JPH039327Y2 - - Google Patents

Info

Publication number
JPH039327Y2
JPH039327Y2 JP1986137117U JP13711786U JPH039327Y2 JP H039327 Y2 JPH039327 Y2 JP H039327Y2 JP 1986137117 U JP1986137117 U JP 1986137117U JP 13711786 U JP13711786 U JP 13711786U JP H039327 Y2 JPH039327 Y2 JP H039327Y2
Authority
JP
Japan
Prior art keywords
semiconductor wafer
photomask
mask
facet
facet cut
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986137117U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6344446U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986137117U priority Critical patent/JPH039327Y2/ja
Publication of JPS6344446U publication Critical patent/JPS6344446U/ja
Application granted granted Critical
Publication of JPH039327Y2 publication Critical patent/JPH039327Y2/ja
Expired legal-status Critical Current

Links

JP1986137117U 1986-09-06 1986-09-06 Expired JPH039327Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986137117U JPH039327Y2 (enExample) 1986-09-06 1986-09-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986137117U JPH039327Y2 (enExample) 1986-09-06 1986-09-06

Publications (2)

Publication Number Publication Date
JPS6344446U JPS6344446U (enExample) 1988-03-25
JPH039327Y2 true JPH039327Y2 (enExample) 1991-03-08

Family

ID=31040868

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986137117U Expired JPH039327Y2 (enExample) 1986-09-06 1986-09-06

Country Status (1)

Country Link
JP (1) JPH039327Y2 (enExample)

Also Published As

Publication number Publication date
JPS6344446U (enExample) 1988-03-25

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