JPH0444951B2 - - Google Patents

Info

Publication number
JPH0444951B2
JPH0444951B2 JP58105651A JP10565183A JPH0444951B2 JP H0444951 B2 JPH0444951 B2 JP H0444951B2 JP 58105651 A JP58105651 A JP 58105651A JP 10565183 A JP10565183 A JP 10565183A JP H0444951 B2 JPH0444951 B2 JP H0444951B2
Authority
JP
Japan
Prior art keywords
light
flaw detection
ultrasonic flaw
subject
contact ultrasonic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58105651A
Other languages
English (en)
Japanese (ja)
Other versions
JPS606860A (ja
Inventor
Fuminobu Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58105651A priority Critical patent/JPS606860A/ja
Priority to US06/620,021 priority patent/US4581939A/en
Priority to EP84106778A priority patent/EP0129205B1/en
Priority to DE8484106778T priority patent/DE3484326D1/de
Publication of JPS606860A publication Critical patent/JPS606860A/ja
Publication of JPH0444951B2 publication Critical patent/JPH0444951B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP58105651A 1983-06-15 1983-06-15 非接触式超音波探傷方法およびその装置 Granted JPS606860A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP58105651A JPS606860A (ja) 1983-06-15 1983-06-15 非接触式超音波探傷方法およびその装置
US06/620,021 US4581939A (en) 1983-06-15 1984-06-13 Noncontact ultrasonic flaw detecting method and apparatus therefor
EP84106778A EP0129205B1 (en) 1983-06-15 1984-06-14 Noncontacting ultrasonic flaw detecting method
DE8484106778T DE3484326D1 (de) 1983-06-15 1984-06-14 Beruehrungsloses ultraschallverfahren um fehlstellen festzustellen.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58105651A JPS606860A (ja) 1983-06-15 1983-06-15 非接触式超音波探傷方法およびその装置

Publications (2)

Publication Number Publication Date
JPS606860A JPS606860A (ja) 1985-01-14
JPH0444951B2 true JPH0444951B2 (esLanguage) 1992-07-23

Family

ID=14413347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58105651A Granted JPS606860A (ja) 1983-06-15 1983-06-15 非接触式超音波探傷方法およびその装置

Country Status (4)

Country Link
US (1) US4581939A (esLanguage)
EP (1) EP0129205B1 (esLanguage)
JP (1) JPS606860A (esLanguage)
DE (1) DE3484326D1 (esLanguage)

