-02 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58206414A JPS6098655A (ja) 1983-11-02 1983-11-02 半導体装置

Publications (2)

Publication Number Publication Date
JPS6098655A JPS6098655A (ja) 1985-06-01
JPH0447980B2 true JPH0447980B2 (index.php) 1992-08-05

Family

ID=16522969

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58206414A Granted JPS6098655A (ja) 1983-11-02 1983-11-02 半導体装置

Country Status (1)

Country Link
JP (1) JPS6098655A (index.php)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4982266A (en) * 1987-12-23 1991-01-01 Texas Instruments Incorporated Integrated circuit with metal interconnecting layers above and below active circuitry
US5354695A (en) * 1992-04-08 1994-10-11 Leedy Glenn J Membrane dielectric isolation IC fabrication
JPH07109873B2 (ja) * 1988-07-05 1995-11-22 株式会社東芝 半導体記憶装置
US5435037A (en) * 1993-12-22 1995-07-25 Terry R. Douglas Paint brush with replaceable bristle pack
US5391917A (en) * 1993-05-10 1995-02-21 International Business Machines Corporation Multiprocessor module packaging
US6809421B1 (en) 1996-12-02 2004-10-26 Kabushiki Kaisha Toshiba Multichip semiconductor device, chip therefor and method of formation thereof
JP4063944B2 (ja) * 1998-03-13 2008-03-19 独立行政法人科学技術振興機構 ３次元半導体集積回路装置の製造方法
JP4110390B2 (ja) * 2002-03-19 2008-07-02 セイコーエプソン株式会社 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6098655A (ja) 1985-06-01

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