JPH0417929Y2 - - Google Patents
Info
- Publication number
- JPH0417929Y2 JPH0417929Y2 JP18543783U JP18543783U JPH0417929Y2 JP H0417929 Y2 JPH0417929 Y2 JP H0417929Y2 JP 18543783 U JP18543783 U JP 18543783U JP 18543783 U JP18543783 U JP 18543783U JP H0417929 Y2 JPH0417929 Y2 JP H0417929Y2
- Authority
- JP
- Japan
- Prior art keywords
- gate
- insulating layer
- substrate
- thin film
- film transistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 21
- 239000010409 thin film Substances 0.000 claims description 19
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 15
- 239000004973 liquid crystal related substance Substances 0.000 claims description 8
- 239000011159 matrix material Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000009413 insulation Methods 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000001934 delay Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910018557 Si O Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18543783U JPS6092281U (ja) | 1983-11-30 | 1983-11-30 | 液晶表示装置用薄膜トランジスタ基板 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18543783U JPS6092281U (ja) | 1983-11-30 | 1983-11-30 | 液晶表示装置用薄膜トランジスタ基板 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6092281U JPS6092281U (ja) | 1985-06-24 |
| JPH0417929Y2 true JPH0417929Y2 (enrdf_load_stackoverflow) | 1992-04-22 |
Family
ID=30400804
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18543783U Granted JPS6092281U (ja) | 1983-11-30 | 1983-11-30 | 液晶表示装置用薄膜トランジスタ基板 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6092281U (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61145582A (ja) * | 1984-12-20 | 1986-07-03 | キヤノン株式会社 | 表示装置 |
-
1983
- 1983-11-30 JP JP18543783U patent/JPS6092281U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6092281U (ja) | 1985-06-24 |
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