DE3484326D1 - Beruehrungsloses ultraschallverfahren um fehlstellen festzustellen. - Google Patents
Beruehrungsloses ultraschallverfahren um fehlstellen festzustellen.Info
- Publication number
- DE3484326D1 DE3484326D1 DE8484106778T DE3484326T DE3484326D1 DE 3484326 D1 DE3484326 D1 DE 3484326D1 DE 8484106778 T DE8484106778 T DE 8484106778T DE 3484326 T DE3484326 T DE 3484326T DE 3484326 D1 DE3484326 D1 DE 3484326D1
- Authority
- DE
- Germany
- Prior art keywords
- vacancies
- detecting
- ultrasonic method
- contactless ultrasonic
- contactless
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58105651A JPS606860A (ja) | 1983-06-15 | 1983-06-15 | 非接触式超音波探傷方法およびその装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3484326D1 true DE3484326D1 (de) | 1991-05-02 |
Family
ID=14413347
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8484106778T Expired - Lifetime DE3484326D1 (de) | 1983-06-15 | 1984-06-14 | Beruehrungsloses ultraschallverfahren um fehlstellen festzustellen. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4581939A (de) |
EP (1) | EP0129205B1 (de) |
JP (1) | JPS606860A (de) |
DE (1) | DE3484326D1 (de) |
Families Citing this family (52)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4863268A (en) * | 1984-02-14 | 1989-09-05 | Diffracto Ltd. | Diffractosight improvements |
US4567769A (en) * | 1984-03-08 | 1986-02-04 | Rockwell International Corporation | Contact-free ultrasonic transduction for flaw and acoustic discontinuity detection |
JPS61102541A (ja) * | 1984-10-25 | 1986-05-21 | Hitachi Ltd | 液体中の不純物分析方法および装置 |
US5206700A (en) * | 1985-03-14 | 1993-04-27 | Diffracto, Ltd. | Methods and apparatus for retroreflective surface inspection and distortion measurement |
US4633715A (en) * | 1985-05-08 | 1987-01-06 | Canadian Patents And Development Limited - Societe Canadienne Des Brevets Et D'exploitation Limitee | Laser heterodyne interferometric method and system for measuring ultrasonic displacements |
GB8601873D0 (en) * | 1986-01-27 | 1986-03-05 | Atomic Energy Authority Uk | Ultrasonic weld monitoring |
GB2187551B (en) * | 1986-03-04 | 1990-03-14 | Gen Electric Plc | Radiation detector |
JPS6410166A (en) * | 1987-07-02 | 1989-01-13 | Ngk Insulators Ltd | Detecting method for defective insulator |
JPS6449955A (en) * | 1987-08-19 | 1989-02-27 | Shikoku Elec Power | Plane ultrasonic wave generating method by laser light and ultrasonic surveying method |
JPH01169338A (ja) * | 1987-09-18 | 1989-07-04 | Agency Of Ind Science & Technol | トンネル電流検出光音響分光装置 |
US4968144A (en) * | 1989-03-09 | 1990-11-06 | Wayne State University | Single beam AC interferometer |
US5136172A (en) * | 1989-08-16 | 1992-08-04 | Hitachi, Ltd. | Method and apparatus for detecting photoacoustic signal |
JPH03104842U (de) * | 1990-02-06 | 1991-10-30 | ||
US5086775A (en) * | 1990-11-02 | 1992-02-11 | University Of Rochester | Method and apparatus for using Doppler modulation parameters for estimation of vibration amplitude |
US5168322A (en) * | 1991-08-19 | 1992-12-01 | Diffracto Ltd. | Surface inspection using retro-reflective light field |
CA2123493C (en) * | 1991-11-22 | 1999-09-21 | Kazuteru Naruo | Laser ultrasonic flaw detection apparatus |
DE4300378A1 (en) * | 1992-01-11 | 1993-07-22 | Benedikt Prof Dr Med Jean | Contactless material investigation by laser - illuminating by pulsed laser with variable radiated energy density, pressure or acoustic sensor. |
US5379109A (en) * | 1992-06-17 | 1995-01-03 | The United States Of America As Represented By The Secretary Of The Navy | Method and apparatus for non-destructively measuring local resistivity of semiconductors |
US5285260A (en) * | 1992-07-06 | 1994-02-08 | General Electric Company | Spectroscopic imaging system with ultrasonic detection of absorption of modulated electromagnetic radiation |
US5285261A (en) * | 1992-07-06 | 1994-02-08 | General Electric Company | Dual interferometer spectroscopic imaging system |
US5535006A (en) * | 1992-07-16 | 1996-07-09 | Lockheed Idaho Technologies Company | Method and system for evaluating integrity of adherence of a conductor bond to a mating surface of a substrate |