Families Citing this family (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4863268A (en) * 1984-02-14 1989-09-05 Diffracto Ltd. Diffractosight improvements
US4567769A (en) * 1984-03-08 1986-02-04 Rockwell International Corporation Contact-free ultrasonic transduction for flaw and acoustic discontinuity detection
JPS61102541A (ja) * 1984-10-25 1986-05-21 Hitachi Ltd 液体中の不純物分析方法および装置
US5206700A (en) * 1985-03-14 1993-04-27 Diffracto, Ltd. Methods and apparatus for retroreflective surface inspection and distortion measurement
US4633715A (en) * 1985-05-08 1987-01-06 Canadian Patents And Development Limited - Societe Canadienne Des Brevets Et D'exploitation Limitee Laser heterodyne interferometric method and system for measuring ultrasonic displacements
GB8601873D0 (en) * 1986-01-27 1986-03-05 Atomic Energy Authority Uk Ultrasonic weld monitoring
GB2187551B (en) * 1986-03-04 1990-03-14 Gen Electric Plc Radiation detector
JPS6410166A (en) * 1987-07-02 1989-01-13 Ngk Insulators Ltd Detecting method for defective insulator
JPS6449955A (en) * 1987-08-19 1989-02-27 Shikoku Elec Power Plane ultrasonic wave generating method by laser light and ultrasonic surveying method
JPH01169338A (ja) * 1987-09-18 1989-07-04 Agency Of Ind Science & Technol トンネル電流検出光音響分光装置
US4968144A (en) * 1989-03-09 1990-11-06 Wayne State University Single beam AC interferometer
US5136172A (en) * 1989-08-16 1992-08-04 Hitachi, Ltd. Method and apparatus for detecting photoacoustic signal
JPH03104842U (esLanguage) * 1990-02-06 1991-10-30
US5086775A (en) * 1990-11-02 1992-02-11 University Of Rochester Method and apparatus for using Doppler modulation parameters for estimation of vibration amplitude
US5168322A (en) * 1991-08-19 1992-12-01 Diffracto Ltd. Surface inspection using retro-reflective light field
DE69126329T2 (de) * 1991-11-22 1997-11-20 Doryokuro Kakunenryo Verfahren und vorrichtung zur laser-ultraschallfehlerprüfung
DE4300378A1 (en) * 1992-01-11 1993-07-22 Benedikt Prof Dr Med Jean Contactless material investigation by laser - illuminating by pulsed laser with variable radiated energy density, pressure or acoustic sensor.
US5379109A (en) * 1992-06-17 1995-01-03 The United States Of America As Represented By The Secretary Of The Navy Method and apparatus for non-destructively measuring local resistivity of semiconductors
US5285260A (en) * 1992-07-06 1994-02-08 General Electric Company Spectroscopic imaging system with ultrasonic detection of absorption of modulated electromagnetic radiation
US5285261A (en) * 1992-07-06 1994-02-08 General Electric Company Dual interferometer spectroscopic imaging system
US5535006A (en) * 1992-07-16 1996-07-09 Lockheed Idaho Technologies Company Method and system for evaluating integrity of adherence of a conductor bond to a mating surface of a substrate
US5505090A (en) * 1993-11-24 1996-04-09 Holographics Inc. Method and apparatus for non-destructive inspection of composite materials and semi-monocoque structures
US5638396A (en) * 1994-09-19 1997-06-10 Textron Systems Corporation Laser ultrasonics-based material analysis system and method
US5679899A (en) * 1995-03-06 1997-10-21 Holographics Inc. Method and apparatus for non-destructive testing of structures
US5585921A (en) * 1995-03-15 1996-12-17 Hughes Aircraft Company Laser-ultrasonic non-destructive, non-contacting inspection system
US5698787A (en) * 1995-04-12 1997-12-16 Mcdonnell Douglas Corporation Portable laser/ultrasonic method for nondestructive inspection of complex structures
CA2188705A1 (en) * 1995-10-24 1997-04-25 Noritaka Nakaso Method and apparatus for exciting bulk acoustic wave
US6175416B1 (en) * 1996-08-06 2001-01-16 Brown University Research Foundation Optical stress generator and detector
JP4025369B2 (ja) * 1996-04-26 2007-12-19 ブラウン ユニバーシティー リサーチ ファウンデーション 材料の機械的特性を判別する光学方法
US5982482A (en) * 1997-07-31 1999-11-09 Massachusetts Institute Of Technology Determining the presence of defects in thin film structures
US6057927A (en) * 1998-02-25 2000-05-02 American Iron And Steel Institute Laser-ultrasound spectroscopy apparatus and method with detection of shear resonances for measuring anisotropy, thickness, and other properties
WO1999049309A2 (en) * 1998-03-26 1999-09-30 British Nuclear Fuels Plc Improvements in and relating to inspection
US6256100B1 (en) * 1998-04-27 2001-07-03 Active Impulse Systems, Inc. Method and device for measuring the thickness of thin films near a sample's edge and in a damascene-type structure
US7612890B2 (en) * 1998-06-30 2009-11-03 Lockheed Martin Corporation System and method for controlling wafer temperature
WO2000020841A1 (en) * 1998-10-05 2000-04-13 Kla-Tencor Corporation Interferometric system for measurement disturbance of a sample
KR100679082B1 (ko) * 1999-09-08 2007-02-05 주식회사 포스코 레이저 초음파를 이용한 내부결함 검출 장치
JP4220102B2 (ja) * 2000-05-02 2009-02-04 富士フイルム株式会社 動的変化検出方法、動的変化検出装置及び超音波診断装置
AU2007200013B2 (en) * 2000-07-14 2010-01-21 Lockheed Martin Corporation System and method for locating and positioning an ultrasonic signal generator for testing purposes
JP4874499B2 (ja) * 2000-07-14 2012-02-15 ロッキード マーティン コーポレイション 試験目的の超音波信号発生装置を配置し位置決めするためのシステムおよび方法
US7671297B2 (en) * 2003-11-20 2010-03-02 Ethicon, Inc. Method and apparatus for laser drilling workpieces
US7576848B2 (en) * 2004-12-21 2009-08-18 Lockheed Martin Corporation System and method to decrease probe size for improved laser ultrasound detection
US7369250B2 (en) * 2005-03-25 2008-05-06 Lockheed Martin Corporation System and method to inspect components having non-parallel surfaces
GB0610318D0 (en) * 2006-05-24 2006-07-05 Univ Nottingham Transducers
JP4448189B2 (ja) 2008-06-18 2010-04-07 キヤノン株式会社 生体情報取得装置
DE102010037788B4 (de) * 2010-09-27 2012-07-19 Viprotron Gmbh Verfahren und Vorrichtung zur Anzeige von automatisiert ermittelten Fehlerstellen
US9255909B2 (en) * 2012-03-26 2016-02-09 The Boeing Company Surface visualization system for indicating inconsistencies
WO2016100361A1 (en) * 2014-12-15 2016-06-23 The Board Of Regents For Oklahoma State University System and method for ultrasonic vibration assisted continuous wave laser surface drilling
JP6451695B2 (ja) * 2016-06-02 2019-01-16 株式会社島津製作所 欠陥検査方法及び欠陥検査装置
JP6805930B2 (ja) * 2017-03-29 2020-12-23 株式会社島津製作所 振動測定装置
JP6791029B2 (ja) 2017-06-12 2020-11-25 株式会社島津製作所 欠陥検出方法及び欠陥検出装置
CN113227781B (zh) * 2018-12-20 2024-02-13 株式会社岛津制作所 缺陷检查装置和缺陷检查方法
WO2020204817A1 (en) * 2019-03-29 2020-10-08 Agency For Science, Technology And Research Non-contact non-destructive testing method and system
JP7355637B2 (ja) * 2019-12-16 2023-10-03 株式会社ディスコ 検出装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2457253C2 (de) * 1974-12-04 1982-09-02 Krautkrämer, GmbH, 5000 Köln Optisches interferometrisches Verfahren und Vorrichtung zur berührungslosen Messung der durch Ultraschallwellen verursachten Oberflächenauslenkung eines Prüflings
US3978713A (en) * 1975-05-27 1976-09-07 General Electric Company Laser generation of ultrasonic waves for nondestructive testing
DE2707968C2 (de) * 1977-02-24 1984-12-13 Krautkrämer GmbH, 5000 Köln Verfahren zum Empfang von Ultraschallwellen unter einem vorbestimmten Auftreffwinkel
DE2707883A1 (de) * 1977-02-24 1978-08-31 Krautkraemer Gmbh Verfahren zur erzeugung fokussierter schallwellen durch laserimpulse
DE2707914A1 (de) * 1977-02-24 1978-08-31 Krautkraemer Gmbh Verfahren zur anregung impulsfoermiger ultraschallwellen in der oberflaeche stark licht absorbierender werkstoffe
DE2710638C2 (de) * 1977-03-11 1984-10-11 Krautkrämer GmbH, 5000 Köln Vorrichtung zum berührungslosen optischen Empfang von Ultraschallwellen in der zerstörungsfreien Werkstoffprüfung
JPS5831872B2 (ja) * 1977-12-29 1983-07-08 住友金属工業株式会社 非接触超音波探傷法
US4246793A (en) * 1979-02-08 1981-01-27 Battelle Development Corporation Nondestructive testing
DE3002620C2 (de) * 1980-01-25 1984-09-20 Krautkrämer GmbH, 5000 Köln Verfahren zum berührungslosen optischen Empfang von Ultraschallwellen
JPS5722536A (en) * 1980-06-27 1982-02-05 Semiconductor Res Found Device for analyzing crystal defect
DE3029776C2 (de) * 1980-08-06 1983-04-07 Krautkrämer, GmbH, 5000 Köln Verfahren zum berührungslosen Empfang von Ultraschallwellen
US4484820A (en) * 1982-05-25 1984-11-27 Therma-Wave, Inc. Method for evaluating the quality of the bond between two members utilizing thermoacoustic microscopy

