JPH0426084B2 - - Google Patents
Info
- Publication number
- JPH0426084B2 JPH0426084B2 JP58107103A JP10710383A JPH0426084B2 JP H0426084 B2 JPH0426084 B2 JP H0426084B2 JP 58107103 A JP58107103 A JP 58107103A JP 10710383 A JP10710383 A JP 10710383A JP H0426084 B2 JPH0426084 B2 JP H0426084B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- film
- display
- thin film
- conductive film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010408 film Substances 0.000 claims description 72
- 239000004065 semiconductor Substances 0.000 claims description 25
- 239000010409 thin film Substances 0.000 claims description 24
- 239000000758 substrate Substances 0.000 claims description 13
- 239000011159 matrix material Substances 0.000 claims description 9
- 229910004298 SiO 2 Inorganic materials 0.000 description 14
- 239000004973 liquid crystal related substance Substances 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000000059 patterning Methods 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58107103A JPS59232385A (ja) | 1983-06-15 | 1983-06-15 | アクテイブマトリクス型表示装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58107103A JPS59232385A (ja) | 1983-06-15 | 1983-06-15 | アクテイブマトリクス型表示装置 |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21925893A Division JP2501412B2 (ja) | 1993-08-12 | 1993-08-12 | アクティブマトリクス型表示装置の製造方法 |
| JP21925793A Division JP2501411B2 (ja) | 1993-08-12 | 1993-08-12 | アクティブマトリクス型表示装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59232385A JPS59232385A (ja) | 1984-12-27 |
| JPH0426084B2 true JPH0426084B2 (US07816562-20101019-C00012.png) | 1992-05-06 |
Family
ID=14450530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58107103A Granted JPS59232385A (ja) | 1983-06-15 | 1983-06-15 | アクテイブマトリクス型表示装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59232385A (US07816562-20101019-C00012.png) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60158670A (ja) * | 1984-01-28 | 1985-08-20 | Seiko Instr & Electronics Ltd | 薄膜トランジスタとその製造方法 |
| JPS6178166A (ja) * | 1984-09-25 | 1986-04-21 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタ−アレ−とその製造方法 |
| JPS6188221A (ja) * | 1984-10-08 | 1986-05-06 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタアレイ |
| JPS61116324U (US07816562-20101019-C00012.png) * | 1984-12-30 | 1986-07-23 | ||
| JPS61183622A (ja) * | 1985-02-08 | 1986-08-16 | Seiko Instr & Electronics Ltd | 薄膜トランジスタ装置とその製造方法 |
| JPS61185783A (ja) * | 1985-02-13 | 1986-08-19 | シャープ株式会社 | 薄膜トランジスタの製造方法 |
| JPS61185724A (ja) * | 1985-02-13 | 1986-08-19 | Sharp Corp | 薄膜トランジスタの製造方法 |
| JPH0343435Y2 (US07816562-20101019-C00012.png) * | 1985-02-20 | 1991-09-11 | ||
| JPS61284966A (ja) * | 1985-06-11 | 1986-12-15 | Seiko Instr & Electronics Ltd | 薄膜トランジスタ |
| JP2570255B2 (ja) * | 1985-08-09 | 1997-01-08 | 日本電気株式会社 | 薄膜トランジスタマトリツクスアレ−パネル及びその製造方法 |
| JPH0622244B2 (ja) * | 1985-10-04 | 1994-03-23 | ホシデン株式会社 | 薄膜トランジスタ及びその製造方法 |
| JPS61160428U (US07816562-20101019-C00012.png) * | 1985-10-28 | 1986-10-04 | ||
| JPS62113326U (US07816562-20101019-C00012.png) * | 1986-01-08 | 1987-07-18 | ||
| JPS62252973A (ja) * | 1986-04-25 | 1987-11-04 | Nec Corp | 順スタガ−ド型薄膜トランジスタ |
| JP2845900B2 (ja) * | 1988-09-02 | 1999-01-13 | 株式会社日立製作所 | 液晶表示装置 |
| FR2638880B1 (fr) * | 1988-11-08 | 1990-12-14 | France Etat | Procede de fabrication d'un ecran d'affichage a matrice de transistors pourvus d'un masque optique |
| US5691782A (en) * | 1994-07-08 | 1997-11-25 | Sanyo Electric Co., Ltd. | Liquid-crystal display with inter-line short-circuit preventive function and process for producing same |
| US5777703A (en) * | 1994-09-30 | 1998-07-07 | Sanyo Electric Co., Ltd. | Active matrix type liquid crystal display apparatus with a projection part in the drain line |
| TW347477B (en) * | 1994-09-30 | 1998-12-11 | Sanyo Electric Co | Liquid crystal display with storage capacitors for holding electric charges |
| JP3081474B2 (ja) * | 1994-11-11 | 2000-08-28 | 三洋電機株式会社 | 液晶表示装置 |
| EP0989534B1 (en) | 1998-03-12 | 2005-05-11 | Seiko Epson Corporation | Active matrix light emitting device and method of manufacturing the same |
| KR100766318B1 (ko) | 2005-11-29 | 2007-10-11 | 엘지.필립스 엘시디 주식회사 | 유기 반도체 물질을 이용한 박막트랜지스터와 이를 구비한액정표시장치용 어레이 기판 및 그 제조방법 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5919339A (ja) * | 1982-07-23 | 1984-01-31 | Hitachi Ltd | 加熱装置付きフイ−ダ機構 |
-
1983
- 1983-06-15 JP JP58107103A patent/JPS59232385A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5919339A (ja) * | 1982-07-23 | 1984-01-31 | Hitachi Ltd | 加熱装置付きフイ−ダ機構 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59232385A (ja) | 1984-12-27 |
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