US5505090A (en) * | 1993-11-24 | 1996-04-09 | Holographics Inc. | Method and apparatus for non-destructive inspection of composite materials and semi-monocoque structures |
US5638396A (en) * | 1994-09-19 | 1997-06-10 | Textron Systems Corporation | Laser ultrasonics-based material analysis system and method |
US5679899A (en) * | 1995-03-06 | 1997-10-21 | Holographics Inc. | Method and apparatus for non-destructive testing of structures |
US5585921A (en) * | 1995-03-15 | 1996-12-17 | Hughes Aircraft Company | Laser-ultrasonic non-destructive, non-contacting inspection system |
US5698787A (en) * | 1995-04-12 | 1997-12-16 | Mcdonnell Douglas Corporation | Portable laser/ultrasonic method for nondestructive inspection of complex structures |
US5796004A (en) * | 1995-10-24 | 1998-08-18 | Toppan Printing Co., Ltd. | Method and apparatus for exciting bulk acoustic wave |
US6175416B1 (en) * | 1996-08-06 | 2001-01-16 | Brown University Research Foundation | Optical stress generator and detector |
DE19781728B4 (de) * | 1996-04-26 | 2007-10-18 | Brown University Research Foundation | Optisches Verfahren und System zum Bestimmen mechanischer Eigenschaften eines Materials |
US5982482A (en) * | 1997-07-31 | 1999-11-09 | Massachusetts Institute Of Technology | Determining the presence of defects in thin film structures |
US6057927A (en) * | 1998-02-25 | 2000-05-02 | American Iron And Steel Institute | Laser-ultrasound spectroscopy apparatus and method with detection of shear resonances for measuring anisotropy, thickness, and other properties |
AU3154999A (en) * | 1998-03-26 | 1999-10-18 | British Nuclear Fuels Plc | Improvements in and relating to inspection |
US6256100B1 (en) * | 1998-04-27 | 2001-07-03 | Active Impulse Systems, Inc. | Method and device for measuring the thickness of thin films near a sample's edge and in a damascene-type structure |
US7612890B2 (en) * | 1998-06-30 | 2009-11-03 | Lockheed Martin Corporation | System and method for controlling wafer temperature |
WO2000020841A1 (en) | 1998-10-05 | 2000-04-13 | Kla-Tencor Corporation | Interferometric system for measurement disturbance of a sample |
KR100679082B1 (ko) * | 1999-09-08 | 2007-02-05 | 주식회사 포스코 | 레이저 초음파를 이용한 내부결함 검출 장치 |
JP4220102B2 (ja) * | 2000-05-02 | 2009-02-04 | 富士フイルム株式会社 | 動的変化検出方法、動的変化検出装置及び超音波診断装置 |
WO2002006848A2 (en) * | 2000-07-14 | 2002-01-24 | Lockheed Martin Corporation | System and method for locating and positioning an ultrasonic signal generator for testing purposes |
AU2007200013B2 (en) * | 2000-07-14 | 2010-01-21 | Lockheed Martin Corporation | System and method for locating and positioning an ultrasonic signal generator for testing purposes |
US7671297B2 (en) * | 2003-11-20 | 2010-03-02 | Ethicon, Inc. | Method and apparatus for laser drilling workpieces |
US7576848B2 (en) * | 2004-12-21 | 2009-08-18 | Lockheed Martin Corporation | System and method to decrease probe size for improved laser ultrasound detection |
US7369250B2 (en) * | 2005-03-25 | 2008-05-06 | Lockheed Martin Corporation | System and method to inspect components having non-parallel surfaces |
GB0610318D0 (en) | 2006-05-24 | 2006-07-05 | Univ Nottingham | Transducers |
JP4448189B2 (ja) | 2008-06-18 | 2010-04-07 | キヤノン株式会社 | 生体情報取得装置 |
DE102010037788B4 (de) * | 2010-09-27 | 2012-07-19 | Viprotron Gmbh | Verfahren und Vorrichtung zur Anzeige von automatisiert ermittelten Fehlerstellen |
US9255909B2 (en) * | 2012-03-26 | 2016-02-09 | The Boeing Company | Surface visualization system for indicating inconsistencies |
WO2016100361A1 (en) * | 2014-12-15 | 2016-06-23 | The Board Of Regents For Oklahoma State University | System and method for ultrasonic vibration assisted continuous wave laser surface drilling |
JP6451695B2 (ja) * | 2016-06-02 | 2019-01-16 | 株式会社島津製作所 | 欠陥検査方法及び欠陥検査装置 |
JP6805930B2 (ja) * | 2017-03-29 | 2020-12-23 | 株式会社島津製作所 | 振動測定装置 |
JP6791029B2 (ja) | 2017-06-12 | 2020-11-25 | 株式会社島津製作所 | 欠陥検出方法及び欠陥検出装置 |
