JPS6344446U - - Google Patents

Info

Publication number
JPS6344446U
JPS6344446U JP13711786U JP13711786U JPS6344446U JP S6344446 U JPS6344446 U JP S6344446U JP 13711786 U JP13711786 U JP 13711786U JP 13711786 U JP13711786 U JP 13711786U JP S6344446 U JPS6344446 U JP S6344446U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
photomask
indicator portion
mask
facet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13711786U
Other languages
English (en)
Japanese (ja)
Other versions
JPH039327Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13711786U priority Critical patent/JPH039327Y2/ja
Publication of JPS6344446U publication Critical patent/JPS6344446U/ja
Application granted granted Critical
Publication of JPH039327Y2 publication Critical patent/JPH039327Y2/ja
Expired legal-status Critical Current

Links

JP13711786U 1986-09-06 1986-09-06 Expired JPH039327Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13711786U JPH039327Y2 (enExample) 1986-09-06 1986-09-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13711786U JPH039327Y2 (enExample) 1986-09-06 1986-09-06

Publications (2)

Publication Number Publication Date
JPS6344446U true JPS6344446U (enExample) 1988-03-25
JPH039327Y2 JPH039327Y2 (enExample) 1991-03-08

Family

ID=31040868

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13711786U Expired JPH039327Y2 (enExample) 1986-09-06 1986-09-06

Country Status (1)

Country Link
JP (1) JPH039327Y2 (enExample)

Also Published As

Publication number Publication date
JPH039327Y2 (enExample) 1991-03-08

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