Also Published As

Publication number Publication date
JPS606860A (ja) 1985-01-14
EP0129205B1 (en) 1991-03-27
DE3484326D1 (de) 1991-05-02
EP0129205A3 (en) 1989-04-05
EP0129205A2 (en) 1984-12-27
US4581939A (en) 1986-04-15

Similar Documents

Publication Publication Date Title
JPH0444951B2 (esLanguage)
US3978713A (en) Laser generation of ultrasonic waves for nondestructive testing
US4512197A (en) Apparatus for generating a focusable and scannable ultrasonic beam for non-destructive examination
US4169662A (en) Method and apparatus for producing acoustic waves by laser pulses
US6874932B2 (en) Methods for determining the depth of defects
JP4386709B2 (ja) レーザ超音波による材料非破壊検査方法及び装置
JP3955513B2 (ja) 欠陥検査装置及び欠陥検査方法
CN106290227B (zh) 一种太赫兹波反射成像装置及方法
US11692810B2 (en) Photoacoustic excitation sensing enhanced by cross-correlated unfocused speckle images
US12313563B1 (en) Dark-field confocal microscopy measurement apparatus based on vortex interference
CN109799191B (zh) 固体材料粗糙表面声扰动的光学非接触检测装置及方法
JP2019095419A (ja) レーザ励起超音波発生装置、レーザ超音波検査装置、及びレーザ超音波検査方法
CN105606842B (zh) 流场多线干涉瑞利散射测速装置
JP3704843B2 (ja) 非接触非破壊の材料評価方法とその装置及び弾性波励起方法と弾性波励起装置
US7018334B2 (en) Imaging of a region in a scattering medium
JP3294148B2 (ja) レーザ超音波探傷装置
US5796004A (en) Method and apparatus for exciting bulk acoustic wave
JPH08320310A (ja) 超音波発生方法及びレーザー超音波装置
KR100241028B1 (ko) 레이저를 이용한 내부결함 검출방법 및 그 장치
JP7247075B2 (ja) レーザ光集光装置、レーザ光受光装置、およびレーザ光集光方法
JPH0572186A (ja) 超音波顕微鏡用超音波発生・検出装置
CN118731159A (zh) 多通道激光超声系统
RU2664933C1 (ru) Способ определения макрорельефа поверхности и внутренних включений объекта и устройство для его реализации
CN121090687A (zh) 基于光声效应的超声无损探伤系统
JPH0720094A (ja) 超音波振動測定装置