JP7099545B2 (ja) * | 2018-12-20 | 2022-07-12 | 株式会社島津製作所 | 欠陥検査装置および欠陥検査方法 |
JP7355637B2 (ja) * | 2019-12-16 | 2023-10-03 | 株式会社ディスコ | 検出装置 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2457253C2 (de) * | 1974-12-04 | 1982-09-02 | Krautkrämer, GmbH, 5000 Köln | Optisches interferometrisches Verfahren und Vorrichtung zur berührungslosen Messung der durch Ultraschallwellen verursachten Oberflächenauslenkung eines Prüflings |
US3978713A (en) * | 1975-05-27 | 1976-09-07 | General Electric Company | Laser generation of ultrasonic waves for nondestructive testing |
DE2707968C2 (de) * | 1977-02-24 | 1984-12-13 | Krautkrämer GmbH, 5000 Köln | Verfahren zum Empfang von Ultraschallwellen unter einem vorbestimmten Auftreffwinkel |
DE2707914A1 (de) * | 1977-02-24 | 1978-08-31 | Krautkraemer Gmbh | Verfahren zur anregung impulsfoermiger ultraschallwellen in der oberflaeche stark licht absorbierender werkstoffe |
DE2707883A1 (de) * | 1977-02-24 | 1978-08-31 | Krautkraemer Gmbh | Verfahren zur erzeugung fokussierter schallwellen durch laserimpulse |
DE2710638C2 (de) * | 1977-03-11 | 1984-10-11 | Krautkrämer GmbH, 5000 Köln | Vorrichtung zum berührungslosen optischen Empfang von Ultraschallwellen in der zerstörungsfreien Werkstoffprüfung |
JPS5831872B2 (ja) * | 1977-12-29 | 1983-07-08 | 住友金属工業株式会社 | 非接触超音波探傷法 |
US4246793A (en) * | 1979-02-08 | 1981-01-27 | Battelle Development Corporation | Nondestructive testing |
DE3002620C2 (de) * | 1980-01-25 | 1984-09-20 | Krautkrämer GmbH, 5000 Köln | Verfahren zum berührungslosen optischen Empfang von Ultraschallwellen |
JPS5722536A (en) * | 1980-06-27 | 1982-02-05 | Semiconductor Res Found | Device for analyzing crystal defect |
DE3029776C2 (de) * | 1980-08-06 | 1983-04-07 | Krautkrämer, GmbH, 5000 Köln | Verfahren zum berührungslosen Empfang von Ultraschallwellen |
US4484820A (en) * | 1982-05-25 | 1984-11-27 | Therma-Wave, Inc. | Method for evaluating the quality of the bond between two members utilizing thermoacoustic microscopy |
-
1983
- 1983-06-15 JP JP58105651A patent/JPS606860A/ja active Granted
-
1984
- 1984-06-13 US US06/620,021 patent/US4581939A/en not_active Expired - Fee Related
- 1984-06-14 DE DE8484106778T patent/DE3484326D1/de not_active Expired - Lifetime
- 1984-06-14 EP EP84106778A patent/EP0129205B1/de not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPH0444951B2 (de) | 1992-07-23 |
JPS606860A (ja) | 1985-01-14 |
EP0129205A2 (de) | 1984-12-27 |
EP0129205A3 (en) | 1989-04-05 |
EP0129205B1 (de) | 1991-03-27 |
US4581939A (en) | 1986-04-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE3484326D1 (de) | Beruehrungsloses ultraschallverfahren um fehlstellen festzustellen. | |
FI842889A (fi) | Partikelsuspensioner foer immunoglutination. | |
DE3481233D1 (de) | Pipelineverarbeitungseinheit. | |
FI842317A0 (fi) | Spiralvaev med liten genomslaepplighet samt foerfarande. | |
DE3483708D1 (de) | Kraftsensor. | |
DE3482852D1 (de) | Induktiver sensor. | |
DE3483782D1 (de) | Flaechenbearbeitungsverfahren. | |
FI844736L (fi) | Alkylfenol- och amino-fenol -kompositioner samt dessa innehaollande tvaotaktsmotoroljor och -braenslen. | |
FI850746L (fi) | Anordning foer detektering av mikroorganismer. | |
NL193227B (nl) | Informatie-verwerkende inrichting. | |
FI842621A (fi) | Skidbindning speciellt foer terraengskidning. | |
FI843253A (fi) | Soembildningsorgan samt verktyg foer soemmens bildande. | |
DE3481019D1 (de) | Hydro-elastomerisches lager. | |
ES538097A0 (es) | Sistema de operaciones en efectivo | |
NO843551L (no) | Sensor. | |
FI843710A0 (fi) | Depao innehaollande aktiv substans. | |
NL188841C (nl) | Afmeerinrichting. | |
NO154688C (no) | Toemmeanordning for bulkgods. | |
DE3850391D1 (de) | Kontaktlose profilierungsmethode. | |
NL183281C (nl) | Afmeerinrichting. | |
DE3483302D1 (de) | Einrichtung zum ermitteln von laufzeitschwankungen. | |
NO151754C (no) | Systemforskaling. | |
NO162974C (no) | Avgasningsapparat. | |
IT8423026A0 (it) | Dispositivo sensore di spigoli. | |
FI844086L (fi) | System foer textdisplay. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |